Abstract:
A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1-P2).
Abstract:
A cell for recording differential pressures has a single brittle material diaphragm 63, 93, 102 mounted on support plates 50, 75, 120, 130 positioned on opposite sides of the diaphragm 63, 93, 102. The diaphragm surfaces 43C, 77C, 102A, 102C are, when zero differential pressure prevails on the support plate 50, 75, 120, 130, concave and shaped to conform very closely to the shape the diaphragm 63, 93, 102 has when it is deflected so that when the diaphragm 63, 93, 102 is under a selected pressure and it is forced against one of the support plates 50, 75, 120, 130 in either direction, the diaphragm 63, 93, 102 is substantially planar and supported fully on its support plate 50, 75, 120, 130. The diaphragm 63, 93, 102 may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface 43C, 77C opposite from the applied pressure flat. When the pressure is removed, the diaphragm 63, 93, 102 relaxes and the exact required shape is produced on the surface 43C, 77C, 102A that had been bowed out and ground flat. The same procedure can be applied to the other side 102C of the diaphragm 102 or two diaphragm sections 43, 43; 77, 77 may be fixed together.
Abstract:
PRESSURE TRANSDUCER A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1 P2).
Abstract:
A capacitive sensing cell is adapted for manufacture in a batch process, and uses a substrate or base from a rigid insulating material such as glass and a diaphragm assembly of a brittle semiconductor. The diaphragm assembly and the substrate are anodically bonded together. A very shallow recess is formed on either the diaphragm or the substrate to accommodate a deposited capacitor plate. Two such assemblies are connected together and the assembly is filled with noncompressible fluid to slightly bow the diaphragms away from the substrates. Differential pressure between the diaphragm assemblies is sensed by detecting the relative positions of the two diaphragms.
Abstract:
A pressure transducer has a stress isolator layer (18) which permits the sensor (25) to be non-resiliently mounted (hard mounted) to a mounting surface (26) that in turn is subjected to strain. The strain of the mounting surface (26) tends to induce undesired stress in the sensing diaphragm (25) and the present stress isolator layer (18) minimizes the amount of stress that is transferred to the sensing diaphragm (25) to thereby reduce error. The spring (17) preferably comprises a silicon leaf-type spring (17) with or without isolating slots and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gauge resistors (32) or through capacitive sensing.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.