VIBRATORY SENSOR
    11.
    发明申请
    VIBRATORY SENSOR 审中-公开
    振动传感器

    公开(公告)号:WO2009084942A3

    公开(公告)日:2009-11-19

    申请号:PCT/MY2008000199

    申请日:2008-12-30

    CPC classification number: G01N27/226

    Abstract: A capacitor comprises a dielectric base layer (4a) defined by top, first and side surfaces; a plurality of first driven electrode (15) having tips and edges deposited on the top surface of the dielectric base layer (4a) that each are spaced apart at the edges by a predetermined gap; a plurality of first sensing electrode (16) having tips and edges that each of the first sensing electrode (16) is deposited at each of the predetermined gap in between two first driven electrodes (15) with a predetermined distance in between the first sensing (16) and first driven electrodes (15); a plurality pair of protrusion (20) extends upward from the top surface of the dielectric base layer (4a) at the tips of the first driven electrodes (15) and the first sensing electrodes (16); a second driven electrode (10) or a second sensing electrode (11) are positioned overhead of each first driven electrode (15) and first sensing electrode (16) respectively by anchoring onto the corresponding pair of protrusions (20) with a void left between each second and first electrodes; whereby the second driven (10) and second sensing (11) electrodes vibrate up and down by applying a bias voltage onto the first driven (15) and first sensing (16) electrodes thus able to manipulate penetration depth of quasi-static electric field lines produced from the second driven (10) and second sensing electrodes (11) into a material under test.

    Abstract translation: 电容器包括由顶部,第一和侧表面限定的电介质基底层(4a) 多个第一驱动电极(15),其具有沉积在所述电介质基底层(4a)的顶表面上的尖端和边缘,所述顶部和边缘各自在所述边缘处间隔预定间隙; 具有尖端和边缘的多个第一感测电极(16),其中第一感测电极(16)中的每一个在每个预定间隙处在两个第一驱动电极(15)之间以预定距离沉积在第一感测( 16)和第一驱动电极(15); 在所述第一驱动电极(15)和所述第一感测电极(16)的前端,所述多个突起(20)从所述电介质基底层(4a)的上表面向上延伸。 第二驱动电极(10)或第二感测电极(11)分别通过锚定在对应的一对突起(20)上而分别位于每个第一从动电极(15)和第一感测电极(16)的顶部,空隙留在 每个第二和第一电极; 由此第二驱动(10)和第二感测(11)电极通过向第一驱动(15)和第一感测(16)电极施加偏置电压而上下振动,从而能够操纵准静态电场线的穿透深度 由第二驱动(10)和第二感测电极(11)产生成被测材料。

    AN ENERGY HARVESTER
    15.
    发明申请
    AN ENERGY HARVESTER 审中-公开
    能量收割机

    公开(公告)号:WO2010033012A3

    公开(公告)日:2010-07-01

    申请号:PCT/MY2009000142

    申请日:2009-09-10

    CPC classification number: H02N2/186

    Abstract: An energy harvester (100) comprising a base (110); one or more first resilient means (120) mounted on the base (110); a hollow chamber (130) having a mounting point (131) pivotally attached to the first resilient means (120) in static equilibrium in such a way that centre of mass of the hollow chamber (130) is aligned with the first resilient means (120) at the vertical axis; a hollow member (140) enclosed within the hollow chamber (130) being attached to one or more second resilient means (150) extending from the mounting point (131) in static equilibrium that centre of mass of the hollow member (140) is aligned with the second resilient means (150) at the vertical axis; a plurality of piezoelectric material-built cantilevers (160) mounted on the hollow member (140) and spaced apart from one another in a predetermined gap at the vertical planar that the piezoelectric material-built cantilevers (160) are varied in length and/or centre of mass; a primary storage (170) associated with the hollow chamber (130), the hollow member (140) and the plurality of piezoelectric material- built cantilevers (160) through an integrated circuit for storing harvested energy; wherein the energy is harvested through vibration of the plurality of piezoelectric material-built cantilevers (160) at its approximately resonant frequency, reciprocation of the hollow chamber (130) and the hollow member (140) upon applying kinetic force.

    Abstract translation: 一种能量收集器(100),包括基座(110); 一个或多个安装在基座(110)上的第一弹性装置(120); 具有安装点(131)的中空室(130),所述安装点以静态平衡的方式枢转地附接到所述第一弹性装置(120),使得所述中空室(130)的质量中心与所述第一弹性装置(120) )在垂直轴上; 包围在中空腔室(130)内的中空部件(140)以静态平衡的方式附接到从安装点(131)延伸的一个或多个第二弹性装置(150),以使中空部件(140)的质心对齐 第二弹性装置(150)位于竖直轴线处; 多个压电材料制成的悬臂(160),其安装在中空构件(140)上并且在垂直平面上以预定间隙彼此间隔开,使得压电材料制成的悬臂(160)的长度和/或 质量中心; 通过用于储存收获能量的集成电路与中空室(130),中空构件(140)和多个压电材料制成的悬臂(160)相关联的主储存器(170) 其中通过多个压电材料制成的悬臂(160)以其近似谐振频率的振动来收集能量,在施加动力时中空腔室(130)和中空部件(140)往复运动。

    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES
    16.
    发明申请
    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES 审中-公开
    具有可调谐共振频率的电容区改变MEMS陀螺仪

    公开(公告)号:WO2009057990A3

    公开(公告)日:2009-08-06

    申请号:PCT/MY2008000124

    申请日:2008-10-22

    CPC classification number: G01C19/5656 B81B3/0037 B81B2201/0242

    Abstract: There is disclosed a surface micromachined (MEMS) gyroscope device where the resonance frequencies are capable of being adjusted and tuned for obtaining maximum response gain for higher sensitivity. The MEMS gyroscope comprises of a substrate (1), a proof-mass (2), a capacitive area-changed plate (3), a driving mode electrode (4) and a sensing mode electrode (5). The proof -mass (2) is structured as a cross-shaped body that includes the sensing mode and driving mode electrodes (4, 5) where the proof -mass is adapted to oscillate back and forth laterally over the capacitive area-changed plate (3) defining an area-changed capacitive type MEMS gyroscope. The driving and sensing mode electrodes (4,5) are shaped as a symmetrical branch-finger structure. The proofmass is connected to the substrate (1) through a spring (6) and the branch-finger structure is provided having two different gap side-by-side and narrow-wide narrow gap series configuration, whereby, the spring is configured as a circular-shaped, rectangular-shaped or variations of the same. The spring constant {KX, Ky) is controllable and adjustable through the application of voltage on the branch finger acting as actuator and pseudo spring thus providing tuned resonant frequency for higher sensitivity.

    Abstract translation: 公开了一种表面微加工(MEMS)陀螺仪装置,其中谐振频率能够被调整和调谐以获得更高灵敏度的最大响应增益。 MEMS陀螺仪包括基板(1),防爆质量块(2),电容区域变化板(3),驱动模式电极(4)和感测模式电极(5)。 证明 - 质量(2)被构造成十字形体,其包括感测模式和驱动模式电极(4,5),其中证明力适于在电容区域变化板上横向前后振荡( 3)定义面积改变的电容型MEMS陀螺仪。 驱动感测模式电极(4,5)成形为对称的分支指状结构。 校样通过弹簧(6)与基板(1)连接,并且分支指结构具有两个不同的间隙并排和窄宽的窄间隙串联构造,由此弹簧被配置为 圆形,矩形或其变化。 通过施加作为致动器和假弹簧的分支上的电压,弹簧常数(KX,Ky)是可控的和可调节的,从而提供用于更高灵敏度的调谐谐振频率。

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