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公开(公告)号：US20240110779A1
公开(公告)日：2024-04-04
申请号：US18535364
申请日：2023-12-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
IPC: G01B9/02 , B81B3/00 , G01J3/02 , G01J3/10 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/08 , G02B27/14
CPC classification number: G01B9/02051 , B81B3/00 , B81B3/0021 , B81B3/007 , G01B9/02049 , G01J3/0202 , G01J3/021 , G01J3/0237 , G01J3/108 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/0816 , G02B26/0833 , G02B26/0841 , G02B27/144 , B81B2201/042 , B81B2203/0154 , G01J2003/104 , G01J3/4532
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20210132367A1
公开(公告)日：2021-05-06
申请号：US16625685
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.
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公开(公告)号：US20210132366A1
公开(公告)日：2021-05-06
申请号：US16492712
申请日：2018-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO
Abstract: An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.
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公开(公告)号：US20210130159A1
公开(公告)日：2021-05-06
申请号：US16625687
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.
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公开(公告)号：US20240004144A1
公开(公告)日：2024-01-04
申请号：US18039038
申请日：2021-10-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kazuo IWAZAKI , Tatsuya SUGIMOTO , Katsumi SHIBAYAMA
CPC classification number: G02B6/3624 , G01N21/35 , G01N2021/3595 , G01N2201/08
Abstract: A light source unit includes a plurality of light sources emitting light for irradiating an object, and a holding portion holding the plurality of light sources having an insertion hole for an optical fiber inserted therethrough to propagate the light from the object formed therein. The holding portion holds each of the plurality of light sources such that an irradiation region of the light of each of the plurality of light sources is formed on one side of the holding portion. The insertion hole has a first opening that is an opening facing the irradiation region and a second opening that is an opening different from the first opening, and is formed in the holding portion such that one end surface of the optical fiber is exposed from the first opening and faces the irradiation region when the optical fiber is inserted therethrough.
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Patent Agency Ranking
公开(公告)号：US20210132330A1
公开(公告)日：2021-05-06
申请号：US16625698
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.
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公开(公告)号：US20210130160A1
公开(公告)日：2021-05-06
申请号：US16625701
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.
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公开(公告)号：US20200049975A1
公开(公告)日：2020-02-13
申请号：US16492691
申请日：2018-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Tatsuya SUGIMOTO , Kyosuke KOTANI
Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.
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公开(公告)号：US20200049974A1
公开(公告)日：2020-02-13
申请号：US16492672
申请日：2018-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Kyosuke KOTANI , Tomofumi SUZUKI , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Nao INOUE , Masashi ITO , Yutaka KURAMOTO
Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.
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公开(公告)号：US20160202037A1
公开(公告)日：2016-07-14
申请号：US14911583
申请日：2014-07-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Yoshihisa WARASHINA , Kohei KASAMORI , Tatsuya SUGIMOTO , Jo ITO
CPC classification number: G01B9/02051 , G01J3/0256 , G01J3/4532 , G01J3/4535
Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.
Abstract translation: 一种制造光干涉仪的方法包括：形成用于分束器的第一半导体部分和在支撑基板的主表面上形成的可移动反射镜的第二半导体部分和形成在主表面上的第一绝缘层的第一步骤， 在第一半导体部分的第一侧表面和第二半导体部分中的第二侧表面之间布置第一壁部分的第二步骤，以及通过在第二半导体部分中形成第一金属膜来形成第二半导体部分中的镜面的第三步骤 第二侧面使用荫罩。 在第三步骤中，第一侧表面被掩模部分掩蔽，并且第一壁部分和第一金属膜形成在第二侧部分从开口部分露出的状态。
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