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公开(公告)号：JP2002189091A
公开(公告)日：2002-07-05
申请号：JP2000391044
申请日：2000-12-22
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , TOMITA YOSHIYUKI , KOBARIKAWA YASUSHI
Abstract: PROBLEM TO BE SOLVED: To improve performance, without having to set the manufacturing precision so high, and moreover to control rotation around Z-axis with high accuracy. SOLUTION: One side guide rail 110, having a first guide surface 110A in Y-axis direction, a Y-slider 120 having a second guide surface 120 in X-axis direction and an X-slider 130 are provided. The Y-slider is made by laying the Y-slider body 220, having the second guide surface 120A, on an elastic hinge plate 200 forming a parallel link mechanism and is restricted to be movable in Y-axis direction to the first guide surface 110A with the first link 201 of the elastic hinge plate 200. A second link 202 is made a free end. The first link 201 and the second link 202 of the Y-slider 120 are position-controlled independently with the first and second Y-axis linear motors 141 and 142 and the first and the second Y-axis linear encoders 143 and 144, and rotation θz of the Y-slider 120 about Z-axis is controlled extensively.
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公开(公告)号：JPH0522924A
公开(公告)日：1993-01-29
申请号：JP17232691
申请日：1991-07-12
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI
IPC: H02K11/00 , H02K41/02 , H02K41/03 , H02K41/035
Abstract: PURPOSE:To provide a plane motor apparatus being small-sized and suitable for realizing ultraprecise accuracy in a plane motor, which can drive an object- mounting stage member with high accuracy in a comparatively wide plane. CONSTITUTION:A plane motor apparatus for moving a stage member 3, which is used for mounting an object, in a predetermined plane relatively to a supporting member 1 being a reference has a combination of a plurality of permanent magnets 6, 7, 8 at attached to one of the stage member and supporting member and generating magnetic flux in the direction almost perpendicular to the predetermined plane with a yoke 5 combining these permanent magnets and also has a plurality of sets of coils 9, 10, 11 attached to the other of the stage member and supporting member and arranged in the manner of engaging with the magnetic flux, each of the plurality of sets of coils has a plurality of coils arranged in the direction perpendicularly intersecting to the direction of working of a force, when a current flows through the coils, and combinations in respective sets of coils include the coils, and body of permanent magnets arranged in the manner of facing the plurality of coils.
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公开(公告)号：JP2002095231A
公开(公告)日：2002-03-29
申请号：JP2000276060
申请日：2000-09-12
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , KOBARIKAWA YASUSHI
IPC: H01L21/027 , H02K3/47 , H02K41/02 , H02K41/03
Abstract: PROBLEM TO BE SOLVED: To obtain a two-phase excitation type linear motor which is compact in size and has a large propulsive force. SOLUTION: Two unit coils 12A and 12B are formed respectively into approximately rectangular rings whose two facing sides function as pairs of effective conductors 14Aa, 14Ab, 14Ba and 14Bb and whose other two facing sides function as pairs of connection conductors 16Aa, 16Ab, 16Ba and 16Bb with which the effective conductors are connected to each other. The connection conductors are offset with approximately right angles. The respective unit coils are coupled with each other so as to have the respective offset directions of the unit coils opposite to each other in a direction perpendicular to a traveling direction, and at the same time one 14Ab of the effective conductors 14Aa and 14Ab of the one unit coil 12A is made to exist between the effective conductors 14Ba and 14Bb of the other coil unit 12B to unify the two unit coils.
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公开(公告)号：JP2000347738A
公开(公告)日：2000-12-15
申请号：JP15817799
申请日：1999-06-04
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI
IPC: H01L21/68 , G03F7/20 , G05D3/00 , G05D3/12 , H01L21/027 , H01L21/268 , H01L21/30
Abstract: PROBLEM TO BE SOLVED: To provide a mask stage drive mechanism which has a three-degree of freedom configuration of X, Y and θ axes, a flat structure and also the optical path with a large hole diameter at the center and which also can realize a high accurate trajectory following performance and positioning. SOLUTION: This mechanism is provided with a fixed base plate 1 having the opening corresponding to an opening for an optical path, a θaxis movable part 4 which has an opening corresponding to the opening for the optical path and which is formed in a rotatable way around a Z axis perpendicular to X and Y axes through cross roller bearing 3 provided in the opening part of the plate 1, a Y axis movable part 7 which has an opening corresponding to the opening for the optical path and which is attached to the part 4 in a movable way in Y axial direction, and an X axis movable part 10 which has an opening corresponding to the opening for the optical path and which is attached to the part 7 in a movable way in an X axial direction. A position detector detects the positions of the respective movable parts, and the feedback control systems provided in the respective movable parts perform positional control.
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公开(公告)号：JPH091491A
公开(公告)日：1997-01-07
申请号：JP15293595
申请日：1995-06-20
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , HORIUCHI MASAHIKO , TOMITA YOSHIYUKI
Abstract: PURPOSE: To carry out machining based on position control for a workpiece and copy machining based on force control for multiple shafts at a high speed. CONSTITUTION: A robot hand mechanism provided with a tool 2a for machining a workpiece is provided with an end plate 10 holding the tool 2a on one face side. On the other face side, a base frame 20 possessing a central spindle is arranged opposedly to the end plate 10 apart, from it. Three direct acting mechanisms 30A-30C are mounted in the base frame 20 so as to be arranged rotation-symmetrically with respect to the central spindle O, and each of the direct acting mechanisms 30A-30C is provided with a ball screw shaft 31 extended to the end plate 10 side and a means by which the ball screw shaft 31 is prevented from rotating so as to be extended/shrunk. In each of three articulating mechanisms 40A-40C, one end is fixed to the other face side of the end plate 10, while the other end is connected freely oscillationally to the tip of the ball screw shaft 31 in each of the three direct acting mechanisms 30A-30C.
