公开(公告)号：EP3003967A1

公开(公告)日：2016-04-13

申请号：EP14734318.0

申请日：2014-05-23

Applicant: Luxvue Technology Corporation

Inventor： BIBL, Andreas ,  GOLDA, Dariusz

IPC: B81C99/00 ,  H01L21/67 ,  H01L23/00 ,  H01L21/683 ,  B25J15/00 ,  H01L21/768

CPC classification number: H01L21/6833 ,  B81C99/002 ,  H01L21/6835 ,  H01L21/76802 ,  H01L21/76877 ,  H01L21/76898 ,  H01L24/75 ,  H01L2221/68322 ,  H01L2221/68354 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2221/68381 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/1461 ,  H01L2924/00

Abstract: Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array (104) includes a compliant contact (108) for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads (114). The compliant contact is moveable relative to a base substrate (214) of the micro pick up array.