公开(公告)号：ES2232915T3

公开(公告)日：2005-06-01

申请号：ES98301134

申请日：1998-02-17

Applicant: BAE SYSTEMS PLC

Inventor： HOPKIN IAN DAVID ,  FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  MASON TIMOTHY ROBERT

IPC: G01C19/5677 ,  G01C19/56

Abstract: UN GIROSCOPIO DE ESTRUCTURA VIBRATORIA TIENE UN RESONADOR VIBRATORIO (1) QUE TIENE UNA ESTRUCTURA DE FORMA SUSTANCIALMENTE ANULAR, MEDIOS DE TRANSMISION ELECTROMAGNETICOS PARA HACER QUE EL RESONADOR (1) VIBRE, MEDIOS DE APOYO QUE INCLUYEN VARIAS VIGAS DE APOYO FLEXIBLES (5) PARA APOYAR AL RESONADOR AL TIEMPO QUE LE PERMITEN VIBRAR Y MEDIOS DE DETECCION ELECTROMAGNETICOS PARA DETECTAR EL MOVIMIENTO DEL RESONADOR (1). LAS VIGAS DE APOYO (5) Y EL RESONADOR (1) SON DE SILICIO Y LOS MEDIOS DE DETECCION Y TRANSMISION ELECTROMAGNETICOS ESTAN PROVISTOS DE GUIAS METALICAS (7, 8) QUE SE EXTIENDEN EXTERNAMENTE A LO LARGO DE CADA VIGA DE APOYO (5) SOBRE EL RESONADOR ANULAR (1) Y A LO LARGO DE SEGMENTOS RESPECTIVOS DE UNA SUPERFICIE EXTERIOR SUSTANCIALMENTE PLANAR (1A). EL RESONADOR (1) ES SUSTANCIALMENTE PLANAR Y SE DISPONEN MEDIOS (13, 14, 14A) PARA PRODUCIR UN CAMPO MAGNETICO SUSTANCIALMENTE PERPENDICULAR AL PLANO DEL RESONADOR (1).

公开(公告)号：AT288072T

公开(公告)日：2005-02-15

申请号：AT98301134

申请日：1998-02-17

Applicant: BAE SYSTEMS PLC

Inventor： HOPKIN IAN DAVID ,  FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  MASON TIMOTHY ROBERT

IPC: G01C19/5677 ,  G01C19/56

Abstract: A vibrating structure gyroscope has a vibratory resonator (1) having a substantially ring or hoop-like shape structure, electromagnetic drive means for causing the resonator (1) to vibrate, support means including a plurality of flexible support beams (5) for supporting the resonator whilst allowing it to vibrate and electromagnetic sensing means for sensing movement of the resonator (1). The support beams (5) and resonator (1) are made from silicon and the electromagnetic drive and sensing means are provided by metal tracks (7, 8) which extend externally along each support beam (5) onto and along respective segments of an outer substantially planar surface (1a) the ring-like resonator (1). The resonator (1) is substantially planar and means (13, 14, 14a) are provided to produce a magnetic field substantially perpendicular to the plane of the resonator (1).

公开(公告)号：ES2221469T3

公开(公告)日：2004-12-16

申请号：ES99962348

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: Un método de fabricación de un giroscopio de estructura vibratoria que tiene una estructura vibratoria anular de silicio sustancialmente planar o plana, medios capacitivos para impartir el movimiento de accionamiento y el movimiento de detección de la estructura vibratoria, y una capa de apantallamiento que rodea a los medios capacitivos, que incluye las operaciones de: depositar una primera capa de material fotorresistente en una superficie de una placa tal como sustrato de vidrio o de silicio, endurecer, hacer el diseño y revelar la primera capa fotorresistente para exponer áreas seleccionadas del sustrato, grabar dichas áreas expuestas del sustrato para formar cavidades en él, desmontar la primera capa restante de material fotorresistente de dicho sustrato de cavidad, unir una capa de silicio a la cavidad de dicha superficie del sustrato, depositar una capa de aluminio sobre la superficie de la capa de silicio más alejada de su superficie unida al sustrato, depositar una segunda capa dematerial fotorresistente sobre la superficie más exterior de la capa de aluminio con respecto a la capa de silicio, endurecer, hacer el diseño y revelar la segunda capa fotorresistente para exponer áreas seleccionadas de la capa de aluminio, grabar dichas áreas expuestas de la capa de aluminio para dejar sobre la capa de silicio regiones de aluminio que proporcionan almohadillas de unión para poner a tierra la capa de apantallamiento, almohadillas de unión que forman puntos de conexión para los medios de accionamiento y de detección capacitivos, y almohadillas de unión para conexión eléctrica a la estructura vibratoria anular de silicio sustancialmente planar, desmontar la segunda capa fotorresistente restante de la capa de aluminio, depositar una tercera capa de material fotorresistente sobre la capa de silicio sobre las regiones de la capa de aluminio depositadas restantes, endurecer, hacer el diseño y revelar la tercera capa de material fotorresistente para exponer áreas seleccionadas dela capa de silicio, grabar profundamente con iones reactivos las áreas seleccionadas expuestas de la capa de silicio para formar, a partir de la capa de silicio, los medios de accionamiento y de detección capacitivos, la capa de apantallamiento circundante y la estructura vibratoria anular sustancialmente planar montada por un cubo por encima de las cavidades del sustrato que permiten la oscilación sin restricciones de la estructura anular, y aislar eléctricamente los medios de accionamiento y de detección capacitivos, capa de apantallamiento y estructura vibratoria anular entre sí.

