公开(公告)号：EP2618201A1

公开(公告)日：2013-07-24

申请号：EP12152010.0

申请日：2012-01-20

Applicant: IMEC

Inventor： Jayapala, Murali ,  Van Der Plas, Geert ,  Rochus, Veronique ,  Rottenberg, Xavier ,  Severi, Simone ,  Donnay, Stephane

IPC: G02B26/08 ,  G02B6/35

CPC classification number: G02B27/00 ,  G02B1/00 ,  G02B6/352 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0841 ,  G02B2207/00 ,  H04N1/00

Abstract: Described herein is a built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles (530) to provide a capacitance-reference angle relationship (540). From the capacitance values, an interpolation step (550) is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured (560). For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use (570).

Abstract translation: 这里描述的是用于微镜阵列器件的内置自校准系统和方法，例如，作为可变焦距透镜操作。 校准方法包括以多个预定参考角度（530）确定阵列器件中每个微镜元件的电容值，以提供电容参考角度关系（540）。 根据电容值，进行内插步骤（550），以确定阵列中每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描，测量阵列中每个微镜元件的电容值（560）。 对于与电容 - 参考角度关系中的一个值匹配的电容值，相应的电压与相关联的倾斜角度相关联，以提供随后存储在存储器中用于随后使用的电压 - 倾斜角特性（570）。

公开(公告)号：EP2618201B1

公开(公告)日：2015-11-04

申请号：EP12152010.0

申请日：2012-01-20

Applicant: IMEC

Inventor： Jayapala, Murali ,  Van Der Plas, Geert ,  Rochus, Veronique ,  Rottenberg, Xavier ,  Severi, Simone ,  Donnay, Stephane

IPC: G02B26/08 ,  G02B6/35

CPC classification number: G02B27/00 ,  G02B1/00 ,  G02B6/352 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0841 ,  G02B2207/00 ,  H04N1/00

公开(公告)号：EP2530836A1

公开(公告)日：2012-12-05

申请号：EP11168330.6

申请日：2011-05-31

Applicant: IMEC

Inventor： Donnay, Stephane ,  Rottenberg, Xavier ,  Borremans, Jonathan ,  Tilmans, Hendrikus ,  van der Plas, Geert ,  Pertijs, Michiel

IPC: H03H9/02 ,  H03H9/08 ,  H03H9/10 ,  H03H9/24

CPC classification number: H03H9/02448 ,  H03H9/08 ,  H03H9/1057 ,  H03H9/2463

Abstract: A system for generating an output signal having a substantially stable frequency, the system comprising: an oven (2); a micromechanical oscillator (11) inside the oven, provided for oscillating at a predetermined frequency; an excitation mechanism associated with the micromechanical oscillator and being configured for exciting the micromechanical oscillator; a temperature control loop (71,83,84,88) associated with the micromechanical oscillator and comprising components (61,62) for detecting, evaluating and adapting the temperature of the micromechanical oscillator (11) according to a ratiometric principle with resistive sensing; a frequency output (87) for outputting the predetermined frequency of the micromechanical oscillator (11) as a basis for generating the output signal; said components may have a first resp. second temperature dependent characteristic, the second temperature dependency being different from the first temperature dependency such that the first and second characteristics intersect within a predetermined temperature range.

Abstract translation: 一种用于产生具有基本稳定频率的输出信号的系统，所述系统包括：烤箱（2）; 烘箱内的微机械振荡器（11），用于以预定频率振荡; 与微机械振荡器相关联并被配置用于激发微机械振荡器的激励机构; 与所述微机械振荡器相关联的温度控制回路（71,83,84,88）并且包括用于根据具有电阻感测的比例原理来检测，评估和调整所述微机械振荡器（11）的温度的组件（61,62） 用于输出微机械振荡器（11）的预定频率的频率输出（87）作为产生输出信号的基础; 所述组件可以具有第一或第二组。 第二温度依赖特性，第二温度依赖性不同于第一温度依赖性，使得第一和第二特性在预定温度范围内相交。