公开(公告)号：WO2007133225A2

公开(公告)日：2007-11-22

申请号：PCT/US2006022778

申请日：2006-06-12

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  MAINES MICHAEL E ,  HART PAUL K

IPC: H04J1/16 ,  H04J3/22 ,  H04L1/18 ,  H04L12/54 ,  H04L12/56

CPC classification number: H05H15/00 ,  G21K1/087 ,  G21K5/04 ,  H01J25/00

Abstract: A charged particle beam including charged particles (e.g., electrons) is generated from a charged particle source (e.g., a cathode or scanning electron beam). As the beam is projected, it passes between plural alternating electric fields. In one embodiment, the electric fields alternate not only on the same side but across from each other as well. The attraction of the charged particles to their oppositely charged fields accelerates the charged particles, thereby increasing their velocities in the corresponding (positive or negative) direction. The velocity oscillation direction can be either perpendicular to the direction of motion of the beam or parallel to the direction of motion of the beam.

Abstract translation: 从带电粒子源（例如阴极或扫描电子束）产生包括带电粒子（例如电子）的带电粒子束。 当光束投射时，它通过多个交变电场。 在一个实施例中，电场也不仅在相同的一侧而且彼此相互交替地交替。 带电粒子对其带电荷的场的吸引力加速了带电粒子，从而在相应的（正或负）方向上增加了它们的速度。 速度振荡方向可以垂直于光束的运动方向或平行于光束的运动方向。

公开(公告)号：WO2007130084A2

公开(公告)日：2007-11-15

申请号：PCT/US2006022766

申请日：2006-06-12

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK

IPC: H01J3/14

CPC classification number: H03D9/02 ,  H01J25/00

Abstract: An electronic receiver for decoding data encoded into electromagnetic radiation (e.g., light) is described. The light is received at an ultra-small resonant structure. The resonant structure generates an electric field in response to the incident light and light received from a local oscillator. An electron beam passing near the resonant structure is altered on at least one characteristic as a result of the electric field. Data is encoded into the light by a characteristic that is seen in the electric field during resonance and therefore in the electron beam as it passes the electric field. Alterations in the electron beam are thus correlated to data values encoded into the light.

Abstract translation: 描述了用于对编码成电磁辐射（例如，光）的数据进行解码的电子接收机。 光以超小的谐振结构被接收。 谐振结构响应于从本地振荡器接收的入射光和光产生电场。 通过谐振结构附近的电子束由于电场而在至少一个特性上改变。 数据通过在谐振期间在电场中看到的特性并因此在电子束通过电场时在电子束中被编码成光。 因此，电子束中的变化与编码为光的数据值相关。

公开(公告)号：WO2007094813A2

公开(公告)日：2007-08-23

申请号：PCT/US2006022768

申请日：2006-06-12

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK

CPC classification number: H05K3/188 ,  C03C17/32 ,  C03C17/328 ,  C25D5/022 ,  C25D5/08 ,  C25D5/18 ,  C25D5/54 ,  C25D5/56 ,  H01L21/2885 ,  H01L21/76879 ,  H05K3/108 ,  H05K2201/0329 ,  H05K2203/1492

Abstract: A process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished using a non-conductive or semi-conductive substrate on which a layer of a conductive material, such as a conductive polymer, is applied, and on which a second layer of a masking material, such as a pattern resist material, is applied. Following patterning of the second resist layer, and either the full or partial etching of the conductive polymer, or alternatively omitting the step of etching the conductive layer, electroplating techniques will be used to produce ultra-small structures on the substrate or alternatively directly on the conductive layer, after which either all of remaining portions of the conductive polymer layer and the resist layer will be removed, or only the resist layer will be removed, or alternatively neither will be removed.

Abstract translation: 一种制造尺寸为纳米至数百微米之间的超小结构的方法，其中结构紧凑，无孔并具有平滑的垂直表面。 这样的处理是使用非导电或半导电衬底来实现的，其中施加导电材料层，例如导电聚合物，并且其上施加第二层掩模材料，例如图案抗蚀剂材料， 被申请;被应用。 在对第二抗蚀剂层进行图案化之后，以及对导电聚合物进行全蚀刻或部分蚀刻，或者省略蚀刻导电层的步骤，将使用电镀技术在衬底上产生超小结构，或者直接在 导电层之后，导电聚合物层和抗蚀剂层的所有剩余部分将被去除，或者仅将抗蚀剂层除去，或者也不会被去除。

公开(公告)号：WO2007081391A2

公开(公告)日：2007-07-19

申请号：PCT/US2006022690

申请日：2006-06-09

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  MAINES MICHAEL E

IPC: G21G4/00

CPC classification number: H01J21/00 ,  H01J25/00 ,  H01S3/0903

Abstract: We describe an ultra-small resonant structure that produces electromagnetic radiation (e.g., visible light) at selected frequencies. The resonant structure can be produced from any conducting material (e.g., metal such as silver or gold). In one example, a number of rows of posts are etched or plated on a substrate, with each row having a particular geometry associated with the posts and cavities between the posts. A charged particle beam is selectively directed close by one of the rows of posts, causing them to resonate and produce radiation (e.g., in the visible spectrum at a predominant frequency). Directing the charged particle beam at a different row yields radiation at a different predominant frequency.

