Abstract:
The invention relates to a grating (20) comprising: a multi-layer structure (26) comprising: alternating layers of materials; a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of said plurality of grooves and plurality of lands is formed randomly in said multi-layer structure.
Abstract:
An analyzer that includes a first multilayer structure, a spacer material deposited on the first multilayer structure and a second multilayer structure deposited on the spacer material.
Abstract:
The invention relates to a grating (20) comprising: a multi-layer structure (26) comprising: alternating layers of materials; a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of said plurality of grooves and plurality of lands is formed randomly in said multi-layer structure.
Abstract:
The invention relates to a grating (20) comprising: a multi-layer structure (26) comprising: alternating layers of materials; a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of said plurality of grooves and plurality of lands is formed randomly in said multi-layer structure.
Abstract:
An analyzer that includes a first multilayer structure (350), a spacer material (354) deposited on the first multilayer structure and a second multilayer structure (356) deposited on the spacer material.
Abstract:
An analyzing system (10) comprised of a radiation source (12) that provides a beam (14) of radiation of various wavelengths in the range of 0.3 to 1.0 nm, a sample (16) receives and reflects the incident beam through a slit (19) to a grating (20), a grating (20) that reflects only the zero order of the beam (22), and a detector (24) that detects only the zero order. The grating (20) includes a multi-layer structure (26) that has alternating layers of materials, a plurality of grooves (30) formed between a plurality of lands (32), wherein at least one structural parameter of the plurality of grooves and plurality of lands is formed randomly in the multi-layer structure.