Abstract:
A two axes MEMS magnetometer comprising in one plane a freestanding rectangular frame having inner walls and 4 torsion springs, wherein opposing inner walls of the frame are contacted by one end of only 2 springs, each spring being anchored by its other end, towards the centre of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurement.
Abstract:
A system for generating an output signal having a substantially stable frequency, the system comprising: an oven (2); a micromechanical oscillator (11) inside the oven, provided for oscillating at a predetermined frequency; an excitation mechanism associated with the micromechanical oscillator and being configured for exciting the micromechanical oscillator; a temperature control loop (71,83,84,88) associated with the micromechanical oscillator and comprising components (61,62) for detecting, evaluating and adapting the temperature of the micromechanical oscillator (11) according to a ratiometric principle with resistive sensing; a frequency output (87) for outputting the predetermined frequency of the micromechanical oscillator (11) as a basis for generating the output signal; said components may have a first resp. second temperature dependent characteristic, the second temperature dependency being different from the first temperature dependency such that the first and second characteristics intersect within a predetermined temperature range.
Abstract:
According to an aspect of the present inventive concept there is provided a light emitting unit, for emitting laser light at a laser wavelength, arranged on a planar surface of a substrate. The unit comprises a first reflective element to reflect light at the laser wavelength, a gain element to amplify the light, and a second reflective element to partially reflect the light, and to emit the laser light. The elements form a stack of layers integrated onto the planar surface. Each layer is parallel with the planar surface, and the gain element is arranged between the first and second reflective elements. The unit comprises a beam shaping element integrated with the stack. The beam shaping element is configured to shape the emitted laser light. The beam shaping element comprises a plurality of structures spaced apart in a direction of an extension of a layer of the beam shaping element. A size of the structures and/or a distance between adjacent structures is smaller than the laser wavelength.
Abstract:
A light sensor (100) for spectrally resolved light detection, said light sensor (100) comprises: an upper reflective element (104); a lower reflective element (106); a photo-sensitive element (114) therebetween; a spacer element (108), configured to form the lower reflective element (106) or configured to be arranged between the upper (104) and the lower reflective element (106); wherein the elements form a stack of layers which define a resonance structure (102a, 102b, 102c) between the upper (104) and the lower reflective element (106) for providing a resonance of light; wherein the spacer element (108) comprises at least two different materials (110, 112), a distribution of which is different between different pixels in an array of pixels such that a resonance wavelength is different for different pixels; and wherein for a plurality of pixels, geometrical structures smaller than the resonance wavelength are defined by the at least two different materials (110, 112).
Abstract:
Microfluidic device, apparatus, and method for sorting particles. The microfluidic device comprises a microfluidic channel (11) configured for receiving a microfluidic flow (F) comprising a plurality of particles (1 to 3) having different characteristics, the microfluidic channel (11) having a plurality of output flow channels (12, 13, 15), a first detection means (5) configured for detecting the location of the particles (1 to 3), a plurality of actuation elements (a1 to a16) located along the direction of the microfluidic flow (F) and define a sorting electrode arrangement (EA). The microfluidic device further comprises a control means (6). The control means (6) is configured for receiving signals from the first detection means (5), providing force field profiles (GD1, GD2, GD3) for each of the plurality of particles (1 to 3) wherein each force field profile comprises a plurality of deflection force settings along the direction of the microfluidic flow. Based on the provided force field profiles, the control means further individually addresses the plurality of actuation elements (a1 to a16) for generating a plurality of actuation inducing fields (E1, E2, E2', E3) along the direction of the microfluidic flow (F) wherein the actuation inducing fields is configured to generate the deflection force settings in the force field profiles, wherein the plurality of the force field profiles are different for each different particle and are provided to direct each particle in a gradual manner within the sorting electrode arrangement (EA). The control means is therefore configured for gradually directing at least two different particles simultaneously within the sorting electrode arrangement (EA).
Abstract:
Devices and corresponding methods for generating and detecting spin waves are provided, the devices (100, 200, 300, 400) comprising a magnetostrictive film (102), a deformation film (104) changing physical dimensions in response to an actuation, and an acoustic isolation resonator (106, 108). The magnetostrictive film (102) and the deformation film (104), preferably of piezoelectric material, are connected such that a change in physical dimensions of the deformation film produces a mechanical stress in the magnetostrictive film, resulting in a change in magnetization of the magnetostrictive film.
Abstract:
The invention relates to an imaging device (1) comprising a photonic integrated circuit (2). This photonic integrated circuit comprises an integrated waveguide (4) for guiding a light signal (5), a light coupler (8) optically coupled to the integrated waveguide (4) and adapted for directing the light signal (5) out of the plane of the waveguide (4) as a light beam (9), and at least one imaging detector (11) positioned for imaging an object (12) illuminated by the light beam (9). The invention also relates to a corresponding method for imaging.