FLUIDIC TRANSPORT INTERSECTION
    17.
    发明专利

    公开(公告)号:CA1048958A

    公开(公告)日:1979-02-20

    申请号:CA262578

    申请日:1976-10-01

    Applicant: IBM

    Abstract: FLUIDIC TRANSPORT INTERSECTION The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between processing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the processing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.

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