-
公开(公告)号：JP2001346365A
公开(公告)日：2001-12-14
申请号：JP2000164017
申请日：2000-06-01
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI
Abstract: PROBLEM TO BE SOLVED: To manufacture a single element coil of a linear motor coil unit by winding one conductor regardless of the shape of the single element coil. SOLUTION: A winding frame 40 with engagement parts P1-P4 of a conductor W is provided on a rectangular top position of a single element coil 12. The winding frame 40 is turned alternately around an X-axis, around a Y-axis, etc., by 1st and 2nd turning mechanisms. With this arrangement, one conductor W paid off in a Z-axis direction from a conductor pay-off device 20 can be wound while it is engaged sequentially with the engagement parts P1-P4 of the winding frame 40.
-
公开(公告)号：JP2001275335A
公开(公告)日：2001-10-05
申请号：JP2000090982
申请日：2000-03-29
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , MORI HIDEHIKO , KATO TATSURO , SUGIMINE MASANOBU , SHINOHIRA DAISUKE
IPC: H01L21/027 , H02K9/19 , H02K9/193 , H02K41/02 , H02K41/03 , H02K41/035
Abstract: PROBLEM TO BE SOLVED: To enable smoothly linear motion by enabling internal maintenance, and surely preventing leakage of a refrigerant and preventing transformation of a nonmagnetic member to a magnetic material. SOLUTION: A sealing structure prevents leakage of the refrigerant in a coil cooling jacket 44 for cooling a coil 40, by allowing the refrigerant to flow to its circumference. In this case, the jacket 44 has a shell part 51, having an opening 75 at the end of the longitudinal direction X and a cover 57 installed in the opening 75. The cover 57 has an elastic member 71 engaged with and disposed in the opening 75, a first plate 70 disposed on an inside surface 71B of the member 71, and a second plate 72 disposed on an outside surface 71C of the member 71. A regulating mechanism 78 can elastically deform the member 71 to a planar outside, by narrowing a sandwiching gap Q and making close contact of an outer periphery 71D of the member 71 with an inner periphery 76 of the opening 75 to seal the refrigerant.
-
公开(公告)号：JP2001275334A
公开(公告)日：2001-10-05
申请号：JP2000090981
申请日：2000-03-29
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , KOBARIKAWA YASUSHI
Abstract: PROBLEM TO BE SOLVED: To enable positioning of a coil in higher accuracy than that of a conventional coil by reducing the influence of heating of the coil to a machine on the opposite side and a circumferential atmosphere. SOLUTION: A coil unit 32 comprises a shell 4, containing the coil 40 therein and cooling the coil 40 by passing a refrigerant. The unit 32 also comprises an outside cover 64 installed therein, to contain a shell 44 therein and to enable cooling of the shell 44 by passing the refrigerant to a gap 42B. In this case, an outside first main channel 70 is formed near one lateral edge 44A of the shell in the cover 64, to enable introduction of the refrigerant and a discharge of the refrigerant to an outer surface 44C of the shell 44. Furthermore, an outside second main channel 76 is formed near the other lateral edge 44B of the shell 44 in the cover 64, to receive the refrigerant flowing along this outer surface 44C and to enable supplying of the refrigerant into the shell 44. An discharge tube for enabling an external discharge of the refrigerant flowing along the surface of the coil 40 to the outside.
-
公开(公告)号：JPH09236761A
公开(公告)日：1997-09-09
申请号：JP34217796
申请日：1996-12-20
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： SUGIMINE MASANOBU , KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI , MAKINO KENICHI , KIMURA SADAHIKO , SEKINE HIDETAKA
IPC: G02B26/08 , B23K26/066 , B23K26/06
Abstract: PROBLEM TO BE SOLVED: To enable the rapid opening and closing of a shutter. SOLUTION: A supporting substrate 10 is fixed relatively to a certain optical path. Linear guide mechanisms 16A, 16B are fitted to the supporting substrate 10. These linear guide mechanisms 16A, 16b have a guiding direction which intersects with the certain optical path. A light shielding member is fitted to the supporting substrate 10 via the linear guide mechanisms 16A, 16B. The light shielding part selectively shuts off the light propagating along the certain optical path by moving parallel with a direction which is parallel with the guiding direction. Then, the light shielding part is moved parallel along the guiding direction by a linear motor.
-
公开(公告)号：JPH08257973A
公开(公告)日：1996-10-08
申请号：JP8883695
申请日：1995-03-22
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： SATO YASUMASA , KOBARIKAWA YASUSHI
Abstract: PURPOSE: To provide a robot having high rigidity and accuracy and capable of having a wide operating range by providing a pair of arms that can be raised and lowered and be rotated around bases as a fulcrum, while providing flexible knuckles in the middles of the arms, and enabling a holding device to move in a straight line by the bending motion of the pair of arms. CONSTITUTION: Upper and lower end plates 2 are rotatably journalled to the upper and lower parts of a C-shaped frame 1 and are connected together by two rotatable front spline shafts 8, 9 and a fixed ball spring shaft. When one spline shaft 8 is rotated by the drive of an arm-turning motor, the other spline shaft 9 is rotated in the direction opposite to the rotation of the spline shaft 8 via an interlocking gear 22, a pair of intermediate interlocking gears 24, 25, and an interlocking gear 23. A pair of arms 14, 15 splined to the spline shafts 8, 9 are therefore rotated in opposite directions and, as the arms 14, 15 are bent at knuckles 45 in their middles, they cause mounting flanges 41 at the arm ends to move back and forth in a straight line.
