公开(公告)号：EP1962054A1

公开(公告)日：2008-08-27

申请号：EP07425075.4

申请日：2007-02-13

Applicant: STMicroelectronics S.r.l.

Inventor： Caminada, Carlo ,  Prandi, Luciano ,  Lasalandra, Ernesto

IPC: G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a first mass (107) oscillatable according to a first axis (X); an inertial sensor (6), including a second mass (108), drawn along by the first mass (107) and constrained so as to oscillate according to a second axis (Y), in response to a rotation (Ω) of the gyroscope (100); a driving device (103), coupled to the first mass (107) so as to form a feedback control loop (105) and configured to maintain the first mass (107) in oscillation at a resonance frequency (ω R ); and an open-loop reading device (104), coupled to the inertial sensor (6) for detecting displacements of the second mass (108) according to the second axis (Y). The driving device (103) includes a read signal generator (130), for supplying to the inertial sensor (6) at least one read signal (V S ) having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency (ω R ).

Abstract translation: 一种微机电陀螺仪，包括：第一质量块（107）可振荡根据第一轴线（X）; 惯性传感器（6）包括一个第二质量（108），沿着由第一质量（107）吸入并约束，以摆动雅丁到第二轴（Y）的，响应于所述陀螺仪的旋转（©） （100）; 的驱动装置（103），耦合到所述第一质量块（107），以便形成一反馈控制回路（105）和配置成用于维持振荡第一质量（107）在谐振频率（E R）; 以及耦合到所述惯性传感器（6），用于检测所述第二质量块（108）雅鼎的位移到第二轴（Y）的开环读出装置（104）。 的驱动装置（103）包括用于供给到所述惯性传感器（6）的至少一个读出信号具有振幅的方波信号的形状（VS）的读信号发生器（130）做正弦与共振频率变化 （E R）。

公开(公告)号：EP1959234A1

公开(公告)日：2008-08-20

申请号：EP07425077.0

申请日：2007-02-13

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

IPC: G01C19/56

CPC classification number: G01C19/5762 ,  G01C19/5726

Abstract: A microelectromechanical gyroscope includes: a microstructure (102) having a first mass (107), which can oscillate according to a first axis (X), and a second mass (108), constrained to the first mass (107) so as to oscillate according to a second axis (Y) in response to a rotation (Ω) of the microstructure (102); and a driving device (103), coupled to the microstructure (102) to maintain the first mass (107) in oscillation at a resonance frequency (ω R ). The driving device (103) is provided with a low-pass filter, (114) having a passband (PB) such that the resonance frequency (ω R ) is comprised in the passband (PB), and a disturbance frequency (ω D ) associated to disturbance signals (I ADD (t), V AO (t)) due to coupling between the first mass (107) and the second mass (108) is not comprised in the passband (PB).

Abstract translation: 一种微机电陀螺仪，包括：微结构（102），其具有第一质量（107），其可摆动雅丁于第一轴（X）和第二块（108），限制到所述第一质量块（107），以便振荡 gemäß到第二轴（Y）响应于所述微结构（102）的旋转（©）; 和耦合到所述微观结构（102）的驱动装置（103），以保持在振荡第一质量（107）在谐振频率（E R）。 驱动装置（103）设置有具有通带（PB）的低通滤波器（114）检查那样的共振频率（E R）在通带（PB）是由和扰动频率（E D） 相关联的对干扰信号（I ADD（t）的，V AO（t））的归因于第一质量（107）和所述第二质量块（108）的通带（PB）不是由之间的耦合。

公开(公告)号：EP1959233A1

公开(公告)日：2008-08-20

申请号：EP07425076.2

申请日：2007-02-13

Applicant: STMicroelectronics S.r.l.

