公开(公告)号：IL194864A

公开(公告)日：2012-10-31

申请号：IL19486408

申请日：2008-10-23

Applicant: ROSEMOUNT AEROSPACE INC ,  GUO SHUWEN

Inventor： GUO SHUWEN

Abstract: A pendulous capacitive accelerometer including a substrate having a substantially planar upper surface with an electrode section, and a sensing plate having a central anchor portion supported on the upper surface of the substrate to define a hinge axis. The sensing plate includes a solid proof mass on a first side of the central anchor portion and a substantially hollow proof mass on a second side of the central anchor portion, providing for reduced overall chip size and balanced gas damping. The solid proof mass has a first lower surface with a first electrode element thereon, and the substantially hollow proof mass has a second lower surface with a second electrode element thereon. Both the solid proof mass and the hollow proof mass have the same capacitive sensing area. The sensing plate rotates about the hinge axis relative to the upper surface of the substrate in response to an acceleration.

公开(公告)号：AU2003267243A1

公开(公告)日：2004-04-19

申请号：AU2003267243

申请日：2003-09-16

Applicant: ROSEMOUNT AEROSPACE INC

Inventor： GUO SHUWEN ,  HOFFMAN ROSS

IPC: B41J2/465 ,  B81B1/00 ,  G02B26/08

公开(公告)号：AU2003265988A1

公开(公告)日：2004-03-29

申请号：AU2003265988

申请日：2003-09-09

Applicant: ROSEMOUNT AEROSPACE INC

Inventor： GUO SHUWEN ,  WIEGELE THOMAS

IPC: G01J5/00

Abstract: A detector including a base having a recess formed therein and a diaphragm generally extending across the recess. The detector further includes an infrared sensitive component or a piezoelectric or piezoresistive element located on, above or supported by the diaphragm. The diaphragm includes a material which is generally resistant to liquid chemical etchants and which has a thermal conductivity of less than about 0.005 Wcm -1 K -1 .