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    Circuits and methods to calibrate mirror displacement
    12.
    发明授权
    Circuits and methods to calibrate mirror displacement 有权

    公开(公告)号：US12253356B2

    公开(公告)日：2025-03-18

    申请号：US17240483

    申请日：2021-04-26

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Robert Floyd Payne ,  James Norman Hall

    IPC: G01B7/14 ,  G01B7/06 ,  G01R17/00 ,  G01R27/26 ,  G01R35/00 ,  G02B26/08

    Abstract: A calibration circuit providing a programmable voltage generator that is selectively connectable to a first capacitor plate of a capacitive structure to supply a voltage thereto. A reference voltage generator is coupled to the output of the programmable voltage generator and generates a reference voltage. A comparator receives the reference voltage and a discharging voltage from the capacitive structure during a discharge period and, based on those inputs, generates a signal that is output to a digital controller. A constant current source is selectively connectable to the capacitive structure to generate a constant current. Based on the output of the comparator, the constant current, and a count representing a time during which the discharging voltage decreases, the digital controller measures capacitance to calibrate a movable mirror of the capacitive structure. During calibration, the digital controller controls the programmable voltage generator and a second capacitor plate of the capacitive structure.

    SURFACE MICROMACHINED STRUCTURES
    14.
    发明申请
    SURFACE MICROMACHINED STRUCTURES 有权

    公开(公告)号：US20220411262A1

    公开(公告)日：2022-12-29

    申请号：US17899537

    申请日：2022-08-30

    Applicant: Texas Instruments Incorporated

    Inventor： Patrick Ian Oden ,  James Norman Hall

    IPC: B81C1/00 ,  G03B21/00 ,  B81B3/00

    Abstract: In one example, a method comprises forming a first layer on a substrate surface, forming an opening in the first layer, forming a second layer on the first layer and in the opening, and forming a photoresist layer on the second layer, in which the photoresist layer has a first curved surface over a first part of the first layer and over the opening. The method further comprises etching the photoresist layer and a second part of the second layer over the first part of the first layer to form a second curved surface on the second part of the second layer, and forming a mirror element and a support structure in the second layer, including by etching a third part of the second layer and removing the first layer.

    Fringing-field, parallel plate actuator
    17.
    发明授权
    Fringing-field, parallel plate actuator 有权

    公开(公告)号：US12140751B2

    公开(公告)日：2024-11-12

    申请号：US17114369

    申请日：2020-12-07

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Adam Joseph Fruehling ,  James Norman Hall

    IPC: G02B26/08 ,  G02B26/06 ,  H02N1/00

    Abstract: A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.

    BIAS VOLTAGE ADJUSTMENT FOR A PHASE LIGHT MODULATOR
    18.
    发明申请
    BIAS VOLTAGE ADJUSTMENT FOR A PHASE LIGHT MODULATOR 有权

    公开(公告)号：US20210181499A1

    公开(公告)日：2021-06-17

    申请号：US17120687

    申请日：2020-12-14

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Patrick Ian Oden ,  James Norman Hall ,  William C. McDonald

    IPC: G02B26/08 ,  H02N1/00 ,  G02B26/06

    Abstract: An integrated circuit includes an electrode voltage controller, a micro-electromechanical system (MEMS) structure, and a bias voltage generator. The MEMS structure has a first electrode, a conductive plate, and a reflective layer on the conductive plate. The first electrode is coupled to the electrode voltage controller, and the conductive plate is configured to move vertically with respect to the first electrode responsive to a voltage generated by the electrode voltage controller and applied to the first electrode. The bias voltage generator is coupled to the conductive plate. The bias voltage generator has an input configured to receive a bias control signal. The bias voltage generator is configured to apply a non-zero bias voltage to the conductive plate responsive to the bias control signal.

    MEMS-BASED PHASE SPATIAL LIGHT MODULATING ARCHITECTURE
    19.
    发明申请
    MEMS-BASED PHASE SPATIAL LIGHT MODULATING ARCHITECTURE 有权

    公开(公告)号：US20210111537A1

    公开(公告)日：2021-04-15

    申请号：US16653026

    申请日：2019-10-15

    Applicant: Texas Instruments Incorporated

    Inventor： James Norman Hall ,  Terry Alan Bartlett ,  William Craig McDonald

    IPC: H01S5/062 ,  G02B5/08 ,  H01S5/00

    Abstract: Described examples include apparatus having a driving electrode on a substrate. The apparatus has a platform suspended above the driving electrode and conductively coupled to a platform electrode, where the platform is configured to move in a direction perpendicular to a surface of the substrate in response to a voltage difference applied between the driving electrode and the platform electrode. The apparatus also has a mirror post on the platform. The apparatus has a mirror coupled to the platform by the mirror post, where the mirror is rectangular.

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