Inventor： Prandli, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

IPC: G01C19/56

CPC classification number: G01C23/005 ,  G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes a microstructure (102), comprising a first mass (107) and a second mass (108), wherein the first mass (107) is oscillatable according to a first axis (X) and the second mass (108) is constrained to the first mass (107) so as to be drawn along by the first mass (107) according to the first axis (X) and to oscillate according to a second axis (Y), in response to a rotation (Ω) of the microstructure (102). A driving device (103) is coupled to the microstructure (102) to maintain the first mass (107) in oscillation at the driving frequency (ω R ), and a reading device (104) detects displacements of the second mass (108) according to the second axis (Y). The gyroscope is provided with a self-test actuation system (6d, 6e, 6h, 106) coupled to the second mass (108) for applying an electrostatic force (F E ) at the driving frequency (ω R ) so as to move the second mass (108) according to the second axis (Y).

Abstract translation: 微机电陀螺仪包括微结构（102），其包括第一质量块（107）和第二质量块（108），其中所述第一质量块（107）可根据第一轴线（X）振荡，所述第二质量块 约束到第一质量（107），以便根据第一轴线（X）沿着第一质量块（107）拉伸，并且响应于第二轴线（Y）的旋转（©），根据第二轴线 微结构（102）。 驱动装置（103）联接到微结构（102）以保持第一质量块（107）在驱动频率（ÉR）处振荡，并且读取装置（104）根据以下步骤检测第二质量块（108）的位移： 到第二轴（Y）。 陀螺仪设置有耦合到第二质量块（108）的自检致动系统（6d，6e，6h，106），用于在驱动频率（ÉR）处施加静电力（FE），以便移动第二 质量（108）根据第二轴（Y）。

公开(公告)号：EP1624285A1

公开(公告)日：2006-02-08

申请号：EP04425599.0

申请日：2004-08-03

Applicant: STMicroelectronics S.r.l.

Inventor： Caminada, Carlo ,  Lasalandra, Ernesto ,  Prandi, Luciano

IPC: G01C19/56

CPC classification number: G01C19/5726

Abstract: A resonant micro-electro-mechanical system includes: a microstructure (102) having a mass (107), which is free to oscillate in accordance with a predetermined degree of freedom (X); and a driving device (103), coupled to the mass (107) for maintaining the mass (107) itself in oscillation at a resonance frequency (ω R ). The driving device (103) is provided with a differential sense amplifier (109), supplying first signals (V RD1 , V RD2 ) indicative of a velocity of oscillation of the mass (107), and an actuation and control stage (111, 112, 113, 116) supplying second signals (V FBD1 , V FBD2 ) for driving the mass (107) on the basis of the first signals (V RD1 , V RD2 ). The driving device (103) moreover includes a filtering circuit (110) of a high-pass type, which is connected between the differential sense amplifier (109) and the actuation and control stage (111, 112, 113, 116) and has a bandpass (B) that includes the resonance frequency (ω R ).

Abstract translation: 共振微机电系统包括：具有质量（107）的微结构（102），其根据预定自由度（X）自由振荡; 以及驱动装置（103），其联接到质量块（107），用于将质量（107）本身以共振频率（ÉR）自身振荡。 驱动装置（103）设置有差分读出放大器（109），提供指示质量（107）的振荡速度的第一信号（V RD1，V RD2）和驱动和控制级（111,112 ，113,116）根据第一信号（V RD1，V RD2）提供用于驱动质量（107）的第二信号（V FBD1，V FBD2）。 驱动装置（103）还包括高通型滤波电路（110），其连接在差动读出放大器（109）和驱动与控制级（111,112,113,116）之间，并具有 带通（B），包括谐振频率（ÉR）。

公开(公告)号：EP2360449A1

公开(公告)日：2011-08-24

申请号：EP11154752.7

申请日：2011-02-16

Applicant: STMicroelectronics S.r.l.

Inventor： Caminada, Carlo ,  Prandi, Luciano ,  Rizzo Piazza Roncoroni, Alessandra Maria

IPC: G01C19/56 ,  G05D19/02

CPC classification number: G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes a body (6) and a driving mass (7), which is movable with respect to the body (6) according to a driving axis (X) and is capacitively coupled to the body (6). The gyroscope moreover includes a driving device (3), which forms a microelectromechanical control loop (18) with the body (6) and the driving mass (7) and is configured for supplying to the driving mass (7) driving signals (V D1 , V D2 ) having a common-mode component (V CM ) and respective differential components so as to maintaining the driving mass (7) in oscillation according to the driving axis (X). The driving device (3) is provided with an actuation stage (23) configured for inverting in a controlled way the sign of the differential components of the driving signals (V D1 , V D2 ).

