公开(公告)号：WO2013014321A3

公开(公告)日：2013-08-08

申请号：PCT/ES2012070569

申请日：2012-07-25

Applicant: BAOLAB MICROSYSTEMS SL ,  MONTANYA SILVESTRE JOSEP ,  VALLE FRAGA JUAN JOSE ,  BARRACHINA SARALEGUI LAURA

Inventor： MONTANYA SILVESTRE JOSEP ,  VALLE FRAGA JUAN JOSE ,  BARRACHINA SARALEGUI LAURA

IPC: B81C1/00 ,  G01R33/028 ,  G01R33/038 ,  H03H3/007

CPC classification number: G01R33/038 ,  G01R33/0283 ,  G01R33/0286

Abstract: The systems and methods described provide for a magnetometer device that includes a resonating element having an inner wire enclosed in a shielding electrode. The shielding electrode decreases the effect of interference on the resonating element. A sensing electrode is disposed proximate to the resonating element. The device further includes a source for generating current that is connected to the resonating element. The current when applied through the inner wire causes a displacement of the resonating element. The magnetometer device measures a magnetic field of the resonating element as a capacitance variation between the shielding electrode and the sensing electrode. The systems and methods herein provide for an accelerometer device that includes a resonating element having an inner core of dielectric material enclosed in a shielding electrode. The accelerometer device measures an acceleration of the resonating element as a capacitance variation between the shielding electrode and the sensing electrode.

Abstract translation: 所描述的系统和方法提供了一种磁力计装置，其包括具有封闭在屏蔽电极中的内部电线的谐振元件。 屏蔽电极降低对谐振元件的干扰的影响。 传感电极靠近谐振元件设置。 该装置还包括用于产生连接到谐振元件的电流的源。 通过内部线施加的电流导致谐振元件的位移。 磁力计装置测量谐振元件的磁场，作为屏蔽电极和感测电极之间的电容变化。 这里的系统和方法提供了一种加速度计装置，其包括具有封闭在屏蔽电极中的介电材料的内芯的谐振元件。 加速度计装置测量谐振元件的加速度作为屏蔽电极和感测电极之间的电容变化。

公开(公告)号：WO2012066178A3

公开(公告)日：2012-08-02

申请号：PCT/ES2011070806

申请日：2011-11-21

Applicant: BAOLAB MICROSYSTEMS SL ,  MONTANYA SILVESTRE JOSEP

Inventor： MONTANYA SILVESTRE JOSEP

IPC: B81C1/00

CPC classification number: B81C1/00246 ,  B81B2207/07 ,  B81C2203/0714 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01L21/7682

Abstract: A method for manufacturing an integrated circuit including producing layers that form one or more electrical and/or electronic elements on a semiconductor material substrate followed by an Inter Level Dielectric (ILD) layer. Then, producing interconnection layers comprising the steps of depositing a first layer of etch stopper material above the ILD layer, depositing a second layer of dielectric material above and in contact with the first layer, forming at least one track extending through the first and second layers, and filling the at least one track with a non-metallic material.

Abstract translation: 一种用于制造集成电路的方法，所述集成电路包括制造在半导体材料衬底上形成一个或多个电气和/或电子元件的层，随后是层间电介质（ILD）层。 然后，制造互连层，包括以下步骤：在ILD层上方沉积第一层蚀刻阻挡层材料，在第一层上方并与第一层接触沉积第二层介电材料，形成延伸穿过第一层和第二层的至少一个轨道 以及用非金属材料填充所述至少一个轨道。

公开(公告)号：WO2013068633A2

公开(公告)日：2013-05-16

申请号：PCT/ES2012070788

申请日：2012-11-12

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP ,  LLAMAS MOROTE MARC ANTONIO

IPC: B81C1/00 ,  H03H3/007

CPC classification number: B81C1/00246 ,  B81B2201/0271 ,  B81C2203/0714 ,  B81C2203/0742 ,  B81C2203/0771 ,  H03H3/0073 ,  H03H9/2463 ,  H03H2009/02299

Abstract: The invention provides systems and methods for producing a chip comprising a radio-frequency filter which is based on MEMS and is arranged inside an integrated circuit. In one aspect, the systems and methods provide a chip which includes electronic elements formed on a substrate made of semiconductor material. The chip additionally includes an interconnection layer stack which includes layers of conductive material which are separated by layers of dielectric material. A radio-frequency filter is formed inside the interconnection layer stack by applying gaseous HF to the interconnection layers. The radio-frequency filter includes a plurality of resonator elements which are mechanically decoupled.

