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    GRAPHICAL USER INTERFACE
    1.
    发明申请
    GRAPHICAL USER INTERFACE 审中-公开
    图形用户界面

    公开(公告)号：WO2007070191A3

    公开(公告)日：2007-07-26

    申请号：PCT/US2006043268

    申请日：2006-11-06

    Applicant: MKS INSTR INC ,  GOODMAN DANIEL A ,  TOLER MICHAEL ,  MINDLIN LEONID ,  SULLIVAN PHILIP W

    Inventor： GOODMAN DANIEL A ,  TOLER MICHAEL ,  MINDLIN LEONID ,  SULLIVAN PHILIP W

    IPC: G06F17/30

    CPC classification number: G06F17/30861

    Abstract: A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.

    Abstract translation: 用于监测传感器的系统包括GUI（图形用户界面），诸如嵌入在传感器中的WebPage。 GUI被配置为通过以太网连接从可连接到传感器的用户计算机显示与传感器有关的信息，并且具有用于访问传感器的WebPage的因特网web浏览器。 计算机可读介质嵌入在传感器内并且存储有用于处理器的计算机可用指令。 这些指令在处理器执行时使处理器生成GUI。

    APPARATUS AND METHOD FOR COMPENSATED SENSOR OUTPUT
    2.
    发明申请
    APPARATUS AND METHOD FOR COMPENSATED SENSOR OUTPUT 审中-公开
    补偿传感器输出的装置和方法

    公开(公告)号：WO03106945A2

    公开(公告)日：2003-12-24

    申请号：PCT/US0318337

    申请日：2003-06-11

    Applicant: MKS INSTR INC

    Inventor： HORNE STEPHEN F ,  MAIORANA PHILIP J ,  MATTHEW SANTHI E ,  MINDLIN LEONID ,  QUIGLEY CLAUDIA J ,  TARANTO ERIC R ,  SMITH DONALD K

    IPC: G01F15/02 ,  G01D3/02 ,  G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G01K

    CPC classification number: G01D3/022

    Abstract: A compensated sensor includes a sensor, a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output. Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensation circuitry where it is compared to a compensated sensor output developed by the compensation circuitry. The difference between the compensated sensor signal developed in the compensation circuitry and the output signal fed back to the compensation circuitry is also provided to the summer for summing with the one or more correction factors and the uncompensated sensor output.

    Abstract translation: 补偿传感器包括传感器，相对快速的馈通路径和相对较慢的补偿路径。 相对较快的馈通路径包括加法器和输出电路，例如求和放大器。 相对较慢的补偿路径包括产生例如温度依赖性或非线性效应等传感器缺陷的一个或多个校正因子的电路。 这些一个或多个校正因子被馈送到夏天以与未补偿的传感器输出相加。 另外，输出电路（例如，求和放大器）的输出被反馈到补偿电路，在该补偿电路中，与补偿电路开发的补偿传感器输出进行比较。 在补偿电路中产生的补偿传感器信号和反馈到补偿电路的输出信号之间的差异也被提供给加法器以与一个或多个校正因子和未补偿的传感器输出相加。

    IMPROVED MULTI TEMPERATURE HEATER FOR USE WITH PRESSURE TRANSDUCERS
    3.
    发明申请
    IMPROVED MULTI TEMPERATURE HEATER FOR USE WITH PRESSURE TRANSDUCERS 审中-公开
    改进的多温度加热器可与压力传感器一起使用

    公开(公告)号：WO0231458A3

    公开(公告)日：2002-08-01

    申请号：PCT/US0131521

    申请日：2001-10-10

    Applicant: MKS INSTR INC

    Inventor： QUIGLEY CLAUDIA J ,  LAHEY KERRY S ,  MATHEW SANTHI E ,  MAXWELL J ROBERT JR ,  MINDLIN LEONID ,  POULIN JAMES M ,  ST PAUL GARDY

    IPC: G01L9/12 ,  G01L19/04 ,  H05B3/20

    CPC classification number: G01L19/04

    Abstract: A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a second electrical resistance. In preferred embodiments, the first electrical resistance is different than the second electrical resistance. The disclosed heater can be used to accurately heat a pressure transducer to at least four different operating temperatures by selectively (a) connecting the first heating element to the transducer temperature control circuitry, (b) connecting the second heating element to the transducer temperature control circuitry, (c) connecting the fist and second heating elements in series with the transducer temperature control circuitry, or (d) connecting the first and second heating elements in parallel with the transducer temperature control circuitry.

