公开(公告)号：CA1089115A

公开(公告)日：1980-11-04

申请号：CA291046

申请日：1977-11-16

Applicant: IBM

Inventor： HASSAN JAVATHU K ,  PAIVANAS JOHN A

IPC: B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/22 ,  H01L21/677 ,  H05K13/00 ,  B65G51/02

Abstract: PNEUMATIC CONTROL OF THE MOTION OF OBJECTS SUSPENDED ON AN AIR FILM This specification deals with the stopping, positioning,orienting and redirecting a semiconductor wafer being transported along a track on an air film or bed of air. The stopping mechanism is an air jet located in a groove in the track, wafers passing over this air jet on an air film are sensed by a pneumatic sensor that turns on the air jet to set up an air stream under the transporting surface of the air film. This air stream sucks the fluid in the air film along with it in the groove causing a vacuum in the bed in the area of the nozzle of the air jet. The wafers are then stopped by the suction of the vacuum. Positioning, orienting and redirecting is done using the air jet and pneumatic sensor in combination with special air jet arrangements and operations.

公开(公告)号：FR2375115A1

公开(公告)日：1978-07-21

申请号：FR7736944

申请日：1977-12-02

Applicant: IBM

Inventor： HASSAN JAVATHU K ,  PAIVANAS JOHN A

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G7/06

Abstract: The transportation of semiconductor wafers along a track on an air film. The supporting air film is controlled by the track configuration and fluid relationships to eliminate the need of a wafer guide on restraint to keep the wafers on the track.

公开(公告)号：DE2442679A1

公开(公告)日：1975-03-27

申请号：DE2442679

申请日：1974-09-06

Applicant: IBM

Inventor： HASSAN JAVATHU K ,  RABSTEJNEK CARL VINCENT ,  WUTKA ANTHONY DALE

IPC: B23Q1/36 ,  G05B19/39 ,  B23Q5/28