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    APPARATUS AND METHOD FOR COMPENSATED SENSOR OUTPUT
    1.
    发明申请
    APPARATUS AND METHOD FOR COMPENSATED SENSOR OUTPUT 审中-公开
    补偿传感器输出的装置和方法

    公开(公告)号：WO03106945A2

    公开(公告)日：2003-12-24

    申请号：PCT/US0318337

    申请日：2003-06-11

    Applicant: MKS INSTR INC

    Inventor： HORNE STEPHEN F ,  MAIORANA PHILIP J ,  MATTHEW SANTHI E ,  MINDLIN LEONID ,  QUIGLEY CLAUDIA J ,  TARANTO ERIC R ,  SMITH DONALD K

    IPC: G01F15/02 ,  G01D3/02 ,  G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G01K

    CPC classification number: G01D3/022

    Abstract: A compensated sensor includes a sensor, a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output. Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensation circuitry where it is compared to a compensated sensor output developed by the compensation circuitry. The difference between the compensated sensor signal developed in the compensation circuitry and the output signal fed back to the compensation circuitry is also provided to the summer for summing with the one or more correction factors and the uncompensated sensor output.

    Abstract translation: 补偿传感器包括传感器，相对快速的馈通路径和相对较慢的补偿路径。 相对较快的馈通路径包括加法器和输出电路，例如求和放大器。 相对较慢的补偿路径包括产生例如温度依赖性或非线性效应等传感器缺陷的一个或多个校正因子的电路。 这些一个或多个校正因子被馈送到夏天以与未补偿的传感器输出相加。 另外，输出电路（例如，求和放大器）的输出被反馈到补偿电路，在该补偿电路中，与补偿电路开发的补偿传感器输出进行比较。 在补偿电路中产生的补偿传感器信号和反馈到补偿电路的输出信号之间的差异也被提供给加法器以与一个或多个校正因子和未补偿的传感器输出相加。

    Apparatus and method for compensated sensor output
    5.
    发明专利
    Apparatus and method for compensated sensor output 未知

    公开(公告)号：GB2405700A

    公开(公告)日：2005-03-09

    申请号：GB0427629

    申请日：2003-06-11

    Applicant: MKS INSTR INC

    Inventor： HORNE STEPHEN F ,  MAIORANA PHILIP J ,  MATTHEW SANTHI E ,  MINDLIN LEONID ,  QUIGLEY CLAUDIA ,  SMITH DONALD K ,  TARANTO ERIC R

    IPC: G01F15/02 ,  G01D3/02 ,  G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G06F13/14

    Abstract: A compensated sensor includes a sensor(108), a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer (204) and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors (208) for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output (202). Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensated sensor output developed by the compensated sensor signal developed in the compensation circuitry (102) and the output signal fed back to the compensation circuitry is also provided to tha summer for summing with the one or more correction factors and uncompensated sensor output.

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