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公开(公告)号:ES2342872A1
公开(公告)日:2010-07-15
申请号:ES200901282
申请日:2009-05-20
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
Abstract: Chip que comprende un MEMS dispuesto en un circuito integrado y procedimiento de fabricación correspondiente. Clip que comprende un circuito integrado, con: A) unas capas que configuran unos elementos eléctricos y/o electrónicos sobre un substrato de material semiconductor, B) una estructura de capas de interconexión, con una pluralidad de capas de material conductor (7, 9) separadas por unas capas de material dieléctrico (13), C) por lo menos un MEMS dispuesto en la estructura de capas de interconexión. El MEMS comprende un espacio hueco (15) con una parte del mismo dispuesta debajo de una lámina de material conductor perteneciente a una de las capas de material conductor. El procedimiento de fabricación comprende una etapa de interconexión, en la que se genera la estructura de capas de interconexión, y un ataque posterior con HF gaseoso durante el cual se genera el espacio hueco (15) del MEMS.
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公开(公告)号:ES2246693B1
公开(公告)日:2006-11-01
申请号:ES200400945
申请日:2004-04-19
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
Abstract: Circuito integrado con matriz de conexión analógica. El circuito integrado comprende una matriz de conexión analógica que presenta una pluralidad de contactos analógicos de e/s (2). Los contactos analógicos de e/s (2) presentan una pluralidad de interconexiones (4) eléctricas entre sí a través de unos relés miniaturizados, donde cada uno de los relés miniaturizados comprende un elemento conductor (7) dispuesto en un espacio intermedio (25), dicho elemento conductor (7) siendo apto para efectuar un movimiento entre una primera posición y una segunda posición en función de una señal electromagnética de control y dicho elemento conductor (7) abriendo o cerrando un circuito eléctrico en función de si está en dicha primera posición o dicha segunda posición.
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公开(公告)号:DE60304355T2
公开(公告)日:2006-10-19
申请号:DE60304355
申请日:2003-11-18
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: G02F1/21 , G01C19/56 , G01P15/093 , G01P15/13 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H59/00 , H01Q3/12 , H01Q21/06
Abstract: A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting against the contact points.
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公开(公告)号:DE60304355D1
公开(公告)日:2006-05-18
申请号:DE60304355
申请日:2003-11-18
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: G02F1/21 , G01C19/56 , G01P15/093 , G01P15/13 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H59/00 , H01Q3/12 , H01Q21/06
Abstract: A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting against the contact points.
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公开(公告)号:CA2564473A1
公开(公告)日:2005-11-24
申请号:CA2564473
申请日:2005-05-09
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
Abstract: Regulator circuit and corresponding uses. The regulator circuit comprises at least two input terminals, one or several groups of reactances with at least two reac~tances, at least two output terminals, a plurality of interconnections suitable for con~ necting said reactances with respect to o ne another and suitable for connecting at least one of the reactances with the input and output terminals. The interconnec~tions comprise miniaturised rela ys that allow exchanging a series connection of said reactances for a parallel connection and vice versa. The circuit can comprise, addi~tionally, voltage monitoring means, power supply modules, input and output protec~ tion means, reference signal modules, control modules, etc. The regulator circuit has multiple applications such as charge pump, power supply, DC/DC converter, DC/AC converter, AC/DC converter, D/A converter, AID converter, power amplifier, etc.
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公开(公告)号:CA2506710A1
公开(公告)日:2004-06-03
申请号:CA2506710
申请日:2003-11-18
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: G01C19/56 , G01P15/093 , G01P15/13 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H59/00 , H01Q3/12 , H01Q21/06 , B81B5/00 , H01H45/00
Abstract: The invention relates to a miniature relay comprising: a first zone which is disposed face-to-face with a second zone; a first capacitor plate (3); a second capacitor plate (9) which is disposed in the second zone and which is smaller than or equal to the first plate; an intermediate space (25) between said two zones; a conductive element (7) which is disposed in the aforementioned intermediate space (25), which is mechanically independent of the adjacent walls and which can move freely through said intermediate space (25) as a function of voltages present between the plates; and contact point s (15, 17) belonging to an electric circuit. According to the invention, the above-mentioned conductive element (7) closes the electric circuit by buttin g against the contact points (15, 17). The inventive relays can be used, for example, as an accelerometer, an airbag accelerometer, an inclinometer, a Coriolis force detector, a microphone, for acoustic applications, and as a pressure, flow, temperature, gas, magnetic field sensor, etc.
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公开(公告)号:ES2342872B1
公开(公告)日:2011-05-30
申请号:ES200901282
申请日:2009-05-20
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
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公开(公告)号:DE602005011420D1
公开(公告)日:2009-01-15
申请号:DE602005011420
申请日:2005-04-14
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: H01H59/00 , H01H67/22 , H01L23/525
Abstract: Integrated circuit with analog connection matrix. The integrated circuit includes an analog connection matrix having a plurality of analog i/o contacts. The analog i/o contacts have a plurality of electric interconnections with respect to one another through miniaturized relays, in which each miniaturized relay includes a conductive element arranged in said intermediate space, said conductive element being suitable for effecting a movement between a first position and a second position depending on a control electromagnetic signal and said conductive element opening or closing an electric circuit depending on whether it is in said first position or in said second position.
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公开(公告)号:ES2305527T3
公开(公告)日:2008-11-01
申请号:ES03772360
申请日:2003-11-18
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: B81B5/00 , G01C19/56 , G01P15/093 , G01P15/13 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H45/00 , H01H59/00 , H01Q3/12 , H01Q21/06
Abstract: La invención tiene por objeto un relé miniaturizado que comprende una primera zona enfrentada a una segunda zona, una primera placa de condensador (3), una segunda placa de condensador (9) dispuesta en la segunda zona, y menor o igual que la primera placa, un espacio intermedio (25) entre ambas zonas, un elemento conductor (7) dispuesto en el espacio intermedio (25) y que es mecánicamente independiente de las paredes adyacentes y puede desplazarse libremente a través del espacio intermedio (25) en función de unos voltajes presentes entre ambas placas, unos puntos de contacto (15, 17) de un circuito eléctrico, donde el elemento conductor (7) cierra el circuito eléctrico al topar con los puntos de contacto (15, 17). Estos relés pueden usarse, por ejemplo, como: acelerómetro, acelerómetro en airbags, inclinómetro, detector de fuerzas de Coriolis, micrófono, para aplicaciones acústicas, sensor de presión, caudal, temperatura, gas, campo magnético, etc.
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公开(公告)号:AT394344T
公开(公告)日:2008-05-15
申请号:AT03772360
申请日:2003-11-18
Applicant: BAOLAB MICROSYSTEMS SL
Inventor: MONTANYA SILVESTRE JOSEP
IPC: B81B5/00 , G01C19/56 , G01P15/093 , G01P15/13 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H45/00 , H01H59/00 , H01Q3/12 , H01Q21/06
Abstract: A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting against the contact points.
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