MAGNETORESISTIVE READ TRANSDUCER ASSEMBLY

    公开(公告)号:CA1306803C

    公开(公告)日:1992-08-25

    申请号:CA572877

    申请日:1988-07-22

    Applicant: IBM

    Inventor: HOWARD JAMES K

    Abstract: IMPROVED MAGNETORESISTIVE READ TRANSDUCER ASSEMBLY A magnetoresistive (MR) sensor which is provided with longitudinal bias by means of exchange coupling between the ferromagnetic MR layer (NiFe) and an ultrathin layer of an antiferromagnetic material (FeMn) with a thickness within the range of about 25 to 200 angstroms. The exchange structure is capped by a protective film to prevent oxidation damage to the exchange structure during subsequent thermal cycling. The capping layer is a dielectric or metal oxide (cermet) film such as Cr2 O3, A12 O3, Cr - Si O or Si O2. Alternatively, the capping layer can be a laminated FeMn-Lx film where LX is taken from the group consisting of Cr2 O3, A12 O3, and Si O2. SA987006

    SCHOTTKY BARRIER CONTACT AND METHODS OF FABRICATION THEREOF

    公开(公告)号:CA1079867A

    公开(公告)日:1980-06-17

    申请号:CA287496

    申请日:1977-09-26

    Applicant: IBM

    Abstract: AN IMPROVED SCHOTTKY BARRIER CONTACT AND METHODS OF FABRICATION THEREOF An aluminum-transition metal Schottky barrier contact, and methods of fabrication thereof are disclosed. In one preferred embodiment, the junction is comprised of an aluminum-tantalum intermetallic layer abutting a silicon substrate. Alternate embodiments utilize an intermetallic compound of a metal selected from the group of tantalum, zirconium, hafnium, niobium, titanium and nickel in combination with aluminum. The preferred embodiments can be fabricated by evaporation of a layer of a metal selected from the above mentioned group followed by evaporation of a layer of aluminum on a silicon substrate, after which an annealing step is utilized which creates the desired intermetallic compound in a layer abutting the silicon surface. Alternatively, the junction can be created by hot or cold sputtering of a preselected intermetallic compound of one of the metals with aluminum directly upon the silicon substrate, followed by deposition of a conductive layer such as aluminum. In the case of cold sputtering an annealing step is required to perfect the desired intermetallic compound structure; and in the case of hot sputtering an annealing step may be useful in perfecting the desired intermetallic structure, although it is not essential. The resulting devices are highly thermally stable with predictable barrier heights; and exhibit excellent electrical properties while they are capable of fabrication with good planarity.

    14.
    发明专利
    未知

    公开(公告)号:FR2376519A1

    公开(公告)日:1978-07-28

    申请号:FR7735961

    申请日:1977-11-21

    Applicant: IBM

    Abstract: An aluminum-transition metal Schottky barrier contact, and methods of fabrication thereof are disclosed. In one preferred embodiment, the junction is comprised of an aluminum-tantalum intermetallic layer abutting a silicon substrate. Alternate embodiments utilize an intermetallic compound of a metal selected from the group of tantalum, zirconium, hafnium, niobium, titanium and nickel in combination with aluminum. The preferred embodiments can be fabricated by evaporation of a layer of a metal selected from the above mentioned group followed by evaporation of a layer of aluminum on a silicon substrate, after which an annealing step is utilized which creates the desired intermetallic compound in a layer abutting the silicon surface. Alternatively, the junction can be created by hot or cold sputtering of a preselected intermetallic compound of one of the metals with aluminum directly upon the silicon substrate, followed by deposition of a conductive layer such as aluminum. In the case of cold sputtering an annealing step is required to perfect the desired intermetallic compound structure; and in the case of hot sputtering an annealing step may be useful in perfecting the desired intermetallic structure, although it is not essential. The resulting devices are highly thermally stable with predictable barrier heights; and exhibit excellent electrical properties while they are capable of fabrication with good planarity.

    Multilayer magnetoresistive sensor.

    公开(公告)号:PH30835A

    公开(公告)日:1997-11-03

    申请号:PH49556

    申请日:1994-12-14

    Applicant: IBM

    Abstract: A magnetoresistive read sensor incorporates a multilayer sensing element formed of one or more magnetoresistive elements in a planar array, each magnetoresistive element having a multilayer structure of at least two ferromagnetic layers separated by a nonmagnetic layer. The ferromagnetic layers are coupled antiferromagnetically by magnetostatic coupling at opposing edges of the ferromagnetic layers. A bias layer separated from the magnetoresistive sensing element by a spacer layer provides a magnetic field to bias the magnetoresistive sensing element at a desired non-signal point for linear response. The magnetoresistive sensing element is formed by alternatively depositing layers of ferromagnetic material and layers of nonmagnetic material on a substrate and then patterning the resulting structure using photolithographic techniques to provide a planar array of magnetoresistive elements. A conductive layer is deposited over the array filling in the spaces separating the magnetoresistive elements to provide electrical conductivity between the elements in the plane of the structure.

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