Abstract translation: 一种微机电陀螺仪包括一本体（6）和驱动质量块（7），所有这些可相对于所述主体（6）雅丁于驱动轴线（X）和电容性耦合到所述主体（6）。 陀螺仪更上方包括：驱动装置（3），其与所述主体（6）和所述驱动质量块（7）形成的微机电控制回路（18），并且被配置用于向所述驱动质量块（7）的驱动信号（V D1 ，V D2）具有共模分量（V CM）和相应的差分分量，以便保持驱动质量块（7）（在振荡。据驱动轴线X）。 驱动装置（3）是在配置用于以受控的方式将驱动信号（V D1，V D2）的差分分量的符号翻转致动阶段（23）设置有。

公开(公告)号：EP2246981A1

公开(公告)日：2010-11-03

申请号：EP10161176.2

申请日：2010-04-27

Applicant: STMicroelectronics S.r.l.

Inventor： Cauli, Arber ,  Prandi, Luciano ,  Caminada, Carlo

IPC: H03K5/1252

CPC classification number: H03K19/173 ,  H03K5/1252

Abstract: A method of protection from noise of a digital signal (Vcomp) generated by a comparator (1), comprising the steps of: generating an output signal (Vout) which switches from a first logic state to a second logic state at a first switching of logic state of the digital signal (Vcomp); detecting a change from the first logic state to the second logic state of the output signal (Vout); and inhibiting further switchings of the output signal (Vout) for a first time interval after change from the first logic state to the second logic state.

Abstract translation: 一种防止由比较器（1）产生的数字信号（Vcomp）的噪声的方法，包括以下步骤：产生在第一次切换时从第一逻辑状态切换到第二逻辑状态的输出信号（Vout） 数字信号（Vcomp）的逻辑状态; 检测从所述第一逻辑状态到所述输出信号（Vout）的第二逻辑状态的变化; 以及在从第一逻辑状态改变到第二逻辑状态之后，在第一时间间隔内禁止进一步切换输出信号（Vout）。

公开(公告)号：EP1959562A1

公开(公告)日：2008-08-20

申请号：EP07425081.2

申请日：2007-02-15

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Invernizzi, Paolo

IPC: H03D1/22

CPC classification number: H03D1/22 ,  Y10T74/1218

Abstract: A demodulator includes input terminals (3a, 3b; 103a, 103b), for receiving an input signal (S M ), and an amplifier stage (4) having a gain (G). The input signal (S M ) is amplitude-modulated and is defined by a carrier signal (S CR ) at a carrier frequency (f CR ) and by a modulating signal (S M '). The demodulator includes, moreover, a gain-control stage (5; 105), coupled to the amplifier stage (4) for varying the gain (G) of the amplifier stage (4) according to a sinusoid of a frequency equal to the carrier frequency (f CR ), on the basis of the carrier signal (S CR ).

Abstract translation: 解调器包括用于接收输入信号（S M）的输入端（3a，3b; 103a，103b）和具有增益（G）的放大器级（4）。 输入信号（S M）被调幅，并且由载波频率（f CR）和调制信号（S M'）的载波信号（S CR）定义。 此外，解调器还包括一个增益控制级（5; 105），其耦合到放大器级（4），用于根据等于载波的频率的正弦波来改变放大器级（4）的增益（G） 频率（f CR），基于载波信号（S CR）。

公开(公告)号：EP2259426A1

公开(公告)日：2010-12-08

申请号：EP10165027.3

申请日：2010-06-04

Applicant: STMicroelectronics S.r.l.

