公开(公告)号：EP1278068A2

公开(公告)日：2003-01-22

申请号：EP02015859.8

申请日：2002-07-16

Applicant: STMicroelectronics S.r.l. ,  Hewlett-Packard Company

Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso ,  Baschirotto, Andrea

IPC: G01P15/125 ,  G01P15/13

CPC classification number: G01D5/2417 ,  G01D3/066 ,  G01D5/24 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

Abstract: A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations (ΔVc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

Abstract translation: 一种用于检测包括固定体（3）和移动块（4）的微机电传感器（101）的位移，形成至少一个第一感测电容器（107）和第二传感电容器（108），其方法 分别连接到第一输入端子（102）和，第一输出端子（104）和所述感测电路的第二输出端（105）和具有一个休息公共感测电容（CS）。 该方法包括如下步骤：关闭第一负反馈回路（136），其包括第一感测电容器（107）和第二感测电容器（108）和差分放大器（124）; 供给到差分放大器（124）的阶梯感测电压（Vs）通过驱动电容器（121，122），以便产生一个电驱动量的变化（DELTA Vc）的（VC），这些中的至少一个输入端（124B） 成反比公共感测电容（Cs）等 和驱动该传感器（101）与所述电驱动量（Vc）的。

公开(公告)号：EP1811309A1

公开(公告)日：2007-07-25

申请号：EP06425026.9

申请日：2006-01-20

Applicant: STMicroelectronics S.r.l.

Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

CPC classification number: G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

Abstract: A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

Abstract translation: 自由落体检测器装置包括惯性传感器（8），与惯性传感器（8）相关联的检测电路（21）和用于向惯性传感器（8）提供读取信号的信号源（20）。 该装置还包括：存储元件（30），其可选择地连接到检测电路（21），用于响应于提供给惯性传感器的读取信号而存储由检测电路（21）产生的反馈信号（V FBX） 8）; 以及耦合到所述存储元件（30）的用于将所述反馈信号（V FBX）提供给所述惯性传感器（8）的反馈电路（32a，32b，24,36），使得所述检测电路（21）产生至少一个检测 信号（V XO）响应于提供给惯性传感器（8）的反馈信号（V FBX）。

公开(公告)号：EP1793497A1

公开(公告)日：2007-06-06

申请号：EP05425863.7

申请日：2005-12-02

Applicant: STMicroelectronics S.r.l.

Inventor： Ungaretti, Tommaso ,  Lasalandra, Ernesto

IPC: H03K17/96 ,  G01P15/125

CPC classification number: G01P15/125

Abstract: A read device of a capacitive sensor includes: a signal source (104, C1, C2) supplying an electrical read signal (V RD ) for driving the capacitive sensor (101); and a discrete-time sense circuit (107) for generating an electrical output signal (V OM ), correlated to variations of capacitance (ΔC S ) of the capacitive sensor (101), in response to variations of the electrical read signal (V RD ). The device moreover includes: a modulator stage (105, 106) for generating a modulated electrical read signal (V RDM ) on the basis of the electrical read signal (V RD ) and supplying the modulated electrical read signal (V RDM ) to the capacitive sensor (101); a demodulator stage (110), connected to the sense circuit (107), for demodulating the electrical output signal (V OM ) and generating a demodulated electrical output signal (V OM ); and a lowpass filtering stage (112) for generating a filtered electrical output signal (V OC ), on the basis of the modulated electrical output signal (V OM ).

Abstract translation: 电容传感器的读装置包括：一信号源（104，C1，C2）提供给电读取信号（V RD），用于驱动所述电容性传感器（101）; 并在电输出信号（V OM），关联于电容性传感器（101）的电容（“CS）的变化产生一个离散时间感测电路（107），（响应于所述电读取信号V RD的变化 ）。 该装置更上方，包括：用于电读取信号（V RD）的基础上产生一个调制电读取信号（V RDM）和调制电读取信号（V RDM）供给到所述电容的调制器级（105,106） 传感器（101）; 连接到用于解调的电输出信号（V OM），并产生解调的电输出信号（V OM）的感测电路（107）的解调器级（110）; 和用于产生经滤波的电输出信号（V OC），经调制的电输出信号（V OM）的基础上的低通滤波级（112）。

公开(公告)号：EP1811309B1

公开(公告)日：2009-10-07

申请号：EP06425026.9

申请日：2006-01-20

Applicant: STMicroelectronics S.r.l.

Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

CPC classification number: G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

Abstract: A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

公开(公告)号：EP1988366A1

公开(公告)日：2008-11-05

申请号：EP07425256.0

申请日：2007-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： Ungaretti, Tommaso ,  Jawed, Syed Arsalan ,  Gottardi, Massimo ,  Baschirotto, Andrea

IPC: G01D5/24

CPC classification number: G01D5/24 ,  B06B1/0292 ,  G01L9/0073 ,  G01P1/023 ,  G01P15/125

Abstract: In a capacitive sensor (10), a detection structure (11), of a microelectromechanical type, is provided with a fixed element (4) and a mobile element (5), capacitively coupled to one another, generating a capacitive variation (ΔC m ) as a function of a quantity to be detected, and with a parasitic coupling element (2), capacitively coupled to at least one between the mobile element (5) and the fixed element (4) generating a first parasitic capacitance (27; 28), intrinsic to the detection structure (11); a readout-interface circuit (12) is connected to the detection structure (11) and generates, on an output terminal (23) thereof, an output signal (V out ) as a function of the capacitive variation (ΔC m ). The readout-interface circuit (12) has a feedback path (29) between the output terminal (23) and the parasitic coupling element (2) so as to drive the first intrinsic parasitic capacitance (27; 28) with the output signal (V out ).