    Abstract translation: 公开了一种与压力传感器一起使用的加热器。 所公开的加热器包括第一加热元件和第二加热元件。 第一加热元件的特征在于第一电阻。 第二加热元件的特征在于第二电阻。 在优选实施例中，第一电阻与第二电阻不同。 所公开的加热器可以用于通过选择性地（a）将第一加热元件连接到换能器温度控制电路，（b）将第二加热元件连接到换能器温度控制电路，来将压力换能器精确地加热到至少四个不同的操作温度 （c）将第一和第二加热元件与换能器温度控制电路串联连接，或（d）将第一和第二加热元件与换能器温度控制电路并联连接。

    Graphical user interface
    4.
    发明专利
    Graphical user interface 未知

    公开(公告)号：GB2446993A

    公开(公告)日：2008-08-27

    申请号：GB0811158

    申请日：2006-11-06

    Applicant: MKS INSTR INC

    Inventor： GOODMAN DANIEL A ,  TOLER MICHAEL ,  MINDLIN LEONID ,  SULLIVAN PHILIP W

    IPC: G06F17/30

    Abstract: A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.

    CAPACITIVE PRESSURE SENSING METHOD AND APPARATUS
    5.
    发明公开
    CAPACITIVE PRESSURE SENSING METHOD AND APPARATUS 失效
    压力测量电容的方法和装置

    公开(公告)号：EP0974043A4

    公开(公告)日：2002-05-02

    申请号：EP98912130

    申请日：1998-03-30

    Applicant: MKS INSTR INC

    Inventor： HAASE WAYNE C ,  CHIZINSKI PAUL M ,  MINDLIN LEONID ,  LAHEY KERRY S

    IPC: G01L9/12

    CPC classification number: G01L9/12

    Abstract: A capacitive pressure sensor (10) includes a chamber (12) coupled to a region (14) whose pressure is to be determined. The sensor (10) includes a conductive flexible diaphragm (18) and a pair of electodes (24, 26), each defining a capacitance with the diaphragm (18). Variations in pressure in the chamber (12) cause deflection of the diaphragm (18) which in turn cause variation in the capacitances. A processing circuit (44) applies an excitation signal to the capacitances and couples the capacitances to inductive elements. A current through the inductive elements is detected to determine the difference in the sensor capacitances and, therefore, the deflection of the diaphragm (18) and the pressure in the chamber (12).

    Graphical user interface
    6.
    发明专利
    Graphical user interface 未知

    公开(公告)号：GB2446993B

    公开(公告)日：2011-08-10

    申请号：GB0811158

    申请日：2006-11-06

    Applicant: MKS INSTR INC

    Inventor： GOODMAN DANIEL A ,  TOLER MICHAEL ,  MINDLIN LEONID ,  SULLIVAN PHILIP W

    IPC: G06F17/30

    Abstract: A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.

    SELF-CALIBRATING PRESSURE SENSOR SYSTEM WITH PRESSURE SENSOR AND REFERENCE SENSOR THAT SHARE COMMON SEALED CHAMBER
    8.
    发明专利
    SELF-CALIBRATING PRESSURE SENSOR SYSTEM WITH PRESSURE SENSOR AND REFERENCE SENSOR THAT SHARE COMMON SEALED CHAMBER 未知

    公开(公告)号：SG11201506303RA

    公开(公告)日：2015-09-29

    申请号：SG11201506303R

    申请日：2014-04-01

    Applicant: MKS INSTR INC

    Inventor： MINDLIN LEONID ,  BART STEPHEN F ,  GU LEI

    IPC: G01L7/08 ,  B81B7/02 ,  G01L27/00

    Abstract: A self-calibrating pressure sensor system may measure the pressure of a gas or liquid. The system may include a pressure sensor, a reference sensor, and a drift compensation system. The pressure sensor may include a pressure-sensing flexible diaphragm with one side exposed to the gas or liquid and another side forming a wall of a sealed chamber. The reference sensor may include a reference flexible diaphragm that has two sides that are both within or exposed to the same sealed chamber. The drift compensation system may produce information that is indicative of the pressure of the gas or liquid based on the signal from the pressure sensor, and compensate for drift in this signal based on changes in the signal from the reference sensor. The pressure-sensing flexible diaphragm and the reference flexible diaphragm may be made at substantially the same time by depositing or growing a single layer of material in a single continuous step.

    9.
    发明专利
    未知

    公开(公告)号：DE69841095D1

    公开(公告)日：2009-10-08

    申请号：DE69841095

    申请日：1998-03-30

    Applicant: MKS INSTR INC

    Inventor： HAASE WAYNE C ,  CHIZINSKI PAUL M ,  MINDLIN LEONID ,  LAHEY KERRY S

    IPC: G01L9/12

    Abstract: A capacitive pressure sensor includes a chamber coupled to a region whose pressure is to be determined. The sensor includes a conductive flexible diaphragm and a pair of electrodes, each defining a capacitance with the diaphragm. Variations in pressure in the chamber cause deflection of the diaphragm which in turn causes variation in the capacitances. A processing circuit applies an excitation signal to the capacitances and couples the capacitances to inductive elements. A current through the inductive elements is detected to determine the difference in the sensor capacitances and, therefore, the deflection of the diaphragm and the pressure in the chamber.

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