公开(公告)号：US20240222210A1

公开(公告)日：2024-07-04

申请号：US18091548

申请日：2022-12-30

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Bai Nie ,  Srinivas Venkata Ramanuja Pietambaram ,  Gang Duan ,  Kyle Jordan Arrington ,  Ziyin Lin ,  Hongxia Feng ,  Yiqun Bai ,  Xiaoying Guo ,  Dingying Xu ,  Kristof Darmawikarta

IPC: H01L23/15 ,  H01L21/48 ,  H01L23/498

CPC classification number: H01L23/15 ,  H01L21/486 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/49838

Abstract: An integrated circuit device substrate includes a first glass layer, a second glass layer, and a dielectric interface layer between the first glass layer and the second glass layer. A plurality of conductive pillars extend through the first glass layer, the dielectric layer and the second glass layer, wherein the conductive pillars taper from a first diameter in the dielectric layer to a second diameter in the first glass layer and the second glass layer, and wherein the first diameter is greater than the second diameter.

公开(公告)号：US20240213170A1

公开(公告)日：2024-06-27

申请号：US18086293

申请日：2022-12-21

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Yiqun Bai ,  Dingying Xu ,  Srinivas Venkata Ramanuja Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Ziyin Lin ,  Bai Nie ,  Kyle Jordan Arrington ,  Jeremy D. Ecton ,  Brandon C. Marin

IPC: H01L23/538 ,  H01L23/498 ,  H01L25/16 ,  H01L25/18 ,  H10B80/00

CPC classification number: H01L23/5389 ,  H01L23/49816 ,  H01L23/5386 ,  H01L25/16 ,  H01L25/18 ,  H10B80/00 ,  H01L24/13

Abstract: An electronic system includes a substrate and a top surface active component die. The substrate includes a glass core layer having a glass core layer active component die disposed in a cavity and a discrete passive component disposed in another cavity; a mold layer including a mold layer active component die disposed in the mold layer; and a buildup layer contacting a top surface of the glass core layer and a bottom surface of the mold layer. The buildup layer includes electrically conductive interconnect connecting the glass core layer active component die, the discrete passive component, and the mold layer active component die. The top surface of the component die is electrically connected to the mold layer active component die.

公开(公告)号：US20240186228A1

公开(公告)日：2024-06-06

申请号：US18061237

申请日：2022-12-02

Applicant: Intel Corporation

Inventor： Haobo Chen ,  Bohan Shan ,  Kyle J. Arrington ,  Yiqun Bai ,  Kristof Darmawikarta ,  Gang Duan ,  Jeremy D. Ecton ,  Hongxia Feng ,  Xiaoying Guo ,  Ziyin Lin ,  Brandon Christian Marin ,  Bai Nie ,  Srinivas V. Pietambaram ,  Dingying Xu

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49822 ,  H01L21/486 ,  H01L23/49827

Abstract: In one embodiment, an integrated circuit package substrate includes a core layer comprising a dielectric material and a plurality of metal vias within the core layer. The dielectric material includes Silicon, Oxygen, and at least one of Boron or Phosphorus. The metal vias electrically couple a first side of the core layer and a second side of the core layer opposite the first side. The package substrate further includes a plurality of build-up layers on the core layer, the build-up layers comprising metal vias electrically connected to the metal vias of the core layer.

公开(公告)号：US20230197540A1

公开(公告)日：2023-06-22

申请号：US17556558

申请日：2021-12-20

Applicant: Intel Corporation

Inventor： Kristof Darmawikarta ,  Haobo Chen ,  Xiaoying Guo ,  Hongxia Feng

IPC: H01L23/15 ,  H01L23/498 ,  H01L23/532

CPC classification number: H01L23/15 ,  H01L23/5329 ,  H01L23/49822

Abstract: Methods, apparatus, systems, and articles of manufacture are disclosed to enable electrical traces on glass cores in integrated circuit packages that includes an integrated circuit (IC) package substrate comprising a glass core, a photo-imageable dielectric (PID) material on the glass core, and metal interconnects in openings in the PID material.

公开(公告)号：US20250112085A1

公开(公告)日：2025-04-03

申请号：US18375244

申请日：2023-09-29

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Ziyin Lin ,  Haobo Chen ,  Yiqun Bai ,  Kyle Arrington ,  Jose Waimin ,  Ryan Carrazzone ,  Hongxia Feng ,  Dingying Xu ,  Srinivas Pietambaram ,  Minglu Liu ,  Seyyed Yahya Mousavi ,  Xinyu Li ,  Gang Duan ,  Wei Li ,  Bin Mu ,  Mohit Gupta ,  Jeremy Ecton ,  Brandon C. Marin ,  Xiaoying Guo ,  Ashay Dani

IPC: H01L21/762 ,  H01L21/768 ,  H01L23/00 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065

Abstract: An apparatus is provided which comprises: a plurality of interconnect layers within a substrate, organic dielectric material over the plurality of interconnect layers, copper pads on a surface of a cavity within the organic dielectric material, an integrated circuit bridge device coupled with the copper pads, wherein a surface of the integrated circuit bridge device is elevated above an opening of the cavity, underfill material between the integrated circuit bridge device and the surface of the cavity, and build-up layers formed over the organic dielectric material around the integrated circuit bridge device. Other embodiments are also disclosed and claimed.

