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公开(公告)号：JP2001349323A
公开(公告)日：2001-12-21
申请号：JP2000165523
申请日：2000-06-02
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KANEKO MAKOTO , MORITA HIROSHI , NAKAMORI YASUHITO , SUGIMINE MASANOBU , TOMITA YOSHIYUKI
Abstract: PROBLEM TO BE SOLVED: To reduce the maximum stress of an elastic hinge as a support element for a stage in a precise driving stage apparatus. SOLUTION: In this elastic hinge, notches 24 are formed in the outer peripheral surface of a bridge member 23 in two portions separated from each other in the longitudinal direction of the bridge member 23 connecting between two members, thereby forming an elastically bending and easily deformable thin part 25, and relative displacement between two members is allowed by bending deformation of the thin part 25. In the elastic hinge, the minimum sectional area part in the center in the longitudinal direction of the thin part 25 formed by the notch 24 having the substantially hemispherical section is provided with a parallel part 27 having constant sectional area extending over a designated distance in the longitudinal direction of the thin part 25.
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公开(公告)号：JP2001275337A
公开(公告)日：2001-10-05
申请号：JP2000086574
申请日：2000-03-27
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , MORI HIDEHIKO , KATO TATSURO , SUGIMINE MASANOBU , SHINOHIRA DAISUKE
Abstract: PROBLEM TO BE SOLVED: To reduce the influence of a heat of a coil unit on a circumference by uniformly cooling the unit coil, in the longitudinal direction. SOLUTION: The coil unit 32 for a linear motor comprises a flat plate-like coil 40 long in an advancing direction of the motor 30, and a shell 44 for containing the coil 40 via a prescribed gap 42 therein and enabling cooling of the coil via a refrigerant. The unit 32 further comprises a main channel 52, formed by extending in the longitudinal direction X of the coil 44 in the shell 44, to enable an introduction of the refrigerant supplied from an exterior into itself, and a plurality of branch channels 54 formed at a prescribed interval in the direction X at the channel 52, to enable a discharge of the refrigerant introduced into the channel 52 in the lateral direction Y of the coil 44. In this case, the refrigerant, discharged from the channel 54 via the channel 52, flows to the gap 42 between the shell 44 and the coil 40, to cool the coil 40 along the direction Y.
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公开(公告)号：JP2000334637A
公开(公告)日：2000-12-05
申请号：JP14435899
申请日：1999-05-25
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： SUGIMINE MASANOBU , MORI HIDEHIKO , TOMITA YOSHIYUKI
Abstract: PROBLEM TO BE SOLVED: To perform a position control for a working head with high accuracy by providing a measuring frame to be a reference for a position measurement around the working head, detecting a relative position change for the working head for the measuring frame by a position sensor and performing the position control by a feedback. SOLUTION: A laser working device 10 is constituted of an X-Y stage 14 making a stone surface plate 10 as a base plate, a Z-axis column 12, a Z-axis saddle 15 on which a laser oscillator is mounted, an optical system driving device 16 mounted on the Z-axis saddle 15, a gas nozzle 17 and a measuring frame 20. Moving amount of an X-axis direction and a Y-axis direction of the X-Y stage 14 is detected by a position sensor and is feedbacked to a control device of the X-Y stage 14. This main laser working device 10 measures motion of the gas nozzle 17 by a work reference and constitutes the reference by using the measuring frame 20. As a result position control can be performed for a working head in the working device 10 with high accuracy, and working accuracy and throughput can be improved.