公开(公告)号：DE69919036D1

公开(公告)日：2004-09-02

申请号：DE69919036

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：AU2003283568A1

公开(公告)日：2004-06-15

申请号：AU2003283568

申请日：2003-11-12

Applicant: BAE SYSTEMS PLC

Inventor： TOWNSEND KEVIN ,  KAZER ANDREW ,  FELL CHRISTOPHER PAUL

IPC: G01C19/567 ,  G01C19/56

Abstract: Apparatus for measuring variation in scalefactor from a predetermined value for a vibrating structure gyroscope has a vibrating structure (R), fixed primary and fixed secondary drives ( 1, 13 ) for putting and maintaining the vibrating structure (R) in vibrating resonance, fixed primary and fixed secondary pick offs ( 2, 6 ) for detecting vibration of the vibrating structure (R), with the drives and pick offs ( 1, 13, 2, 6 ) being located radially around the vibrating structure (R), quadrature component and real component loop systems ( 7, 8 ), automatic gain control and phase locked loop systems ( 5, 22 ), a sin/cos pick off resolver ( 38 ) for receiving signals from the primary and secondary pick offs ( 2, 6 ) and for outputting signals to the quadrature component and real component loop systems ( 7, 8 ) and to the automatic gain control and phase locked loop systems ( 5, 22 ), a sin/cos drive resolver ( 37 ) for receiving output signals from the quadrature component and real component loop systems ( 7, 8 ) and from the automatic gain control and phase locked loop systems ( 5, 22 ) and for feeding control signals to the primary and secondary drives ( 1, 13 ), and an angular displacement control ( 40 ) for feeding angular displacement control signals to the sin/cos drive and pick off resolvers ( 38, 37 ) to control uniform displacement of the resolved carrier and response mode drives and pick offs axes angularly around the vibrating structure (R), with respect to a central axis of the vibrating structure, at a known rate.

公开(公告)号：DE69817375D1

公开(公告)日：2003-09-25

申请号：DE69817375

申请日：1998-07-13

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL ,  HOPKIN IAN DAVID ,  TOWNSEND KEVIN

IPC: G01L1/10 ,  G01C19/567 ,  G01P15/10 ,  G01C19/56

公开(公告)号：NO20024839D0

公开(公告)日：2002-10-07

申请号：NO20024839

申请日：2002-10-07

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/56 ,  G01C19/567 ,  G01C

Abstract: A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output. A variable scalefactor loop (3) uses the output from the means (34) actively to adjust a reference voltage set level of loop (1) to adjust the in loop scalefactor of the system.

公开(公告)号：AT221646T

公开(公告)日：2002-08-15

申请号：AT98928455

申请日：1998-06-11

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  HOPKIN IAN DAVID ,  MASON TIMOTHY ROBERT ,  TOWNSEND KEVIN

IPC: G01C19/5684 ,  G01C19/56

公开(公告)号：PL348418A1

公开(公告)日：2002-05-20

申请号：PL34841899

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：CA2353147A1

公开(公告)日：2000-07-06

申请号：CA2353147

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope is made by depositing photoresist material ( 9) on a glass or silicon substrate (7), hardening, patterning and developing th e photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9), attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of alumini um on the silicon layer providing bond pads (11, 12, 13 and 14), forming one mo re layer of patterned photoresist material on the structure and deep reactive i on etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).