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    ALTERNATING CURRENT MAGNETIC MICROSCOPE SYSTEM
    1.
    发明专利
    ALTERNATING CURRENT MAGNETIC MICROSCOPE SYSTEM 失效

    公开(公告)号：JPH11166937A

    公开(公告)日：1999-06-22

    申请号：JP5859598

    申请日：1998-03-10

    Applicant: IBM

    Inventor： MOSER ANDREAS ,  WELLER DIETER KLAUS

    IPC: G01B7/34 ,  G01B7/00 ,  G01N37/00 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01R33/12

    Abstract: PROBLEM TO BE SOLVED: To improve the resolution of a magnetic microscope system by swinging a cantilever in an opposite direction by the interaction between a magnetic field from a magnetic sample and an alternating magnetic field in a probe tip. SOLUTION: An XYZ scanning device maintains the surfaces of a probe tip 20 and a sample 60 at a constant interval at a distance approximately 10-50 nm from the probe tip 20 to a z-direction. Then at the time when the XYZ scanning device moves the sample 60 along a line, a modulator 70 switches current to change the magnetization of the prove tip 20 at a frequency W0 in an opposite direction via a conductive coil 11 and to generate an alternating magnetic filed. The probe tip 20 is vertically swung by the interaction between the alternating magnetic field and the magnetic field of the sample 60. The displacement of the cantilever 50 is detected by a quadrant detector 76, and a lock-in amplifier 78 detects the phase and the peak-to-peak amplitude of the input signal. By this, a magnetic sample is not affected by the stray magnetic field of the conductive coil 11, and the resolution of a magnetic microscope system is improved.

    PROBE FOR MAGNETIC MICROSCOPE AND CANTILEVER ASSEMBLY
    2.
    发明专利
    PROBE FOR MAGNETIC MICROSCOPE AND CANTILEVER ASSEMBLY 失效

    公开(公告)号：JPH11166936A

    公开(公告)日：1999-06-22

    申请号：JP5851998

    申请日：1998-03-10

    Applicant: IBM

    Inventor： MOSER ANDREAS ,  WELLER DIETER KLAUS

    IPC: G01B7/34 ,  G01B7/00 ,  G01N37/00 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01R33/12

    Abstract: PROBLEM TO BE SOLVED: To improve the resolution of a magnetic microscope system without a magnetic sample being affected by a stray magnetic field from a coil by alternating a probe tip by a magnetic field concentrated to the probe tip. SOLUTION: An XYZ scanning device supports a sample 60, and the probe tip 20 of a probe 10 can be placed at various XY locations of the sample 60. In addition, a modulator 70 generates current pulses of a constant frequency W0 to a conductive coil 11 belonging to the probe 10. Then the laser beam of a laser light source 74 is reflected at the back surface of a cantilever 50. The reflected light is detected by a quadrant detector 76, and a lock-in amplifier 78 measures the phase and the peak to-peak amplitude of the input signal. Its output corresponds to data indicating the signal of the probe 10, and the signal indicates a force caused by the interaction between the magnetic field of the sample 60 and an alternating magnetic field which occurs at the probe tip 20 at the time when a conductive coil 11 is connected to an a.c. current source. Therefore, resolution is improved without being affected by the stray magnetic field of the conductive coil 11.

    5.
    发明专利
    未知

    公开(公告)号：DE69823578T2

    公开(公告)日：2006-03-23

    申请号：DE69823578

    申请日：1998-02-16

    Applicant: IBM

    Inventor： MOSER ANDREAS ,  WELLER DIETER KLAUS

    IPC: G01B7/34 ,  G01B7/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01R33/12

    Abstract: A probe (10) for use in an alternating current magnetic force microscopy (MFM) system is located on the free end of a cantilever (50) in the MFM system. The probe (10) has a pair of magnetic poles (P1,P2) that form part of a magnetic yoke and a patterned electrically conductive coil (11) wound through the yoke. The probe (10) includes a probe tip (20) that has a magnetic surface layer that is magnetically coupled to one of the poles and extends from it. When alternating current from the MFM system is passed through the probe coil (11) the magnetisation direction of the probe tip correspondingly alternates. The interaction of these alternating magnetic fields from the probe tip (20) with the magnetic fields emanating from the sample whose magnetic fields are to be measured causes the cantilever (50) to deflect between two extreme positions. The probe (10) can be formed from a portion of a disk drive air-bearing slider with a patterned thin film inductive write head on its trailing end by growing the probe tip (20) from the slider's air-bearing surface (ABS) so as to be in contact with the gap and one of the poles of the write head. The probe (10) can also be part of an integrated single-piece structure that includes the cantilever (50), probe body and probe tip (20) which are formed using conventional thin film deposition and lithographic processes.

    9.
    发明专利
    未知

    公开(公告)号：DE2346569A1

    公开(公告)日：1974-06-27

    申请号：DE2346569

    申请日：1973-09-15

    Applicant: IBM

    Inventor： MOSER ANDREAS

    IPC: H01L45/00 ,  H01X

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