公开(公告)号：EP1715580A1

公开(公告)日：2006-10-25

申请号：EP05425185.5

申请日：2005-03-31

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: H03H9/02

CPC classification number: H03H9/02409 ,  G01C19/5726 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814 ,  H03H2009/02496

Abstract: A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (ω R ) a relative displacement (ΔY) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (ΔY). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).

Abstract translation: 用于控制振荡微机电系统的共振频率的装置包括：具有电容耦合到第一主体（10）的第一主体（10）和第二主体（11）的微结构（2）和 以可校准的共振频率（ÉR）相对于其弹性振荡，第二主体（11）和第一主体（10）之间的相对位移（“Y”）可从外部检测; 以及与微结构（2）相关联的用于检测相对位移（“Y”）的放大器（21）。 DC去耦元件（23）布置在放大器（21）和微结构（2）之间。

公开(公告)号：EP1624286A1

公开(公告)日：2006-02-08

申请号：EP04425600.6

申请日：2004-08-03

Applicant: STMicroelectronics S.r.l.

Inventor： Caminada, Carlo ,  Lasalandra, Ernesto ,  Prandi, Luciano

IPC: G01C19/56

CPC classification number: G01C19/5726

Abstract: A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detecting a displacement of the mass (108) according to the predetermined degree of freedom (Y). The displacement-detecting device (104, 106) includes a force feedback loop (106) of a purely analog type, which supplies electrostatic forces tending to bring back the mass into the rest position (Y 0 ), in response to a displacement of the mass (108) itself according to the predetermined degree of freedom (Y).

Abstract translation: 微机电传感器包括具有根据预定自由度（Y）相对于静止位置（Y 0）可移动的质量块（108）的微结构（102）。 以及用于根据所述预定自由度（Y）检测所述质量块（108）的位移的位移检测装置（104,106）。 位移检测装置（104,106）包括纯模拟类型的力反馈回路（106），其响应于所述位移检测装置的位移而提供倾向于将质量带回静止位置（Y 0）的静电力 质量（108）本身根据预定的自由度（Y）。