Abstract translation: 本发明提供了一种用于制造芯片的系统和方法，该芯片包括基于MEMS并布置在集成电路内的射频滤波器。 一方面，该系统和方法提供一种芯片，其包括形成在由半导体材料制成的基板上的电子元件。 芯片还包括互连层堆叠，其包括由电介质材料层隔开的导电材料层。 通过向互连层施加气态HF，在互连层堆叠内部形成射频滤波器。 射频滤波器包括机械解耦的多个谐振元件。

公开(公告)号：WO2012104465A3

公开(公告)日：2012-12-27

申请号：PCT/ES2012070066

申请日：2012-02-01

Applicant: BAOLAB MICROSYSTEMS SL ,  MONTANYA SILVESTRE JOSEP

Inventor： MONTANYA SILVESTRE JOSEP

IPC: B81C1/00

CPC classification number: B81C1/00246 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81C2203/0714 ,  H01L28/40

Abstract: Systems and methods for manufacturing a chip comprising a plurality of MEMS devices arranged in an integrated circuit are provided. In one aspect, the systems and methods provide for a chip including electronic elements formed on a semiconductor material substrate. The chip further includes a stack of interconnection layers including layers of conductor material separated by layers of dielectric material. MEMS devices are formed within the stack of interconnection layers by applying gaseous HF to a first layer of dielectric material positioned highest in the stack of interconnection layers. The stack of interconnection layers includes at least one unetched layer of dielectric material, and at least one layer of conductor material for routing connections to and from the electronic elements.

Abstract translation: 提供了用于制造包括布置在集成电路中的多个MEMS器件的芯片的系统和方法。 在一个方面，所述系统和方法提供了包括形成在半导体材料基板上的电子元件的芯片。 该芯片还包括一叠互连层，包括由电介质材料层隔开的导体材料层。 通过将气态HF施加到位于互连层堆叠中最高位置的第一介电材料层，在互连层的堆叠内形成MEMS器件。 互连层的堆叠包括至少一个介电材料的未蚀刻层，以及至少一层用于将电缆连接到电子元件的导体材料层。

公开(公告)号：WO2005111759A3

公开(公告)日：2006-02-23

申请号：PCT/EP2005005123

申请日：2005-05-09

Applicant: BAOLAB MICROSYSTEMS SL ,  MONTANYA SILVESTRE JOSEP

Inventor： MONTANYA SILVESTRE JOSEP

IPC: H02M3/06 ,  G05F3/00 ,  H03M1/00

CPC classification number: H02M3/06

Abstract: Regulator circuit and corresponding uses. The regulator circuit comprises at least two input terminals, one or several groups of reactances with at least two reac­tances, at least two output terminals, a plurality of interconnections suitable for con­ necting said reactances with respect to one another and suitable for connecting at least one of the reactances with the input and output terminals. The interconnec­tions comprise miniaturised relays that allow exchanging a series connection of said reactances for a parallel connection and vice versa. The circuit can comprise, addi­tionally, voltage monitoring means, power supply modules, input and output protec­ tion means, reference signal modules, control modules, etc. The regulator circuit has multiple applications such as charge pump, power supply, DC/DC converter, DC/AC converter, AC/DC converter, D/A converter, AID converter, power amplifier, etc.

