Abstract:
An optical element for diffracting x-rays that includes a substrate (4), a diffraction structure (6) applied to the substrate, the diffraction structure including an exterior surface facing away from the substrate and the diffraction structure capable of diffracting x-rays and a protective layer (14) applied to the exterior surface.
Abstract:
An analyzing system (10) comprised of a radiation source (12) that provides a beam (14) of radiation of various wavelengths in the range of 0.3 to 1.0 nm, a sample (16) receives and reflects the incident beam through a slit (19) to a grating (20), a grating (20) that reflects only the zero order of the beam (22), and a detector (24) that detects only the zero order. The grating (20) includes a multi-layer structure (26) that has alternating layers of materials, a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of the plurality of grooves and plurality of lands is formed randomly in the multi-layer structure.