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公开(公告)号：JPH1133857A
公开(公告)日：1999-02-09
申请号：JP18689997
申请日：1997-07-11
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KATO TATSURO , SUGIMINE MASANOBU
Abstract: PROBLEM TO BE SOLVED: To accurately perform a precise location. SOLUTION: The arrangement according to the present invention with an X-Y stage includes a surface plate 31; a horizontally moving guide 32 extending in the X-axis direction on the surface plate 31 and arranged slidably along the first guide part 35; a vertically moving guide 33 extending in the Y-axis direction on the surface plate 31 and arranged slidably along the second guide part 41; a stage 34 formed at the intersection of the two guides 32 and 33; an X-axis linear motor 54 which consists of a coil and a magnet 53 and is installed between the horizontally moving guide 32 and stage 34; and a Y-axis linear motor 56 which consists of coil and magnet 53 and is installed between the vertically moving guide 33 and stage 34.
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公开(公告)号：JPH0974734A
公开(公告)日：1997-03-18
申请号：JP23170895
申请日：1995-09-08
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： SUGIMINE MASANOBU , KOBARIKAWA YASUSHI , TOMITA YOSHIYUKI , MAKINO KENICHI
Abstract: PROBLEM TO BE SOLVED: To make it possible to achieve high-speed movement and accurate positioning by providing a linear motor, which develops the symmetrical driving forces at both sides of a virtual plane in parallel with a movable plane and applies the forces on a stage member. SOLUTION: In an XY stage apparatus, a linear motor 30 is arranged in a square shape so that a movable stage 20 surrounds a moving movable region. Furthermore, a coil 32A is constituted so as to include the upper current path in the direction of an X axis arranged at the gap between the magnet line comprising permanent magnets 33Aa-33Ae and a center yoke and the lower current path in the direction of the X axis arranged at the gap between the magnet line comprising permanent magnets 33Af-33Aj and the center yoke. Then, on the upper surface of a base 10, a position sensor 13 is arranged at the movable region of the movable stage 20. The position of a position detecting point fixed at the lower surface of the movable stage 20 is detected, and the position signal is outputted. A control means 40 receives the signal and controls linear motor 30, based on the position signal. As a result, the movable stage can be driven at a high speed, and the accurate positioning can be performed.
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Patent Agency Ranking
公开(公告)号：JPH079178A
公开(公告)日：1995-01-13
申请号：JP15956693
申请日：1993-06-29
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： TOMITA YOSHIYUKI , SEKINE HIDETAKA , SUGIMINE MASANOBU
IPC: B23K26/064 , B23K26/082 , B23K26/38 , G02B26/10 , B23K26/06
Abstract: PURPOSE:To enable a high-speed and highly accurate control by imparting, to a stage member holding a lens, an electromagnetic drive with a permanent magnet and a coil and detecting the displacement of the stage member without contacting. CONSTITUTION:A condensing lens 7 is held by a structural body 4. The structural body 4 is held freely movably in the two dimensional direction on a base 2 through a structure 3 and couplings 5, 6. A controlled current is flown to a coil 9 that is fixed on the structural body 4. A permanent magnet 10 is arranged oppositely to the coil 9 and connected to a yoke 8 fixed on the base 2. By the interaction between the coil 9 and the permanent magnet 10, a driving force in the two dimensional direction is actuated on the coil 9, and the condensing lens 17 is driven. The position of the structural body 4 is monitored by displacement sensors 11a, 11b. By directly driving the condensing lens 17 by an electromagnetic driving means, a moving accuracy of high precision is obtained.
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公开(公告)号：JP2003121573A
公开(公告)日：2003-04-23
申请号：JP2001311200
申请日：2001-10-09
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORI HIDEHIKO , SHINOHIRA DAISUKE , SUGIMINE MASANOBU , KOBARIKAWA YASUSHI , OTSUKA SEIJI , USUI MICHITARO
Abstract: PROBLEM TO BE SOLVED: To provide a stage unit capable of reducing a necessary space, especially a cross-sectional space. SOLUTION: A linear motor is a fixed part 10, including both a yoke 12 of an approximately U-shaped cross section extending in the direction of travel and permanent magnets 13 fixed at an interval to each other to both inner walls of the yoke and supported at both end parts. Both a coil 22 inserted in the yoke, so as to be present at intervals to the permanent magnets at both inner walls and a slider 21 connected to the coil are constituted as a movable part 20. A guide bar 11 of an approximately U-shaped cross section is integrated with the yoke, in such a way as to cover the external surface of the side of a closed end of the yoke. The slider has a tubular cross-sectional shape so as to surround the periphery of the fixed part, and the inner walls of the slider are provided with a plurality of air bearings 23 at locations opposite to the external surface of the guide bar.