Abstract translation: 在电容传感器（10），微机电型的检测结构（11），被提供有固定元件（4）和移动元件（5），电容性地耦合到彼此，生成的电容的变化（“C 米），为量的函数被检测，和带有寄生耦合元件（2），电容的可移动元件（5）和所述固定元件（4）产生第一寄生电容（27之间耦合到至少一个; 28）固有的检测结构（11）; 的读出接口电路（12）被连接到所述检测结构（11）和基因的价格，到输出端子（23）上，以输出信号（V OUT）作为电容变化（“C米）的函数。 所读出的接口电路（12）具有输出端（23）和所述寄生耦合元件（2）之间的反馈路径（29），以便驱动所述第一本征寄生电容（27; 28）与所述输出信号（V 出）。

公开(公告)号：EP1811309A9

公开(公告)日：2007-11-14

申请号：EP06425026.9

申请日：2006-01-20

Applicant: STMicroelectronics S.r.l.

Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/13 ,  G01D5/24 ,  G11B19/04

CPC classification number: G11B19/043 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G11B21/12

Abstract: A free-fall detector device includes an inertial sensor (8), a detection circuit (21) associated to the inertial sensor (8), and a signal source (20) for supplying a read signal to the inertial sensor (8). The device moreover includes: a storage element (30), selectively connectable to the detection circuit (21) for storing a feedback signal (V FBX ) generated by the detection circuit (21) in response to the read signal supplied to the inertial sensor (8); and a feedback circuit (32a, 32b, 24, 36) coupled to the storage element (30) for supplying the feedback signal (V FBX ) to the inertial sensor (8) so that the detection circuit (21) generates at least one detection signal (V XO ) in response to the feedback signal (V FBX ) supplied to the inertial sensor (8).

Abstract translation: 自由落体检测器装置包括惯性传感器（8），与惯性传感器（8）相关联的检测电路（21）以及用于向惯性传感器（8）提供读取信号的信号源（20）。 该装置还包括：存储元件（30），其可选择性地连接到检测电路（21），用于响应于提供给惯性传感器（8）的读取信号而存储由检测电路（21）产生的反馈信号（VFBX） ）; 和耦合到存储元件（30）的反馈电路（32a，32b，24,36），用于将反馈信号（VFBX）提供给惯性传感器（8），使得检测电路（21）产生至少一个检测信号 （VXO）以响应提供给惯性传感器（8）的反馈信号（VFBX）。

公开(公告)号：EP1790988A1

公开(公告)日：2007-05-30

申请号：EP05425842.1

申请日：2005-11-29

Applicant: STMicroelectronics S.r.l.

Inventor： Ungaretti, Tommaso ,  Lasalandra, Ernesto

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/131

Abstract: A detection circuit (42) is provided with a differential capacitive sensor (1) and with an interface circuit (30) having a first sense input (7a) and a second sense input (7b), electrically connected to the differential capacitive sensor (1). Provided in the interface circuit are: a sense amplifier (12) connected at input to the first sense input and to the second sense input (7a, 7b) and supplying an output signal (V o ) related to a capacitive unbalancing (ΔC s ) of the differential capacitive sensor (1); and a common-mode control circuit (32), connected to the first sense input (7a) and to the second sense input (7b) and configured to control a common-mode electrical quantity present on the first sense input (7a) and on the second sense input (7b). The common-mode control circuit (32) is of a totally passive type and is provided with a capacitive circuit (34, 35), which is substantially identical to an equivalent electrical circuit of the differential capacitive sensor (1) and is driven with a driving signal V r ‾ in phase opposition with respect to a read signal (V r ) supplied to the differential capacitive sensor.

公开(公告)号：EP1715580A1

公开(公告)日：2006-10-25

申请号：EP05425185.5

申请日：2005-03-31

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Lasalandra, Ernesto ,  Ungaretti, Tommaso

IPC: H03H9/02

CPC classification number: H03H9/02409 ,  G01C19/5726 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814 ,  H03H2009/02496

Abstract: A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure (2), having a first body (10) and a second body (11), which is capacitively coupled to the first body (10) and elastically oscillatable with respect thereto at a calibratable frequency of resonance (ω R ) a relative displacement (ΔY) between the second body (11) and the first body (10) being detectable from outside; and an amplifier (21) associated to the microstructure (2) for detecting the relative displacement (ΔY). DC decoupling elements (23) are arranged between the amplifier (21) and the microstructure (2).

Abstract translation: 用于控制振荡微机电系统的共振频率的装置包括：具有电容耦合到第一主体（10）的第一主体（10）和第二主体（11）的微结构（2）和 以可校准的共振频率（ÉR）相对于其弹性振荡，第二主体（11）和第一主体（10）之间的相对位移（“Y”）可从外部检测; 以及与微结构（2）相关联的用于检测相对位移（“Y”）的放大器（21）。 DC去耦元件（23）布置在放大器（21）和微结构（2）之间。

公开(公告)号：EP1278068A3

公开(公告)日：2003-08-20

申请号：EP02015859.8

申请日：2002-07-16

Applicant: STMicroelectronics S.r.l. ,  Hewlett-Packard Company

Inventor： Lasalandra, Ernesto ,  Ungaretti, Tommaso ,  Baschirotto, Andrea

IPC: G01P15/125 ,  G01P15/13 ,  G01D5/24 ,  G01R27/26

CPC classification number: G01D5/2417 ,  G01D3/066 ,  G01D5/24 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

Abstract: A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations (ΔVc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .