公开(公告)号：WO2004029692A3

公开(公告)日：2004-05-21

申请号：PCT/US0329076

申请日：2003-09-16

Applicant: ROSEMOUNT AEROSPACE INC

Inventor： GUO SHUWEN ,  HOFFMAN ROSS

IPC: B41J2/465 ,  B81B1/00 ,  G02B26/08

CPC classification number: G02B26/0833 ,  B41J2/465 ,  B81B1/006 ,  B81B2201/042 ,  G02B26/0866

Abstract: A micro mirror structure including a plurality of individually movable mirrors. Each mirror has a generally concave shape from a top perspective at a temperature of about 20 degrees Celsius and has a generally convex shape from a top perspective at a temperature of about 85 degrees Celsius. In one embodiment, the radius of curvature may be greater than about 500 mm at a temperature of about 20 degrees Celsius and may be less than about -600 mm at a temperature of about 85 degrees Celsius at a thickness of about 10 microns. In another embodiment, the invention is a micro mirror structure including a plurality of individually movable mirrors arranged in an array. Each mirror includes a substrate, a diffusion barrier layer located above the substrate, and a reflective layer located above the diffusion barrier layer. The diffusion barrier layer generally limits the diffusion of the top reflective layer through the diffusion barrier layer.

Abstract translation: 一种微镜结构，包括多个可单独移动的镜子。 每个镜子在大约20摄氏度的温度下从顶部视角具有大致凹形的形状，并且在大约85摄氏度的温度下从顶部视角具有大致凸形的形状。 在一个实施例中，曲率半径在约20摄氏度的温度下可以大于约500mm，并且在约10微米的厚度下在约85摄氏度的温度下可以小于约-600mm。 在另一个实施例中，本发明是一种微反射镜结构，其包括以阵列布置的多个单独可移动的反射镜。 每个反射镜包括衬底，位于衬底上方的扩散阻挡层以及位于扩散阻挡层上方的反射层。 扩散阻挡层通常限制顶部反射层通过扩散阻挡层的扩散。

公开(公告)号：AU2003267243A1

公开(公告)日：2004-04-19

申请号：AU2003267243

申请日：2003-09-16

Applicant: ROSEMOUNT AEROSPACE INC

Inventor： GUO SHUWEN ,  HOFFMAN ROSS

IPC: B41J2/465 ,  B81B1/00 ,  G02B26/08