A DEVICE FOR DETECTING PARTICLES IN AIR
    11.
    发明公开

    公开(公告)号:EP3839636A1

    公开(公告)日:2021-06-23

    申请号:EP19218700.3

    申请日:2019-12-20

    Applicant: Imec VZW

    Abstract: A device (1) for detecting particles (2) in air; said device (1) comprising:
    a flow channel (30), wherein the flow channel (30) is configured to allow a flow of air (12) comprising particles (2) through the flow channel (30);
    a light source (40) configured to illuminate the particles (2) in the flow of air (12), such that an interference pattern is formed by interference between light being scattered by the particles (2) and non-scattered light from the light source (40);
    an image sensor (50) configured to detect incident light, the image sensor (50) being configured to detect the interference pattern, and wherein the image sensor (50) is configured to acquire a time-sequence of image frames, each image frame comprising a plurality of pixels, each pixel representing a detected intensity of light; and
    a frame processor (70) configured to filter information in the time-sequence of image frames, wherein said filtering comprises:
    identifying pixels of interest in the time-sequence of image frames, said pixels of interest picturing an interference pattern potentially representing a particle (2) in the flow of air (12), and
    outputting said identified pixels of interest for performing digital holographic reconstruction on the identified pixels of interest.

    AN APPARATUS AND A METHOD FOR IN-LINE HOLOGRAPHIC IMAGING

    公开(公告)号:EP3339963A1

    公开(公告)日:2018-06-27

    申请号:EP16205862.2

    申请日:2016-12-21

    Applicant: IMEC vzw

    Abstract: An apparatus for in-line holographic imaging is provided. The apparatus (100) comprises at least a first light source (102) and a second light source (104) arranged for illuminating an object (108) arranged in the apparatus (100) with a light beam; an image sensor (110) being arranged to detect at least a first and a second interference pattern, wherein the first interference pattern is formed when the object (108) is illuminated by the first light source (102) and the second interference pattern is formed when the object (108) is illuminated by the second light source (104), wherein the first and second interference patterns are formed by diffracted light, being scattered by the object (108), and undiffracted light of the light beam; wherein the at least first and second light sources (102, 104) are arranged at different angles in relation to the object (108), and possibly illuminate the object (108) using different wavelengths.

    A METHOD AND A DEVICE FOR THREE-DIMENSIONAL IMAGING OF A SAMPLE

    公开(公告)号:EP3839637A1

    公开(公告)日:2021-06-23

    申请号:EP19218967.8

    申请日:2019-12-20

    Abstract: A method for three-dimensional imaging of a sample (302) comprises: receiving (102) interference patterns (208) acquired using light-detecting elements (212), wherein each interference pattern (208) is formed by scattered light from the sample (302) and non-scattered light from a light source (206; 306), wherein the interference patterns (208) are acquired using different angles between the sample (302) and the light source (206; 306); performing digital holographic reconstruction by applying an iterative algorithm to change a three-dimensional scattering potential, i.e. amplitude, of the sample (302) to improve a difference between the received interference patterns (208) and predicted interference patterns based on the three-dimensional scattering potential; wherein the iterative algorithm reduces a sum of a data fidelity term and a non-differentiable regularization term and wherein the iterative algorithm includes a forward-backward splitting method alternating between forward gradient descent (108) on the data fidelity term and backward gradient descent (110) on the regularization term.

    A DEVICE FOR DETECTING PARTICLES IN AIR
    20.
    发明公开

    公开(公告)号:EP3839478A1

    公开(公告)日:2021-06-23

    申请号:EP19218689.8

    申请日:2019-12-20

    Applicant: Imec VZW

    Abstract: The inventive concept relates to a device for detecting particles in air, said device comprising a receiver for receiving a flow of air comprising particles, a sample carrier, and a particle capturing arrangement. The particle capturing arrangement is configured to separate the particles from the flow of air for and to collect a set of particles on a surface of the sample carrier. The device further comprises a light source configured to illuminate the particles on the sample carrier, such that an interference pattern is formed by interference between light being scattered by the particles and non-scattered light from the light source. The device further comprises an image sensor configured to detect the interference pattern. The device further comprises a cleaner configured for cleaning the surface of the sample carrier for enabling re-use of the surface for collection of a subsequent set of particles.

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