公开(公告)号：US3654109A

公开(公告)日：1972-04-04

申请号：US3654109D

申请日：1968-04-25

Applicant: IBM

Inventor： HOHL JAKOB H ,  RAACKE KARL H

IPC: G01N21/33 ,  C23C14/54 ,  G01B11/06 ,  C23C15/00

CPC classification number: C23C14/544

Abstract: RATE, THICKNESS, AND COMPOSITION OF MATERIALS DEPOSITED IN VAPOR DEPOSITION PROCESSES MAY BE MEASURED, EVEN AT VERY LOW DEPOSITION RATES, USING THE DISCLOSED ATOMIC ABSORPTION SPECTROSCOPY APPARTUS. THE APPARATUS HAS A SOURCE OF RADIANT ENERGY HAVING A SELECTED WAVELENGTH ABSORBED BY THE MATERIAL SOUGHT TO BE MEASURED AND MEANS FOR MEASURING THE TOTAL AMOUNT OF RADIANT ENERGY SO ABSORBED AT THE SELECTED WAVELENGTH. IT FURTHER INCLUDES

MEANS FOR CONVERTING THIS ABSORPTION MEASURMENT TO A RATE AND/OR THICKNESS MEASUREMENT AND ALSO A COMPOSITION MEASUREMENT, IF DESIRED. RADIANT ENERGY IN THE UTLRAVIOLET LIGHT SPECTRUM IS NORMALLY EMPLOYED, AND THE DISCLOSED APPARATUS AND METHOD IS PARTICULARLY SUITED FOR MEASURING DEPOSITION PARAMETERS IN THE FABRICATION OF NICKEL-IRON MAGNETIC FILMS.

公开(公告)号：CA1049158A

公开(公告)日：1979-02-20

申请号：CA262458

申请日：1976-10-01

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H ,  TOWNSEND CLARENCE J

IPC: B65G49/07 ,  B65G51/03 ,  B65H5/22 ,  H01L21/50 ,  H01L21/677 ,  H01L21/68 ,  B65G51/02

Abstract: TRANSPORT SYSTEM FOR SEMICONDUCTOR WAFER MULTIPROCESSING STATION SYSTEM The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further said transport system embodies among other features means for bidirectional travel with cross over intersections, directional control means, buffer sections and fluid vector means from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a means for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form.

公开(公告)号：CA1048958A

公开(公告)日：1979-02-20

申请号：CA262578

申请日：1976-10-01

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H

IPC: B65G47/68 ,  B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G51/02

Abstract: FLUIDIC TRANSPORT INTERSECTION The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between processing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the processing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.

公开(公告)号：CA905701A

公开(公告)日：1972-07-25

申请号：CA905701D

Applicant: IBM

Inventor： RAACKE KARL H ,  HOHL JAKOB H

公开(公告)号：FR2345373A1

公开(公告)日：1977-10-21

申请号：FR7623754

申请日：1976-07-28

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H ,  TOWNSEND CLARENCE J

IPC: B65G49/07 ,  B65G51/03 ,  B65H5/22 ,  H01L21/50 ,  H01L21/677 ,  B65G51/02 ,  B65G49/00 ,  H01L21/00

公开(公告)号：FR2345372A1

公开(公告)日：1977-10-21

申请号：FR7623753

申请日：1976-07-28

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRG VALDEKO H

IPC: B65G47/68 ,  B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G49/00 ,  B65G51/02 ,  H01L21/68