-
公开(公告)号：CA3024961A1
公开(公告)日：2017-11-30
申请号：CA3024961
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KASAHARA TAKASHI , SHIBAYAMA KATSUMI , HIROSE MASAKI , KAWAI TOSHIMITSU , OYAMA HIROKI , KURAMOTO YUMI
Abstract: A production method for a Fabry-Perot interference filter, the production method comprising a formation step, a cutting step that is after the formation step, and a removal step that is between the formation step and the cutting step or after the cutting step. The formation step is for: forming, on a first main surface of a wafer, a first mirror layer that has a plurality of first mirror parts, a sacrificial layer that has a plurality of removal parts, and a second mirror layer that has a plurality of second mirror parts; and forming a first thinned region at which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer has been partially thinned along each of a plurality of lines. The cutting step is for: forming a reformed region inside the wafer along each of the plurality of lines by irradiation with laser light; and cutting the wafer along the plurality of lines into a plurality of substrates. The removal step is for removing the removal parts from the sacrificial layer by etching.
-
公开(公告)号：EP3064913A4
公开(公告)日：2017-09-06
申请号：EP14857901
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MASAKI , KAWAI TOSHIMITSU
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
-
公开(公告)号：EP3106910A4
公开(公告)日：2018-01-10
申请号：EP15748967
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MASAKI , KAWAI TOSHIMITSU
CPC classification number: G02B26/001 , G01J3/26 , G02B5/284
Abstract: A Fabry-Perot interference filter 10A includes a fixed mirror 31 and a movable mirror 41 disposed opposite to the fixed mirror 31 via a gap S, distance between the fixed mirror 31 and the movable 41 in a light transmission region 11 being adjusted by electrostatic force. A plurality of first annular grooves 44 surrounding the light transmission region 11 and a plurality of first through-holes 45 opening to the gap S side and the opposite side are formed at a surrounding portion 41 a surrounding the light transmission region 11 in the movable mirror 41.
-
公开(公告)号：EP3018521A4
公开(公告)日：2017-04-12
申请号：EP14820407
申请日：2014-06-24
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MASAKI , KAWAI TOSHIMITSU
CPC classification number: G02B26/001 , G01J3/26
-
15.发明公开
公开(公告)号：EP2884264A4
公开(公告)日：2016-08-31
申请号：EP13827643
申请日：2013-08-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , ITO MASASHI , YOKINO TAKAFUMI , HIROSE MASAKI , YOSHIDA ANNA , OFUJI KAZUTO , MARUYAMA YOSHIHIRO , KASAHARA TAKASHI , KAWAI TOSHIMITSU , HIROHATA TORU , KAMEI HIROKI , OYAMA HIROKI
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2021/651
Abstract: A SERS element 2 comprises a substrate 21 having a front face 21 a; a fine structure part 24 formed on the front face 21a and having a plurality of pillars 27; and a conductor layer 23 formed on the fine structure part 24 and constituting an optical function part 20 for generating surface-enhanced Raman scattering. The conductor layer 23 has a base part 28 formed along the front face 21 a and a plurality of protrusions 29 protruding from the base part 28 at respective positions corresponding to the pillars 27. The base part 28 has a thickness greater than the height of the pillars 27.
-
Patent Agency Ranking
公开(公告)号：EP3064914A4
公开(公告)日：2017-09-06
申请号：EP14859201
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MASAKI , KAWAI TOSHIMITSU
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
-
公开(公告)号：EP3064912A4
公开(公告)日：2017-09-06
申请号：EP14857161
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MASAKI , KAWAI TOSHIMITSU
CPC classification number: G01J3/26 , G01J3/0286
Abstract: A spectral sensor 1 includes a wiring substrate 2 which has a principal surface; a light detector 3 which is disposed on the principal surface 2A of the wiring substrate 2 and is electrically connected to the wiring substrate 2; spacer 4 which is disposed around the light detector 3, on the principal surface 2A of the wiring substrate 2; and a Fabry-Perot interference filter 10 which has a light transmission region 11 and is disposed on the principal surface 2A of the wiring substrate 2 with the spacer 4 therebetween. The spacer 4 support the Fabry-Perot interference filter 10 in a surrounding region R1 of the light transmission region 11 and the spacer 4 has opening A1 communicating with an inner side of the surrounding region R1 and an outer side of the surrounding region R1, when viewed from a light transmission direction in the light transmission region 11.
