公开(公告)号：JPS61254844A

公开(公告)日：1986-11-12

申请号：JP9712885

申请日：1985-05-08

Applicant: NEC CORP

Inventor： KIMURA JUN ,  KAWANA YOSHIE ,  KURIYAMA TOSHIHIDE

IPC: G01N27/414 ,  G01N27/30

Abstract: PURPOSE:To measure the concn. of sodium having low selectivity with ionophore by two electrodes by providing two kinds of ionophore-contg. films having different sodium sensitivities to the ion sensitive parts of two ion sensitive FETs. CONSTITUTION:The respectively different ionophore films 6, 7 are formed on the two ion sensitive FETs (ISFETs) 8, 9 formed on a multi-ion sensor chip 11. The distribution coeffts. of the 1st film 6 and the 2nd film 7 with sodium and potassium are varied. The potassium concn. is determined by measuring first the output voltage E1 of the ISFET having the 1st ionophore film and the sum of the potassium concn. and the sodium concn. is determined by measuring the output voltage E2 of the ISFET in the measurable range having the 2nd ionophore film. The sodium concn. is obtd. by subtracting the same.

公开(公告)号：JPS61245051A

公开(公告)日：1986-10-31

申请号：JP8692485

申请日：1985-04-23

Applicant: NEC CORP

Inventor： KURIYAMA TOSHIHIDE ,  KIMURA JUN ,  KAWANA YOSHIE

IPC: G01N27/00 ,  G01N27/30 ,  G01N27/414

Abstract: PURPOSE:To realize a process for producing micro-sensors which are suitable for mass-production and are made into one chip by forming enzyme immobilized films which are different from each other to the prescribed positions on the respective surfaces of semiconductor field effect type ion sensors (ISFET) made on the same chip in the stage of a wafer. CONSTITUTION:A non-water soluble high-polymer film 13 is first provided to the region except the sensor parts to be provided with the enzyme immobilized films 14 on the semiconductor wafer 3 formed with the ISFET1. Then the high- polymer soln. contg. the prescribed enzyme ejected from a nozzle 2a is stuck to the surface of the prescribed sensor parts where the film 13 is not formed to form the enzyme films. The enzyme is fixed by adding a crosslinking agent to the enzyme films or subjecting the films to photocrosslinking by which plural pieces of the different immobilized film 14 are provided to the surfaces of the prescribed sensor parts. The regions to be provided with the films 14 are controlled by the films 13 in the above-mentioned manner and therefore the accurate control of the area and thickness of the films 14 are made possible and he sensor having the uniform characteristics is obtd.

公开(公告)号：JPS61234348A

公开(公告)日：1986-10-18

申请号：JP7575785

申请日：1985-04-10

Applicant: NEC CORP

Inventor： KAWANA YOSHIE ,  KIMURA JUN ,  KURIYAMA TOSHIHIDE

IPC: G01N27/00 ,  C12Q1/00 ,  G01N27/30 ,  G01N27/414

Abstract: PURPOSE:To enable massproduction of biosensors, by a method wherein an enzyme immobilized film and a photoresist layer are formed on a semiconductor wafer with an ion sensor formed thereon and then, the photoresist layer and the enzyme immobilized film are removed except for necessary portion. CONSTITUTION:An ion induction section 2 of an FE type ion sensor is provided on the top surface of a sapphire substrate 1 while a gold electrode 5 on the undersurface thereof. An enzyme immobilized film 3 and a photoresist layer 4 are formed over the entire surface on the side of the ion induction section 2. Then, a photomask is used to remove the photoresist layer 4 except for the surface of the ion induction section 2 by exposure and development and then, the work is immersed into an aqueous solution of crude trypsin or the like to decompose the enzyme-immobilized film 3. Thereafter, a biosensor with an eyzyme film at a specified ion induction section alone by removing the photoresist layer 4. Thus, a massproducible fine one-chipped sensor can be obtained by applying an IC production technology.

公开(公告)号：JPS6188135A

公开(公告)日：1986-05-06

申请号：JP20916584

申请日：1984-10-05

Applicant: Nec Corp

Inventor： KURIYAMA TOSHIHIDE ,  KIMURA JUN ,  KAWANA YOSHIE

IPC: C12Q1/00 ,  G01N27/00 ,  G01N27/414 ,  G01N27/30

CPC classification number: C12Q1/001 ,  G01N27/414

Abstract: PURPOSE:To form easily integrated micro semiconductor biosensors by integrating the plural semiconductor field effect type ion sensors on one chip. CONSTITUTION:A photoresist film 6 soluble in acetone is spin-coated on the surface of a wafer constituted by forming the semiconductor field effect type ion sensors ISFETs by using an island-shaped silicon layer on the front of a sapphire substrate 1 and depositing gold 8 by evaporation on the rear. The photoresist film on the surface of the ISFETs to be provided with an enzyme immobilizing film is removed by exposing and developing in using a photomask and thereafter a protein soln. 7 contg. enzyme and crosslinking agent is spin- coated thereon. The water is then immersed in acetone to dissolve the photoresist 6 and at the same time the enzyme immobilizing film 7 coated on the photoresist is removed. The wafer is thereafter scribed, by which the semiconductor biosensors are obtd.

Abstract translation: 目的：通过将多个半导体场效应型离子传感器集成在一个芯片上，形成容易集成的微型半导体生物传感器。 构成：将可溶于丙酮的光致抗蚀剂膜6旋涂在通过使用蓝宝石衬底1前面的岛状硅层形成半导体场效应型离子传感器ISFET的晶片的表面上，并沉积金8 通过后方蒸发。 通过使用光掩模曝光和显影，然后用蛋白质溶胶，去除要提供酶固定膜的ISFET表面上的光致抗蚀剂膜。 7对比 酶和交联剂被旋涂在其上。 然后将水浸入丙酮中以溶解光致抗蚀剂6，同时除去涂覆在光致抗蚀剂上的酶固定膜7。 然后划刻晶片，通过该晶片可以看到半导体生物传感器。