公开(公告)号：CA1049158A

公开(公告)日：1979-02-20

申请号：CA262458

申请日：1976-10-01

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H ,  TOWNSEND CLARENCE J

IPC: B65G49/07 ,  B65G51/03 ,  B65H5/22 ,  H01L21/50 ,  H01L21/677 ,  H01L21/68 ,  B65G51/02

Abstract: TRANSPORT SYSTEM FOR SEMICONDUCTOR WAFER MULTIPROCESSING STATION SYSTEM The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further said transport system embodies among other features means for bidirectional travel with cross over intersections, directional control means, buffer sections and fluid vector means from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a means for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form.

公开(公告)号：CA1048958A

公开(公告)日：1979-02-20

申请号：CA262578

申请日：1976-10-01

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H

IPC: B65G47/68 ,  B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G51/02

Abstract: FLUIDIC TRANSPORT INTERSECTION The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between processing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the processing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.

公开(公告)号：FR2345373A1

公开(公告)日：1977-10-21

申请号：FR7623754

申请日：1976-07-28

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRGO VALDEKO H ,  TOWNSEND CLARENCE J

IPC: B65G49/07 ,  B65G51/03 ,  B65H5/22 ,  H01L21/50 ,  H01L21/677 ,  B65G51/02 ,  B65G49/00 ,  H01L21/00

公开(公告)号：FR2345372A1

公开(公告)日：1977-10-21

申请号：FR7623753

申请日：1976-07-28

Applicant: IBM

Inventor： BABINSKI JOHN P ,  BERTELSEN BRUCE I ,  RAACKE KARL H ,  SIRG VALDEKO H

IPC: B65G47/68 ,  B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G49/00 ,  B65G51/02 ,  H01L21/68