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    PACKAGE-INTEGRATED PIEZOELECTRIC OPTICAL GRATING SWITCH ARRAY
    12.
    发明申请
    PACKAGE-INTEGRATED PIEZOELECTRIC OPTICAL GRATING SWITCH ARRAY 审中-公开
    包装集成的压电光栅开关阵列

    公开(公告)号：WO2017171874A1

    公开(公告)日：2017-10-05

    申请号：PCT/US2016/025728

    申请日：2016-04-01

    Applicant: INTEL CORPORATION

    Inventor： SOUNART, Thomas L. ,  BICEN, Baris ,  EID, Feras ,  OSTER, Sasha N. ,  ALEKSOV, Aleksandar ,  LIFF, Shawna M. ,  RAO, Valluri R. ,  SWAN, Johanna M.

    IPC: G02B6/35 ,  G01L1/16

    CPC classification number: G02B5/1861 ,  G01L1/16 ,  G01L1/24 ,  G02B26/0808 ,  G02B26/0816 ,  H01L41/09

    Abstract: Embodiments of the invention include an optical grating switch integrated into an organic substrate and methods of forming such devices. According to an embodiment, the optical grating switch may include a cavity formed into an organic substrate. Additionally, the optical grating switch may include an array of moveable beams anchored to the organic substrate and suspended over the cavity. In an embodiment of the invention, each of the moveable beams in the optical grating switch may include a piezoelectric region formed over end portions of the moveable beam and a top electrode formed over a top surface of each of the piezoelectric regions. In order to reflect or diffract light, embodiments of the invention may include moveable beams that include a reflective surface formed over a central portion of the moveable beam.

    Abstract translation: 本发明的实施例包括集成到有机衬底中的光栅开关以及形成这种器件的方法。 根据一个实施例，光栅开关可以包括形成在有机衬底中的空腔。 另外，光栅开关可以包括锚定到有机基底并悬挂在空腔上的可移动梁阵列。 在本发明的一个实施例中，光栅开关中的每个可移动光束可以包括形成在可移动光束的端部上方的压电区域以及形成在每个压电区域的顶表面上方的顶部电极。 为了反射或衍射光，本发明的实施例可以包括可移动光束，其包括在可移动光束的中心部分上形成的反射表面。

    PIEZOELECTRIC PACKAGE-INTEGRATED CURRENT SENSING DEVICES
    15.
    发明申请
    PIEZOELECTRIC PACKAGE-INTEGRATED CURRENT SENSING DEVICES 审中-公开
    压电式封装集成电流检测器件

    公开(公告)号：WO2018004689A1

    公开(公告)日：2018-01-04

    申请号：PCT/US2016/040844

    申请日：2016-07-01

    Applicant: INTEL CORPORATION

    Inventor： DOGIAMIS, Georgios C. ,  ELSHERBINI, Adel A. ,  LIFF, Shawna M. ,  SWAN, Johanna ,  CULIC-VISKOTA, Jelena ,  SOUNART, Thomas L. ,  EID, Feras ,  OSTER, Sasha N.

    IPC: G01R15/14 ,  G01R31/28 ,  H01L41/047 ,  H01L41/18 ,  H01L41/083

    CPC classification number: G01R15/20 ,  G01R15/14 ,  G01R15/205 ,  G01R15/247 ,  H01L41/06 ,  H01L41/1132 ,  H01L41/125

    Abstract: Embodiments of the invention include a current sensing device for sensing current in an organic substrate. The current sensing device includes a released base structure that is positioned in proximity to a cavity of the organic substrate and a piezoelectric film stack that is positioned in proximity to the released base structure. The piezoelectric film stack includes a piezoelectric material in contact with first and second electrodes. A magnetic field is applied to the current sensing device and this causes movement of the released base structure and the piezoelectric stack which induces a voltage (potential difference) between the first and second electrodes.

    Abstract translation: 本发明的实施例包括用于感测有机衬底中的电流的电流感测装置。 电流感测装置包括释放的基底结构和定位在释放的基底结构附近的压电薄膜叠层，该释放的基底结构位于有机基底的空腔附近。 压电薄膜叠层包括与第一和第二电极接触的压电材料。 磁场被施加到电流感测装置，并且这导致释放的基础结构和压电叠堆的移动，其引起第一和第二电极之间的电压（电势差）。

    PIEZOELECTRICALLY ACTUATED MIRRORS FOR OPTICAL COMMUNICATIONS
    16.
    发明申请
    PIEZOELECTRICALLY ACTUATED MIRRORS FOR OPTICAL COMMUNICATIONS 审中-公开
    用于光通信的压电驱动镜子

    公开(公告)号：WO2017171882A1

    公开(公告)日：2017-10-05

    申请号：PCT/US2016/025760

    申请日：2016-04-01

    Applicant: INTEL CORPORATION

    Inventor： OSTER, Sasha N. ,  SWAN, Johanna M. ,  EID, Feras ,  SOUNART, Thomas L. ,  ALEKSOV, Aleksandar ,  LIFF, Shawna M. ,  BICEN, Baris ,  RAO, Valluri R.

    IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02

    Abstract: Embodiments of the invention include an optical routing device that includes an organic substrate. According to an embodiment, an array of cavities are formed into the organic substrate and an array of piezoelectrically actuated mirrors may be anchored to the organic substrate with each piezoelectrically actuated mirror extending over a cavity. In order to properly rout incoming optical signals, the optical routing device may also include a routing die mounted on the organic substrate. The routing die may be electrically coupled to each of the piezoelectrically actuated mirrors and is able to generated a voltage across the first and second electrodes of each piezoelectrically actuated mirror. Additionally, a photodetector may be electrically coupled to the routing die. According to an embodiment, an array of fiber optic cables may be optically coupled with one of the piezoelectrically actuated mirrors and optically coupled with the photodetector.

