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    Process for manufacturing microelectromechanical devices, in particular electroacoustic modules
    13.
    发明授权
    Process for manufacturing microelectromechanical devices, in particular electroacoustic modules 有权

    公开(公告)号：US11383971B2

    公开(公告)日：2022-07-12

    申请号：US16518865

    申请日：2019-07-22

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Fabio Quaglia ,  Marco Ferrera ,  Marco Del Sarto

    IPC: B81B7/00 ,  B81C1/00 ,  H01L29/66

    Abstract: A process for manufacturing MEMS devices, includes forming a first assembly, which comprises: a dielectric region; a redistribution region; and a plurality of unit portions. Each unit portion of the first assembly includes: a die arranged in the dielectric region; and a plurality of first and second connection elements, which extend to opposite faces of the redistribution region and are connected together by paths that extend in the redistribution region, the first connection elements being coupled to the die. The process further includes: forming a second assembly which comprises a plurality of respective unit portions, each of which includes a semiconductor portion and third connection elements; mechanically coupling the first and second assemblies so as to connect the third connection elements to corresponding second connection elements; and then removing at least part of the semiconductor portion of each unit portion of the second assembly, thus forming corresponding membranes.

    Fluid ejection device with piezoelectric actuator and manufacturing process thereof
    14.
    发明授权
    Fluid ejection device with piezoelectric actuator and manufacturing process thereof 有权

    公开(公告)号：US10974508B2

    公开(公告)日：2021-04-13

    申请号：US16392007

    申请日：2019-04-23

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Domenico Giusti ,  Marco Ferrera ,  Carlo Luigi Prelini

    IPC: B41J2/14 ,  B41J2/16

    Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.

    Methods of forming and using fluid ejection devices and printheads
    20.
    发明授权
    Methods of forming and using fluid ejection devices and printheads 有权

    公开(公告)号：US11084283B2

    公开(公告)日：2021-08-10

    申请号：US16676070

    申请日：2019-11-06

    Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC.

    Inventor： Domenico Giusti ,  Marco Ferrera ,  Carlo Luigi Prelini ,  Simon Dodd

    IPC: B41J2/14 ,  B41J2/18 ,  B41J2/16 ,  B41J2/055 ,  B05B1/02

    Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.

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