公开(公告)号：US20250105074A1

公开(公告)日：2025-03-27

申请号：US18977572

申请日：2024-12-11

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Wei Wei ,  Jose Fernando Waimin Almendares ,  Ryan Joseph Carrazzone ,  Kyle Jordan Arrington ,  Ziyin Lin ,  Dingying Xu ,  Hongxia Feng ,  Yiqun Bai ,  Hiroki Tanaka ,  Brandon Christian Marin ,  Jeremy Ecton ,  Benjamin Taylor Duong ,  Gang Duan ,  Srinivas Venkata Ramanuja Pietambaram ,  Rui Zhang ,  Mohit Gupta

IPC: H01L23/15 ,  H01L23/00 ,  H01L23/13 ,  H01L23/498

Abstract: Glass cores including protruding through glass vias and related methods are disclosed herein. An example substrate disclosed herein includes a glass core including a surface and a copper through glass via (TGV) extending through the glass core, the TGV including a protrusion extending from the surface.

公开(公告)号：US20240219660A1

公开(公告)日：2024-07-04

申请号：US18089934

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Hongxia Feng ,  Haobo Chen ,  Yiqun Bai ,  Dingying Xu ,  Eric J.M. Moret ,  Robert Alan May ,  Srinivas Venkata Ramanuja Pietambaram ,  Tarek A. Ibrahim ,  Gang Duan ,  Xiaoying Guo ,  Ziyin Lin ,  Bai Nie ,  Kyle Jordan Arrington ,  Bin Mu

IPC: G02B6/42 ,  G02B5/10

CPC classification number: G02B6/4246 ,  G02B5/10 ,  G02B6/4274

Abstract: A semiconductor device and associated methods are disclosed. In one example, the electronic device includes a photonic die and a glass substrate. In selected examples, the semiconductor device includes one or more turning mirrors to direct an optical signal between the photonic die and the glass substrate. Configurations of turning mirrors are provided to improve signal integrity and manufacturability.

公开(公告)号：US20240219655A1

公开(公告)日：2024-07-04

申请号：US18089916

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Haobo Chen ,  Bohan Shan ,  Bai Nie ,  Brandon C. Marin ,  Dingying Xu ,  Gang Duan ,  Hongxia Feng ,  Jeremy D. Ecton ,  Kristof Darmawikarta ,  Kyle Jordan Arrington ,  Srinivas Venkata Ramanuja Pietambaram ,  Xiaoying Guo ,  Yiqun Bai ,  Ziyin Lin

IPC: G02B6/42 ,  H01L21/48

CPC classification number: G02B6/4214 ,  H01L21/4803 ,  H01L23/49827

Abstract: A semiconductor device and associated methods are disclosed. In one example, the electronic device includes a photonic die and a glass substrate. In selected examples, the semiconductor device includes one or more turning mirrors to direct an optical signal between the photonic die and the glass substrate. Configurations of turning mirrors are provided to improve signal integrity and manufacturability.

公开(公告)号：US20240186227A1

公开(公告)日：2024-06-06

申请号：US18061181

申请日：2022-12-02

Applicant: Intel Corporation

Inventor： Haobo Chen ,  Bohan Shan ,  Kyle J. Arrington ,  Kristof Darmawikarta ,  Gang Duan ,  Jeremy D. Ecton ,  Hongxia Feng ,  Xiaoying Guo ,  Ziyin Lin ,  Brandon Christian Marin ,  Srinivas V. Pietambaram ,  Dingying Xu

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/00 ,  H01L23/538 ,  H01L23/64 ,  H01L25/065 ,  H05K1/02 ,  H05K1/03 ,  H05K1/11 ,  H05K1/18 ,  H05K3/46

CPC classification number: H01L23/49822 ,  H01L21/4857 ,  H01L21/486 ,  H01L23/49816 ,  H01L23/49838 ,  H01L23/5381 ,  H01L23/5383 ,  H01L23/5386 ,  H01L23/642 ,  H01L24/16 ,  H01L24/32 ,  H01L24/73 ,  H01L25/0655 ,  H05K1/0271 ,  H05K1/0306 ,  H05K1/113 ,  H05K1/181 ,  H05K3/4605 ,  H01L2224/16235 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2924/15174 ,  H01L2924/157 ,  H01L2924/15788 ,  H05K2201/0195

Abstract: In one embodiment, an integrated circuit package substrate includes a core layer comprising a plurality of metal vias electrically coupling a first side of the core layer and a second side of the core layer opposite the first side. The package substrate further includes a build-up layer on the first side of the core layer, the build-up layer comprising metal vias within a dielectric material and electrically connected to the metal vias of the core layer. The dielectric material includes Silicon, Oxygen, and at least one of Boron or Phosphorus.

公开(公告)号：US11640934B2

公开(公告)日：2023-05-02

申请号：US15941903

申请日：2018-03-30

Applicant: Intel Corporation

Inventor： Meizi Jiao ,  Chong Zhang ,  Hongxia Feng ,  Kevin Mccarthy

IPC: H01L23/498 ,  H01L23/00 ,  H05K1/11 ,  H01L21/48 ,  H05K3/06 ,  H05K3/40

Abstract: Techniques for fabricating a package substrate comprising a via, a conductive line, and a pad are described. The package substrate can be included in a semiconductor package. For one technique, a package substrate includes: a pad in a dielectric layer; a via; and a conductive line. The via and the conductive line can be part of a structure. Alternatively, the conductive line can be adjacent to the via. The dielectric layer can include a pocket above the pad. One or more portions of the via may be formed in the pocket above the pad. Zero or more portions of the via can be formed on the dielectric layer outside the pocket. In some scenarios, no pad is above the via. The package substrate provides several advantages. One exemplary advantage is that the package substrate can assist with increasing an input/output density per millimeter per layer (IO/mm/layer) of the package substrate.