METHOD AND APPARATUS FOR MAKING SEMICONDUCTOR PACKAGES
    20.
    发明公开
    METHOD AND APPARATUS FOR MAKING SEMICONDUCTOR PACKAGES 审中-公开
    VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON HALBLEITERPAKETEN

    公开(公告)号:EP2057672A1

    公开(公告)日:2009-05-13

    申请号:EP07841549.4

    申请日:2007-08-29

    Abstract: A method of packaging a plurality of semiconductor chips comprises: providing a substrate panel having a first coefficient of thermal expansion (CTE); providing a carrier having a second CTE that is less than the first CTE; heating the substrate panel and the carrier to first and second elevated temperatures respectively; mounting the substrate panel at about the first elevated temperature to the carrier, the carrier being at said second elevated temperature, to provide a connection between the carrier and the substrate panel; and cooling the carrier and the substrate panel from the first and second elevated temperatures thereby putting the substrate panel into tension in at least one direction. A stiffener panel may be affixed to the substrate panel and heated to an elevated temperature and while the substrate panel is heated to an elevated temperature. A plurality of dies may be mounted and electrically connected to the substrate panel. Under-filling of the plurality of dies may occur with the stiffener panel affixed to the substrate panel.

    Abstract translation: 包装多个半导体芯片的方法包括:提供具有第一热膨胀系数(CTE)的基板; 提供具有小于第一CTE的第二CTE的载体; 将基板和载体分别加热到第一和第二升高温度; 将所述基板面板在所述第一升高温度下安装到所述载体,所述载体处于所述第二升高温度,以在所述载体和所述基板面板之间提供连接; 以及从所述第一和第二升高的温度冷却所述载体和所述基板,从而使所述基板在至少一个方向上处于张力状态。 加强板可以固定到基板面板上并被加热到升高的温度,同时将基板面板加热到升高的温度。 多个管芯可以被安装并电连接到衬底面板。 多个模具的欠填充可以在加强板固定到基板上的情况下发生。

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