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公开(公告)号：JP2002018665A
公开(公告)日：2002-01-22
申请号：JP2000207048
申请日：2000-07-07
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORITA HIROSHI , KANEKO MAKOTO , NAKAMORI YASUHITO , SUGIMINE MASANOBU
Abstract: PROBLEM TO BE SOLVED: To move a moving table on a circuit locus at high speed and high accuracy. SOLUTION: In a displacement control method of the moving table 2 in the X-Y stage device 15 that has the moving table 2 guided on the X-Y plane and can shift a member loaded on the moving table 2 on the X-Y plane, the moving table 2 is guided on the X-Y plane by an X-Y guide mechanism 50 accompanied by an elastic deformation act, an X-directional natural frequency is made to coincide with a Y-directional natural frequency when the moving table 2 moves in the X-direction and the Y-direction, and the moving table 2 is moved on the circuit locus so that motion frequency f satisfies 0.66 T
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公开(公告)号：JP2001341046A
公开(公告)日：2001-12-11
申请号：JP2000165524
申请日：2000-06-02
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： MORITA HIROSHI , KANEKO MAKOTO , NAKAMORI YASUHITO , SUGIMINE MASANOBU
Abstract: PROBLEM TO BE SOLVED: To drastically enhance speed and accuracy for positioning a traveling table in the directions of the X-axis and the Y-axis. SOLUTION: A X-Y stage device 15 which supports the traveling table 2 against a fixed base 1 such that the traveling table 2 is capable of minute displacement within a plane of the X-axis-the Y-axis, and which allows a member placed on the traveling table 2 to be positioned within the plane of the X-axis-the Y-axis, comprises an elastic hinge having a characteristic of being flexible only in one or two directions among each of the X-axis, the Y-axis, and the Z-axis and rigid in the other directions, wherein the traveling table 2 is supported such that it is capable of minute displacement against the fixed base 1 by utilizing elastic deformation of the elastic hinge in the direction which is flexible, and further the traveling table 2 is allowed for minute displacement within the plane of the X-axis-the Y-axis by a linear motor 7 for driving in a direction of the X-axis and a linear motor 3 for driving in a direction of the Y-axis.
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公开(公告)号：JPH0851756A
公开(公告)日：1996-02-20
申请号：JP18809694
申请日：1994-08-10
Applicant: SUMITOMO HEAVY INDUSTRIES
Inventor： KOBARIKAWA YASUSHI , SUGIMINE MASANOBU , TOMITA YOSHIYUKI
Abstract: PURPOSE:To obtain a planar motor in which a force can be generated in the arranging direction of magnet arrays by arranging a plurality of magnet arrays and opposing coil groups to intersect each other when a stage member is present in a movable region. CONSTITUTION:The base 1 of an xy stage equipped with a planar motor has a flat guide face 2 on which an x-drive coil group 9 and y-drive coil groups 10, 11 are arranged and secured in place. A main stage 3 being supported by an air pad 4 is also arranged on the guide face 2 and a yoke 5 made of a material having high permeability, e.g. iron, is secured to the rear surface thereof. Furthermore, an x-magnet array 6 and y-magnet arrays 7, 8 are arranged on the rear surface of the yoke 5 and secured in place. The main stage 3 is floated by means of the air pad 4 and driven through combination of the coil and magnet thus generating a force directly on the main stage under a substantially friction-free state. Consequently, a force can be generated in the longitudinal direction of permanent magnet arrays by feeding the coil group with a controlled current.
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