Abstract:
The invention concerns passive radio-frequency microelectronic components for integrated circuits, comprising a dielectric substrate (S) and at least one metal conductive layer disposed on said substrate, said conductive layer comprising at least a first metal conductive part (C1) and a second metal conductive part (C2) separated by insulation (I). A microelectronic component according to the invention comprises at least one graphene layer (G) disposed so that a radio-frequency or hyper-frequency signal passes through said at least one graphene layer (G) when it is transmitted between said first metal conductive part and said second metal conductive part, said graphene layer (G) being capable, when it is subjected to an electrical potential, of transmitting said radio-frequency or hyper-frequency signal in a first direction, and of attenuating said radio-frequency or hyper-frequency signal in a second direction opposite said first direction. The invention applies in particular to transmission-line, capacitor and microswitch microelectronic components.
Abstract:
The subject of the invention is an RF component, comprising at least one coplanar RF stripline (Ls), with a metal area (M1, M2) on the surface of a substrate (S), and a nanoswitching structure located between said coplanar stripline and the metal area, the RF stripline and the metal area lying parallel to each other along a first direction, and the RF stripline and the metal area comprising lateral elements (Lsb1, Lsb2, Mb11, Mb12, Mb21, Mb22) lying perpendicular to said first direction, characterized in that: one lateral element (Lsb1, Lsb2) of the RF stripline interacts with at least one lateral metal-area element (Mb11, Mb12, Mb21, Mb22), which comprises a series of nanotubes or nanowires (Nb11i, Nb12i), via a switching action that brings the series of nanotubes or nanowires into direct contact with the lateral element of said RF stripline; and, said nanoswitching structure furthermore comprises at least one switching electrode on the surface of said substrate, making it possible for said series of nanotubes or nanowires to be brought into contact with said lateral element of said RF stripline.
Abstract:
The invention relates to the general field of methods for producing electronic modules including electronic power components (3) made on a gallium nitride (GaN) substrate (1), as well as electrostatically activated MEMS (Micro Electro-Mechanical System) microswitches (10). The electronic components and the microswitches according to the invention are produced on a single gallium nitride substrate and the production method comprises at least the following steps: Step 1: Making power components (3) on the gallium nitride substrate; Step 2: Depositing a first common passivation layer (4) on said components and on the substrate; and Step 3: Making microswitches (10) on said substrate.