公开(公告)号：DE60113722T2

公开(公告)日：2006-09-14

申请号：DE60113722

申请日：2001-12-21

Applicant: MKS INSTR INC

Inventor： POULIN M ,  MATHEW E ,  MINDLIN LEONID ,  QUIGLEY J ,  BLANKENSHIP D

IPC: G01L9/12 ,  G01L19/04 ,  G01L9/00 ,  G01L19/14

Abstract: A capacitive pressure transducer is disclosed. The disclosed transducer includes a heater shell, a capacitive pressure sensor, an electronics assembly, and a thermal barrier. The sensor and electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.

公开(公告)号：DE112006003325T5

公开(公告)日：2009-02-05

申请号：DE112006003325

申请日：2006-11-06

Applicant: MKS INSTR INC

Inventor： GOODMAN DANIEL A ,  TOLER MICHAEL ,  MINDLIN LEONID ,  SULLIVAN PHILIP W

IPC: G06F17/30

Abstract: A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.

公开(公告)号：GB2405700B

公开(公告)日：2005-12-14

申请号：GB0427629

申请日：2003-06-11

Applicant: MKS INSTR INC

Inventor： HORNE STEPHEN F ,  MAIORANA PHILIP J ,  MATTHEW SANTHI E ,  MINDLIN LEONID ,  QUIGLEY CLAUDIA ,  SMITH DONALD K ,  TARANTO ERIC R

IPC: G01F15/02 ,  G01D3/02 ,  G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G06F13/14

公开(公告)号：DE60113722D1

公开(公告)日：2005-11-03

申请号：DE60113722

申请日：2001-12-21

Applicant: MKS INSTR INC

Inventor： POULIN M ,  MATHEW E ,  MINDLIN LEONID ,  QUIGLEY J ,  BLANKENSHIP D

IPC: G01L9/12 ,  G01L9/00 ,  G01L19/04 ,  G01L19/14

Abstract: A capacitive pressure transducer is disclosed. The disclosed transducer includes a heater shell, a capacitive pressure sensor, an electronics assembly, and a thermal barrier. The sensor and electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.

公开(公告)号：GB2405700A

公开(公告)日：2005-03-09

申请号：GB0427629

申请日：2003-06-11

Applicant: MKS INSTR INC

Inventor： HORNE STEPHEN F ,  MAIORANA PHILIP J ,  MATTHEW SANTHI E ,  MINDLIN LEONID ,  QUIGLEY CLAUDIA ,  SMITH DONALD K ,  TARANTO ERIC R

IPC: G01F15/02 ,  G01D3/02 ,  G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G06F13/14

Abstract: A compensated sensor includes a sensor(108), a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer (204) and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors (208) for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output (202). Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensated sensor output developed by the compensated sensor signal developed in the compensation circuitry (102) and the output signal fed back to the compensation circuitry is also provided to tha summer for summing with the one or more correction factors and uncompensated sensor output.