Inventor： Visconti, Andrea ,  Prandi, Luciano ,  Caminada, Carlo ,  Angelini, Paolo

IPC: H03H19/00

CPC classification number: H03H11/126 ,  H03H19/004

Abstract: A band-pass filter made up by an operational amplifier (2) and by an input circuit. The input circuit is formed by a capacitive filtering element (C 1 ), connected to the input of the operational amplifier; a coupling switch (11), coupled between an input node (10) and the capacitive filtering element; a capacitive sampling element (C s ), coupled between the input of the filter and the input node; and a sampling switch (16), coupled between the input node and a reference-potential line. The coupling switch and the input sampling switch close in phase opposition according to a succession of undesired components sampling and sensing steps, so that the capacitive sampling element forms a sampler for sampling the undesired component in the undesired components sampling step, in the absence of the component of interest, and forms a subtractor of the undesired components from the input signal in the sensing step.

Abstract translation: 带通滤波器通过在运算放大器（2），并通过在输入电路组成。 输入电路是由连接到所述运算放大器的输入端的电容滤波元件（C 1）形成的; 一个耦合开关（11），耦合在输入节点（10）和所述电容性过滤元件上之间; 耦合在所述过滤器和所述输入节点的输入端之间的电容采样元件（C S）; 和采样开关（16）耦合在输入节点和基准电位线之间。 耦合开关和所述输入采样开关接近反相雅丁到不期望的组分的采样和感测步骤的连续，所以没有电容采样元件形成一个采样器，用于采样的不希望的组分取样步骤中不希望的成分，在不存在的 感兴趣的组分，并且形成从在所述感测步骤的输入信号中的不期望的组分的一个减法器。

公开(公告)号：EP2259019A1

公开(公告)日：2010-12-08

申请号：EP10164823.6

申请日：2010-06-03

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Caminada, Carlo

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5726 ,  G01C19/5762 ,  H03F3/70

Abstract: A MEMS gyroscope includes: a microstructure (2) having a fixed structure (6), a driving mass (7), movable with respect to the fixed structure (6) according to a driving axis (X), and a sensing mass (8), mechanically coupled to the driving mass (7) so as to be drawn in motion according to the driving axis (X) and movable with respect to the driving mass (7) according to a sensing axis (Y), in response to rotations of the microstructure (2); and a driving device (3), for keeping the driving mass (7) in oscillation with a driving frequency (ω D ). The driving device (3) includes a discrete-time sensing interface (20), for detecting a position (x) of the driving mass (7) with respect to the driving axis (X) and a control stage (21, 23, 24, 25) for controlling the driving frequency (ω D ) on the basis of the position (x) of the driving mass (7).

Abstract translation: MEMS陀螺仪包括：具有固定结构（6）的微结构（2），可根据驱动轴线（X）相对于固定结构（6）移动的驱动质量块（7）和感测质量块（8） ），其根据所述驱动轴线（X）机械耦合到所述驱动质量块（7），并且根据感测轴线（Y）响应于旋转而相对于所述驱动质量块（7）可移动 的微观结构（2）; 以及驱动装置（3），用于保持驱动质量（7）以驱动频率（ÉD）振荡。 驱动装置（3）包括离散时间传感接口（20），用于检测驱动质量块（7）相对于驱动轴线（X）的位置（x）和控制级（21,23,24 ，25），用于基于驱动质量块（7）的位置（x）来控制驱动频率（ÉD）。

公开(公告)号：EP1959233A8

公开(公告)日：2009-03-11

申请号：EP07425076.2

申请日：2007-02-13

Applicant: STMicroelectronics S.r.l.

Inventor： Prandi, Luciano ,  Caminada, Carlo ,  Lasalandra, Ernesto

IPC: G01C19/56

CPC classification number: G01C23/005 ,  G01C19/5726 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes a microstructure (102), comprising a first mass (107) and a second mass (108), wherein the first mass (107) is oscillatable according to a first axis (X) and the second mass (108) is constrained to the first mass (107) so as to be drawn along by the first mass (107) according to the first axis (X) and to oscillate according to a second axis (Y), in response to a rotation (Ω) of the microstructure (102). A driving device (103) is coupled to the microstructure (102) to maintain the first mass (107) in oscillation at the driving frequency (ω R ), and a reading device (104) detects displacements of the second mass (108) according to the second axis (Y). The gyroscope is provided with a self-test actuation system (6d, 6e, 6h, 106) coupled to the second mass (108) for applying an electrostatic force (F E ) at the driving frequency (ω R ) so as to move the second mass (108) according to the second axis (Y).