公开(公告)号：DE2628818A1

公开(公告)日：1977-01-27

申请号：DE2628818

申请日：1976-06-26

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  RABSTEJNEK CARL VINCENT

IPC: H01J37/20 ,  B23K15/00 ,  B23Q1/62 ,  B23Q11/08 ,  H01J37/30 ,  H01J37/317 ,  H01L21/027 ,  H01L21/68 ,  B25B11/00

Abstract: Disclosed is an X-Y table for positioning semiconductor workpieces in a vacuum environment with a high degree of speed and accuracy. The X and Y prime movers are mounted on adjacent external surfaces of the vacuum chamber. The first motor associated with the drive in the Y direction seals with an O-ring onto the front surface of the chamber. A second motor associated with the X drive is fixedly mounted to one of the sides of the chamber. The lower stage providing motion in the Y direction has a single degree of freedom relative to the vacuum chamber. The upper stage providing motion in the X direction is connected to the lower Y stage and has two degrees of freedom relative to the vacuum chamber. The entire X-Y table assembly is mounted on rails in parallel with the Y direction of motion such that by removing the front wall of the vacuum chamber, the entire assembly may be removed for repair and/or maintenance. By such modular replacement, the entire E-beam tool can resume operation.

公开(公告)号：DE2442679A1

公开(公告)日：1975-03-27

申请号：DE2442679

申请日：1974-09-06

Applicant: IBM

Inventor： HASSAN JAVATHU K ,  RABSTEJNEK CARL VINCENT ,  WUTKA ANTHONY DALE

IPC: B23Q1/36 ,  G05B19/39 ,  B23Q5/28