公开(公告)号：EP3907178A1

公开(公告)日：2021-11-10

申请号：EP21171642.8

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  PRELINI, Carlo Luigi ,  FERRERA, Marco ,  LAZZARI, Carla Maria ,  SEGHIZZI, Luca ,  BONI, Nicolò ,  CARMINATI, Roberto ,  QUAGLIA, Fabio

IPC: B81B7/00

Abstract: The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

公开(公告)号：EP3907177A1

公开(公告)日：2021-11-10

申请号：EP21171635.2

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  FERRERA, Marco ,  PRELINI, Carlo Luigi

IPC: B81B3/00 ,  H01L41/09 ,  H04R17/00 ,  H04R7/18

Abstract: The MEMS actuator (50) is formed by a body (51), which surrounds a cavity (52) and by a deformable structure (54), which is suspended on the cavity and is formed by a movable portion (56) and by a plurality of deformable elements (55). The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator (50) further comprises at least one plurality of actuation structures (80A, 80B), which are supported by the deformable elements (55) and are configured to cause a translation of the movable portion greater than the deformation of each deformable element (55). The actuation structures each have a respective first piezoelectric region (82).

公开(公告)号：EP3381690A1

公开(公告)日：2018-10-03

申请号：EP17187830.9

申请日：2017-08-24

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc.

Inventor： GIUSTI, Domenico ,  FERRERA, Marco ,  PRELINI, Carlo Luigi ,  DODD, Simon

IPC: B41J2/055 ,  B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14 ,  B05B1/02 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2002/14346 ,  B41J2002/14403 ,  B41J2002/14419

Abstract: Ejection device (150) for fluid (6), comprising a solid body including: first semiconductor body (80, 100) including a chamber (130) for containing the fluid (6), an ejection nozzle (121) in fluid connection with the chamber (130), and an actuator (91) operatively connected to the chamber (130) to generate, in use, one or more pressure waves in the fluid (6) such as to cause ejection of the fluid (6) from the ejection nozzle (121); and a second semiconductor body (30) including a channel (123, 41, 48a) for feeding the fluid (6) to the chamber (130), coupled to the first semiconductor body (80, 100), in such a way that the channel (123, 41, 48a) is in fluid connection with the chamber (130). The second semiconductor body (30) integrates a damping cavity (40) over which extends a damping membrane (35), the damping cavity and the damping membrane extending laterally to the channel (48a) for feeding the fluid.