    Abstract translation: 本发明的实施例包括一种包括有机衬底的光学路由装置。 根据一个实施例，在有机基底中形成空腔阵列，并且可以将压电致动反射镜阵列锚定到有机基底，每个压电致动反射镜在空腔上延伸。 为了适当地路由输入的光学信号，光学路由设备还可以包括安装在有机基板上的布线管芯。 布线管芯可以电耦合到每个压电致动反射镜，并且能够在每个压电致动反射镜的第一和第二电极上产生电压。 另外，光电探测器可以电耦合到布线管芯。 根据一个实施例，光纤电缆阵列可以与压电致动反射镜中的一个光学耦合并且与光电检测器光学耦合。

    PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS
    17.
    发明申请
    PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS 审中-公开
    用于光束转向应用的压电执行器

    公开(公告)号：WO2017171862A1

    公开(公告)日：2017-10-05

    申请号：PCT/US2016/025667

    申请日：2016-04-01

    Applicant: INTEL CORPORATION

    Inventor： ALEKSOV, Aleksandar ,  EID, Feras ,  OSTER, Sasha N. ,  LIFF, Shawna M. ,  SWAN, Johanna M. ,  SOUNART, Thomas L. ,  BICEN, Baris ,  RAO, Valluri

    IPC: G02B26/08 ,  G02B1/10 ,  H01S3/034

    CPC classification number: G02B26/105 ,  G02B1/14 ,  G02B26/0858 ,  G02B26/101

    Abstract: Embodiments of the invention include maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. According to an embodiment, the maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. In an embodiment, the piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Additional embodiments of the invention may include a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. Other embodiments may include a maskless imaging tool that is a via-drill tool. Embodiments of the invention may also include a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.

    Abstract translation: 本发明的实施例包括无掩模成像工具和包括压电致动反射镜的显示系统以及形成这种装置的方法。 根据一个实施例，无掩模成像工具可以包括光源。 另外，该工具可以包括一个或多个用于接收来自光源的光的压电致动反射镜。 在一个实施例中，压电致动反射镜可围绕一个或多个轴致动以将来自光源的光反射到定位成接收来自压电致动反射镜的光的工件。 本发明的附加实施例可以包括作为激光直接成像光刻（LDIL）工具的无掩模成像工具。 其他实施例可以包括作为通孔钻具的无掩模成像工具。 本发明的实施例还可以包括用于投影系统中的压电致动反射镜。 例如，投影系统可以集成到一副眼镜中。

    INORGANIC PIEZOELECTRIC MATERIALS FORMED ON FIBERS & APPLICATIONS THEREOF
    18.
    发明申请
    INORGANIC PIEZOELECTRIC MATERIALS FORMED ON FIBERS & APPLICATIONS THEREOF 审中-公开
    在纤维上形成的无机压电材料及其应用

    公开(公告)号：WO2017171856A1

    公开(公告)日：2017-10-05

    申请号：PCT/US2016/025655

    申请日：2016-04-01

    Applicant: INTEL CORPORATION

    Inventor： LIFF, Shawna M. ,  EID, Feras ,  ALEKSOV, Aleksandar ,  OSTER, Sasha N. ,  BICEN, Baris ,  SOUNART, Thomas L. ,  RAO, Valluri R. ,  SWAN, Johanna M.

    IPC: D06M17/00 ,  D03D1/00

    CPC classification number: D06M10/06 ,  D01F11/00 ,  D06M11/46 ,  D06M11/47 ,  D06M11/83 ,  D06M17/00 ,  H01L41/047 ,  H01L41/087 ,  H01L41/1873 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/316

    Abstract: Embodiments of the invention include an active fiber with a piezoelectric layer that has a crystallization temperature that is greater than a melt or draw temperature of the fiber and methods of forming such active fibers. According to an embodiment, a first electrode is formed over an outer surface of a fiber. Embodiments may then include depositing a first amorphous piezoelectric layer over the first electrode. Thereafter, the first amorphous piezoelectric layer may be crystallized with a pulsed laser annealing process to form a first crystallized piezoelectric layer. In an embodiment, the pulsed laser annealing process may include exposing the first amorphous piezoelectric layer to radiation from an excimer laser with an energy density between approximately 10 and 100 mJ/cm2 and pulse width between approximately 10 and 50 nanoseconds. Embodiments may also include forming a second electrode over an outer surface of the crystallized piezoelectric layer.

    Abstract translation: 本发明的实施例包括具有压电层的有源光纤，该压电层的结晶温度大于光纤的熔化温度或拉制温度，以及形成这种有源光纤的方法。 根据一个实施例，第一电极形成在光纤的外表面上。 然后，实施例可以包括在第一电极上沉积第一非晶态压电层。 之后，第一非晶态压电层可以用脉冲激光退火工艺结晶以形成第一结晶压电层。 在一个实施例中，脉冲激光退火工艺可以包括将第一非晶态压电层暴露于来自准分子激光器的辐射，其能量密度在约10和100mJ / cm 2之间，脉冲宽度在约10和50纳秒之间。 实施例还可以包括在结晶压电层的外表面上形成第二电极。

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