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Patent Agency Ranking
公开(公告)号：JP2002010616A
公开(公告)日：2002-01-11
申请号：JP2000181448
申请日：2000-06-16
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , KOBARIKAWA YASUSHI
Abstract: PROBLEM TO BE SOLVED: To provide a coil piece which makes a compact coil unit for a linear motor. SOLUTION: In the coil piece 12 of the coil unit for a linear motor which has a pair of effective conductor parts 14 which contribute to thrust generation of a moving body of the linear motor and a pair of connecting conductor parts 16 which connect the effective conductor parts 14, the connecting conductor part 16 in an offset position is extended parallel with a coil plane CP against the coil plane CP which includes A pair of the effective conductor parts 14, and the shape of the cross-sectional plane of the connecting conductor part 16 in this extended condition approximately makes a trapezoid which has parallel sides 16a, 16b which are approximately rectangular to the coil plane CP and an inclined side 16c which faces opposite to the coil plane and has an inclination in the reverse direction of the offset direction.
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公开(公告)号：JP2001275337A
公开(公告)日：2001-10-05
申请号：JP2000086574
申请日：2000-03-27
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , MORI HIDEHIKO , KATO TATSURO , SUGIMINE MASANOBU , SHINOHIRA DAISUKE
Abstract: PROBLEM TO BE SOLVED: To reduce the influence of a heat of a coil unit on a circumference by uniformly cooling the unit coil, in the longitudinal direction. SOLUTION: The coil unit 32 for a linear motor comprises a flat plate-like coil 40 long in an advancing direction of the motor 30, and a shell 44 for containing the coil 40 via a prescribed gap 42 therein and enabling cooling of the coil via a refrigerant. The unit 32 further comprises a main channel 52, formed by extending in the longitudinal direction X of the coil 44 in the shell 44, to enable an introduction of the refrigerant supplied from an exterior into itself, and a plurality of branch channels 54 formed at a prescribed interval in the direction X at the channel 52, to enable a discharge of the refrigerant introduced into the channel 52 in the lateral direction Y of the coil 44. In this case, the refrigerant, discharged from the channel 54 via the channel 52, flows to the gap 42 between the shell 44 and the coil 40, to cool the coil 40 along the direction Y.
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公开(公告)号：JP2000347740A
公开(公告)日：2000-12-15
申请号：JP15832099
申请日：1999-06-04
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , HARADA MAKOTO , TOMITA YOSHIYUKI , KOBARIKAWA YASUSHI
IPC: H01L21/68 , G05D3/00 , G05D3/12 , H01L21/268
Abstract: PROBLEM TO BE SOLVED: To provide an intra-vacuum linear actuator drive mechanism which realizes a large stroke and can realize very fast and highly accurate positioning and high trajectory following accuracy. SOLUTION: This mechanism includes an X axis linear motor 8 and Y axis linear motors 18 and 23 which drive a stage that is arranged in a chamber 100 and that is for mounting a work in the directions of X and Y axes, an X axis linear bearing 7 and Y axis linear bearings 15 and 20 guiding the movement of X and Y axial bases 6 and 14, an X axial linear encoder 10 and Y axial linear encoders 16 and 21 for detecting the positions of the bases 6 and 17, and a position controller which calculates command values to the respective linear motors from the position detection values from the respective linear encoders and the controlled variable target values for respective positions, and a controller for controlling the respective linear motors in a feedback control system.
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公开(公告)号：JP2000214280A
公开(公告)日：2000-08-04
申请号：JP1268399
申请日：1999-01-21
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： UCHIUMI KAZUHARU , KOBARIKAWA YASUSHI
Abstract: PROBLEM TO BE SOLVED: To make absorbable the change in part dimensions in a stage mechanism due to a shape error in machining and thermal expansion. SOLUTION: On a base 1, rails 2 and 3 extending in a predetermined direction are arranged with a specific interval. Moving bodies 4 and 5 are arranged on the rails 2 and 3 and the moving bodies 4 and 5 move along the rails 2 and 3, respectively. The moving bodies 4 and 5 are connected with a beam 6 and the beam extends to a direction perpendicular to a predetermined direction. One end of the beam is fixed to the moving body 4 and the other end of the beam is fixed to the moving body 5 by way of a plate spring 8 extending in the predetermined direction.
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公开(公告)号：JP2000070698A
公开(公告)日：2000-03-07
申请号：JP24359798
申请日：1998-08-28
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , TOMITA YOSHIYUKI , KOBARIKAWA YASUSHI
IPC: B01J3/02 , B01J19/12 , H01L21/268 , H01L21/68 , H01L21/683
Abstract: PROBLEM TO BE SOLVED: To provide a treatment apparatus equipped with a treatment container hardly receiving the effect of heat strain by the heating of an object to be treated and capable of suppressing the generation of fine waste refuse in the treatment container. SOLUTION: Three driving support shafts 2a-2c of which one ends pierce the wall of a treatment container to be led out to the outside are arranged and a stage base is combined with one end sides of the driving support shafts through a coupling block 4. The linear motor 8 for slidably driving the stage base on a stone surface plate is combined with the stage base and, through the stage base, the driving support shafts are axially moved to the treatment container in parallel. In the treatment container, the work table 3 for holding a substrate 10 is supported on the other end side of the driving support shafts in a cantilevered state. At a place where the driving support shafts pierce the wall of the treatment container, a vacuum bellows is equipped so as to airtightly hold the treatment container.
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