MULTI-LAYER GRATING FOR MONOCHROMATIZATION AND SPECTROSCOPY
    12.
    发明公开
    MULTI-LAYER GRATING FOR MONOCHROMATIZATION AND SPECTROSCOPY 有权
    复合网格monochromatisation与光谱

    公开(公告)号:EP1399927A4

    公开(公告)日:2005-01-26

    申请号:EP02746779

    申请日:2002-06-27

    Applicant: OSMIC INC

    CPC classification number: B82Y10/00 G02B5/1809 G02B5/1838 G21K1/06 G21K1/062

    Abstract: An analyzing system (10) comprised of a radiation source (12) that provides a beam (14) of radiation of various wavelengths in the range of 0.3 to 1.0 nm, a sample (16) receives and reflects the incident beam through a slit (19) to a grating (20), a grating (20) that reflects only the zero order of the beam (22), and a detector (24) that detects only the zero order. The grating (20) includes a multi-layer structure (26) that has alternating layers of materials, a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of the plurality of grooves and plurality of lands is formed randomly in the multi-layer structure.

Patent Agency Ranking