Abstract translation: 光谱传感器1包括具有主表面的布线基板2; 设置在配线基板2的主面2A上并与配线基板2电连接的光检测器3， 在布线基板2的主面2A上配置在光检测器3的周围的间隔件4， 以及法布里 - 珀罗干涉滤光片10，其具有透光区域11，隔着间隔物4配置在布线基板2的主面2A上。 间隔物4在光透射区域11的周围区域R1中支撑法布里 - 珀罗干涉滤光片10，并且当隔离物4具有与周围区域R1的内侧和周围区域R1的外侧连通的开口A1时 从光透射区域11中的光透射方向观察。
-
公开(公告)号：EP2884265A4
公开(公告)日：2016-09-28
申请号：EP13828081
申请日：2013-08-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SHIBAYAMA KATSUMI , ITO MASASHI , YOKINO TAKAFUMI , HIROSE MASAKI , YOSHIDA ANNA , OFUJI KAZUTO , MARUYAMA YOSHIHIRO , KASAHARA TAKASHI , KAWAI TOSHIMITSU , HIROHATA TORU , KAMEI HIROKI , OYAMA HIROKI
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2201/068
Abstract: A SERS element 2 comprises a substrate 21 having a front face 21 a; a fine structure part 24 formed on the front face 21a and having a plurality of pillars 27; and a conductor layer 23 formed on the fine structure part 24 and constituting an optical function part 20 for generating surface-enhanced Raman scattering. The conductor layer 23 has a base part 28 formed along the front face 21a and a plurality of protrusions 29 protruding from the base part 28 at respective positions corresponding to the pillars 27. The base part 28 is formed with a plurality of grooves 28a surrounding the respective pillars 27 when seen in the projecting direction of the pillars 27, while an end part 29a of the protrusion 29 is located within the groove 28a corresponding thereto.
-
公开(公告)号：EP2884262A4
公开(公告)日：2016-08-03
申请号：EP13827352
申请日：2013-08-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor： ITO MASASHI , SHIBAYAMA KATSUMI , KAWAI TOSHIMITSU , OFUJI KAZUTO , OYAMA HIROKI , MARUYAMA YOSHIHIRO , YOKINO TAKAFUMI , HIROSE MASAKI , YOSHIDA ANNA
CPC classification number: G01N21/658 , B82Y40/00
-
公开(公告)号：JP2015011311A
公开(公告)日：2015-01-19
申请号：JP2013138867
申请日：2013-07-02
Applicant: 浜松ホトニクス株式会社 , Hamamatsu Photonics Kk
Inventor： SHIBAYAMA KATSUMI , KASAHARA TAKASHI , HIROSE MAKI , KAWAI TOSHIMITSU
IPC: G02B26/00
CPC classification number: G02B26/001 , G01J3/26
Abstract: 【課題】所望の波長を有する光を好適に透過させることができるファブリペロー干渉フィルタを提供する。【解決手段】ファブリペロー干渉フィルタ10Aは、第1ミラー31と、空隙Sを介して第1ミラー31と対向する第2ミラー41と、光透過領域11を囲むように第1ミラー31に形成された第1電極17と、光透過領域11を含むように第1ミラー31に形成された第2電極18と、第1電極17及び第2電極18と対向するように第2ミラー41に形成され、第2電極18と同電位に接続された第3電極19と、を備え、第2電極18は、第1ミラー31と第2ミラー41とが対向する対向方向Dにおいて、第1電極17に対して第3電極19側又はその反対側に位置している。【選択図】図2
Abstract translation: 要解决的问题：提供能够最佳地透射所需波长的光的法布里 - 珀罗干涉滤光器。解决方案：法布里 - 珀罗干涉滤光片10A包括： 第一反射镜31; 面对第一反射镜31的第二反射镜41，其间具有气隙S; 形成在第一反射镜31上以围绕透光区域11的第一电极17; 形成在第一反射镜31上以包括透光区域11的第二电极18; 以及形成在第二反射镜41上以面对第一电极17和第二电极18并且连接到与第二电极18相同的电位的第三电极19.第二电极18位于第三电极19侧或第 相对于第一电极17在第一反射镜31和第二反射镜41彼此面对的相对方向D上相对。
-
-
-
-
-
-
-
-
-
Search Results
29
records
(took 0.024 seconds)
