Abstract:
FLUIDIC TRANSPORT INTERSECTION The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between processing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the processing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.