Abstract translation: 调节器电路及相应用途。 调节器电路包括至少两个输入端子，具有至少两个电抗的一组或几组电抗，至少两个输出端子，适于连接相互之间的所述电抗的多个互连，并且适于连接至少一个 与输入和输出端子的电抗。 互连包括小型化的继电器，其允许将并联连接的所述电抗的串联连接交替，反之亦然。 该电路还可以包括电压监测装置，电源模块，输入和输出保护装置，参考信号模块，控制模块等。调节器电路具有多种应用，例如电荷泵，电源，DC / DC转换器， DC / AC转换器，AC / DC转换器，D / A转换器，AID转换器，功率放大器等

公开(公告)号：DE60320832D1

公开(公告)日：2008-06-19

申请号：DE60320832

申请日：2003-11-18

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP

IPC: B81B5/00 ,  G01C19/56 ,  G01P15/093 ,  G01P15/13 ,  H01H35/02 ,  H01H35/14 ,  H01H35/24 ,  H01H36/00 ,  H01H45/00 ,  H01H59/00 ,  H01Q3/12 ,  H01Q21/06

Abstract: A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting against the contact points.

公开(公告)号：AT322033T

公开(公告)日：2006-04-15

申请号：AT03772361

申请日：2003-11-18

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP

IPC: G01C19/56 ,  G01P15/093 ,  G01P15/13 ,  H01H35/02 ,  H01H35/14 ,  H01H35/24 ,  H01H36/00 ,  H01H59/00 ,  H01Q3/12 ,  H01Q21/06 ,  G02F1/21

Abstract: A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting against the contact points.

公开(公告)号：ES2246693A1

公开(公告)日：2006-02-16

申请号：ES200400945

申请日：2004-04-19

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP

IPC: B81B7/04 ,  H01L23/48 ,  H01L23/50

Abstract: Circuito integrado con matriz de conexión analógica. El circuito integrado comprende una matriz de conexión analógica que presenta una pluralidad de contactos analógicos de e/s (2). Los contactos analógicos de e/s (2) presentan una pluralidad de interconexiones (4) eléctricas entre sí a través de unos relés miniaturizados, donde cada uno de los relés miniaturizados comprende un elemento conductor (7) dispuesto en un espacio intermedio (25), dicho elemento conductor (7) siendo apto para efectuar un movimiento entre una primera posición y una segunda posición en función de una señal electromagnética de control y dicho elemento conductor (7) abriendo o cerrando un circuito eléctrico en función de si está en dicha primera posición o dicha segunda posición.

公开(公告)号：CA2563557A1

公开(公告)日：2005-10-27

申请号：CA2563557

申请日：2005-04-14

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP

IPC: H01H59/00 ,  H01H67/22 ,  H01L23/525

Abstract: Integrated circuit with analog connection matrix. The integrated circuit includes an analog connection matrix having a plurality of analog i/o contacts. The analog i/o contacts have a plurality of electric interconnections with respect to one another through miniaturized relays, in which each miniaturized relay includes a conductive element arranged in said intermediate space, said conductive element being suitable for effecting a movement between a first position and a second position depending on a control electromagnetic signal and said conductive element opening or closing an electric circuit depending on whether it is in said first position or in said second position.

公开(公告)号：CA2506775A1

公开(公告)日：2004-06-03

申请号：CA2506775

申请日：2003-11-18

Applicant: BAOLAB MICROSYSTEMS SL

Inventor： MONTANYA SILVESTRE JOSEP

IPC: G01C19/56 ,  G01P15/093 ,  G01P15/13 ,  H01H35/02 ,  H01H35/14 ,  H01H35/24 ,  H01H36/00 ,  H01H59/00 ,  H01Q3/12 ,  H01Q21/06 ,  G02F1/21

Abstract: The invention relates to a miniature electro-optic device comprising: a firs t zone which is disposed face-to-face with a second zone; a first capacitor plate; a second capacitor plate which is disposed in the second zone and whi ch is smaller than or equal to the first plate; an intermediate space between said two zones; a conductive element which is disposed in the aforementioned intermediate space, which is independent of the lateral walls and which move s therethrough as a function of voltages present between the two plates; two light input/output points belonging to an optical circuit; and a stop elemen t. According to the invention, when in contact with the above-mentioned stop element, the conductive element alters the light passage state between the input/output points. The inventive device can be used as an accelerometer, a n inclinometer, a Coriolis force detector, a microphone, for acoustic applications, for the production of an optical switching matrix, for the projection of images, and as a pressure, flow, temperature, gas sensor, etc.