-
Patent Agency Ranking
公开(公告)号：JP2003121573A
公开(公告)日：2003-04-23
申请号：JP2001311200
申请日：2001-10-09
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , SHINOHIRA DAISUKE , SUGIMINE MASANOBU , KOBARIKAWA YASUSHI , OTSUKA SEIJI , USUI MICHITARO
Abstract: PROBLEM TO BE SOLVED: To provide a stage unit capable of reducing a necessary space, especially a cross-sectional space. SOLUTION: A linear motor is a fixed part 10, including both a yoke 12 of an approximately U-shaped cross section extending in the direction of travel and permanent magnets 13 fixed at an interval to each other to both inner walls of the yoke and supported at both end parts. Both a coil 22 inserted in the yoke, so as to be present at intervals to the permanent magnets at both inner walls and a slider 21 connected to the coil are constituted as a movable part 20. A guide bar 11 of an approximately U-shaped cross section is integrated with the yoke, in such a way as to cover the external surface of the side of a closed end of the yoke. The slider has a tubular cross-sectional shape so as to surround the periphery of the fixed part, and the inner walls of the slider are provided with a plurality of air bearings 23 at locations opposite to the external surface of the guide bar.
-
公开(公告)号：JP2002189090A
公开(公告)日：2002-07-05
申请号：JP2000391043
申请日：2000-12-22
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI
Abstract: PROBLEM TO BE SOLVED: To improve performance (of response, positioning accuracy), without having to set manufacturing precision to be so high, and to attain cost reduction by simplifying the structure. SOLUTION: One guide rail 110, having a first guide surface 110A in parallel with Y-axis direction and a Y-slider 120, which has a second guide surface 120A parallel to the X-axis direction and is restricted to be movable in the Y-axis direction to the first guide surface 110A with a magnet preloaded type guide air bearing 125 at one end are provided. The other end of the Y-slider 120 is made a free end, and an X-slider 130 is assembled on the Y-slider 120, freely movably in the X-axis direction with a magnet preloaded type guide air bearing 133. The one end and the other end of the Y-slider 120 are position- controlled independently by the first and second Y-axis linear motors 141 and 142 and the first and the second Y-axis linear encoders 143 and 144, and rotation θz of the Y-slider 120 about Z-axis is controlled.
-
公开(公告)号：JP2000155186A
公开(公告)日：2000-06-06
申请号：JP33221398
申请日：1998-11-24
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , UCHIUMI KAZUHARU
IPC: G12B5/00
Abstract: PROBLEM TO BE SOLVED: To provide an X-Y stage device that can absorb the dimension accuracy error due to thermal expansion of component parts, and, furthermore, a shape error due to machining of the component parts. SOLUTION: Between a pair of guide rails 21 and 22, a Y slider 23 being arranged while the slider 23 can be moved along the guide surface of a base 20, and an X slider 24 being combined with the Y slider so that the X slider 24 can be moved in the extension direction are included. Between the Y slider 23 and guide surfaces 21a and 22a of a pair of the guide rails 21 and 22, and the Y slider 23 and the guide surface of the base 20, static air bearing pads 25-1-25-4, and 27-1-27-3 are included, respectively. Between the X slider 24 and the guide surfaces of the base 20, and the X slider 24 and the Y slider 23, static air bearing pads 25-5-25-8, and 27-4-27-6 are included, respectively.
-
公开(公告)号：JPH1158285A
公开(公告)日：1999-03-02
申请号：JP21942397
申请日：1997-08-14
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： HORIUCHI MASAHIKO , TOMITA YOSHIYUKI , KOBARIKAWA YASUSHI
Abstract: PROBLEM TO BE SOLVED: To carry out multishaft force control without adding a special device such as a force sensor, etc. SOLUTION: Motor generating torque input voltage from a motor driver is transformed (S1) to a digital signal by an A/D board, and a driving shaft external force estimated value is found by using a disturbance observer. A tool head end external force estimated value is found (S3) by applying coordinate transformation (S2) by using a Yacobian matrix against this driving shaft external force estimated value. Force deflection of the tool head end external force estimated value and a tool head end force command value is found (4), this force deflection is transformed to a speed command value, the speed command value is transformed to an analog signal by the D/A board, and it is supplied to the motor driver. The motor driver drives an AC servo motor in accordance with a speed command.
-
公开(公告)号：JPH0851756A
公开(公告)日：1996-02-20
申请号：JP18809694
申请日：1994-08-10
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , SUGIMINE MASANOBU , TOMITA YOSHIYUKI
Abstract: PURPOSE:To obtain a planar motor in which a force can be generated in the arranging direction of magnet arrays by arranging a plurality of magnet arrays and opposing coil groups to intersect each other when a stage member is present in a movable region. CONSTITUTION:The base 1 of an xy stage equipped with a planar motor has a flat guide face 2 on which an x-drive coil group 9 and y-drive coil groups 10, 11 are arranged and secured in place. A main stage 3 being supported by an air pad 4 is also arranged on the guide face 2 and a yoke 5 made of a material having high permeability, e.g. iron, is secured to the rear surface thereof. Furthermore, an x-magnet array 6 and y-magnet arrays 7, 8 are arranged on the rear surface of the yoke 5 and secured in place. The main stage 3 is floated by means of the air pad 4 and driven through combination of the coil and magnet thus generating a force directly on the main stage under a substantially friction-free state. Consequently, a force can be generated in the longitudinal direction of permanent magnet arrays by feeding the coil group with a controlled current.
-
-
-
-
-
-
-
-
-
Search Results
22
records
(took 0.024 seconds)
