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公开(公告)号：DE69823578D1
公开(公告)日：2004-06-09
申请号：DE69823578
申请日：1998-02-16
Applicant: IBM
Inventor： MOSER ANDREAS , WELLER DIETER KLAUS
Abstract: A probe (10) for use in an alternating current magnetic force microscopy (MFM) system is located on the free end of a cantilever (50) in the MFM system. The probe (10) has a pair of magnetic poles (P1,P2) that form part of a magnetic yoke and a patterned electrically conductive coil (11) wound through the yoke. The probe (10) includes a probe tip (20) that has a magnetic surface layer that is magnetically coupled to one of the poles and extends from it. When alternating current from the MFM system is passed through the probe coil (11) the magnetisation direction of the probe tip correspondingly alternates. The interaction of these alternating magnetic fields from the probe tip (20) with the magnetic fields emanating from the sample whose magnetic fields are to be measured causes the cantilever (50) to deflect between two extreme positions. The probe (10) can be formed from a portion of a disk drive air-bearing slider with a patterned thin film inductive write head on its trailing end by growing the probe tip (20) from the slider's air-bearing surface (ABS) so as to be in contact with the gap and one of the poles of the write head. The probe (10) can also be part of an integrated single-piece structure that includes the cantilever (50), probe body and probe tip (20) which are formed using conventional thin film deposition and lithographic processes.
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