Microfabricated elastomeric valve and pump systems
    14.
    发明公开
    Microfabricated elastomeric valve and pump systems 有权
    弹性微型泵或微型阀系统

    公开(公告)号:EP1195523A3

    公开(公告)日:2003-01-08

    申请号:EP01128819.8

    申请日:2000-06-27

    CPC classification number: F04B43/043 F15C5/00

    Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

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