Abstract translation: 我们描述了在选定频率下产生电磁辐射（例如可见光）的超小型谐振结构。 共振结构可以由任何导电材料（例如，诸如银或金的金属）制成。 在一个示例中，在衬底上蚀刻或镀覆多排柱，每排具有与柱之间的柱和空腔相关联的特定几何形状。 带电粒子束被选择性地指向柱中的一排附近，使得它们共振并产生辐射（例如，在主要频率的可见光谱中）。 引导不同行的带电粒子束产生不同主要频率的辐射。

公开(公告)号：WO2007040676A2

公开(公告)日：2007-04-12

申请号：PCT/US2006023280

申请日：2006-06-15

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  MAINES MICHAEL E ,  HART PAUL

IPC: G01K1/08

CPC classification number: H01S3/09 ,  B82Y20/00 ,  H01L21/32136 ,  H01L21/32139 ,  H01S3/0903 ,  Y10S977/949 ,  Y10S977/95 ,  Y10S977/954

Abstract: We describe an ultra-small structure that produces visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries can be etched or plated from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

Abstract translation: 我们描述了从单个金属层产生不同频率的可见光的超小结构。 在一个示例中，根据特定几何形状，一排金属柱被蚀刻或镀在基板上。 当带电粒子束通过柱的一列通过时，它们之间的柱和腔合作以共振并产生可见光谱（甚至更高）中的辐射。 可以从单个金属层蚀刻或镀覆多个不同几何形状的行，使得带电粒子束将使用不同的行来产生不同的可见光频率（即，不同的颜色）。

公开(公告)号：WO2007130097A3

公开(公告)日：2009-04-16

申请号：PCT/US2006023279

申请日：2006-06-15

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  DAVIS HENRY

IPC: G02B6/12

CPC classification number: G02B6/43 ,  B82Y20/00 ,  H01J25/00

Abstract: A multi-chip module includes a plurality of chips; and a wavelength multiplexed optical connector, wherein at least some of the chips are optically interconnected via the wavelength multiplexed connector. Some of the chips have one or more nano-resonant structures constructed and adapted to emit electromagnetic radiation (EMR) in response to excitation by a beam of charged particles; and at least one waveguide conduit constructed and adapted to capture the EMR emitted by the at least one nano-resonant structure. The at least one waveguide conduit of a particular chip optically connects said particular chip to said wavelength multiplexed optical connector.

Abstract translation: 多芯片模块包括多个芯片; 以及波长复用光学连接器，其中至少一些芯片经由波长多路复用连接器光学互连。 一些芯片具有构造并适于响应于带电粒子束的激发而发射电磁辐射（EMR）的一个或多个纳米谐振结构; 以及构造并适于捕获由所述至少一个纳米谐振结构发射的EMR的至少一个波导导管。 特定芯片的至少一个波导管道将所述特定芯片光学连接到所述波长复用光学连接器。

公开(公告)号：WO2007130093A3

公开(公告)日：2008-08-28

申请号：PCT/US2006022783

申请日：2006-06-12

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK

IPC: H01J43/04

CPC classification number: G01J1/02 ,  G01J1/0271 ,  G01J1/0295 ,  G01J2001/0276 ,  H01J25/00 ,  H01J40/14

Abstract: In order to reduce the exposure of a detector surface 180 of a photo-multiplier 160 to stray charged particles, an off-axis structure is interposed between the resonant structure and the detector surface of the photo-multiplier. By providing the off-axis structure with at least one reflective surface, photons are reflected toward the detector surface of the photo-multiplier while at the same time absorbing stray charged particles. Stray particles may be absorbed by the reflective surface or by any other part of the off- axis structure. The off-axis structure may additionally be provided with an electrical bias and/or an absorbing coating for absorbing stray charged particles.

Abstract translation: 为了减少光电倍增器160的检测器表面180暴露于杂散带电粒子，在谐振结构和光电倍增器的检测器表面之间插入偏轴结构。 通过向离轴结构提供至少一个反射表面，光子被朝向光电倍增管的检测器表面反射，同时吸收杂散带电粒子。 杂散颗粒可以被反射表面或离轴结构的任何其它部分吸收。 离轴结构还可以设置有用于吸收杂散带电粒子的电偏压和/或吸收涂层。

公开(公告)号：WO2007133223A3

公开(公告)日：2008-01-31

申请号：PCT/US2006022675

申请日：2006-06-09

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  MAINES MICHAEL E

IPC: H04B10/00

CPC classification number: H01J25/00 ,  H04B10/803

Abstract: Micro-resonant structures (110) form a part of an optical interconnect system that allows various integrated circuits to communicate with each other without being connected by signal wires. Substrates (105) have mounted thereon integrated circuits which include at least one optical communications section (110). Each optical communications section includes at least one transmitter and/or at least one receiver. Such transmitters may include at least one resonant structure, and such receivers may include a receiver for receiving optical emissions from at least one resonant structure. Substrates may also include, mounted thereon, at least one optical directing element such as a mirror, a lens, or a prism. Optical communications sections may also be isolated from each other using filters.

Abstract translation: 微谐振结构（110）形成光互连系统的一部分，其允许各种集成电路彼此通信，而不用信号线连接。 衬底（105）上已安装有包括至少一个光通信部分（110）的集成电路。 每个光通信部分包括至少一个发射机和/或至少一个接收机。 这样的发射机可以包括至少一个谐振结构，并且这样的接收器可以包括用于从至少一个谐振结构接收光发射的接收器。 衬底还可以包括安装在其上的至少一个光学引导元件，例如镜子，透镜或棱镜。 光通信部分也可以使用滤波器彼此隔离。

公开(公告)号：WO2007130099A2

公开(公告)日：2007-11-15

申请号：PCT/US2006024214

申请日：2006-06-22

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  TOKARZ JEAN ,  GASPAROV LEV

IPC: G02B6/10

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  G02B6/4202

Abstract: A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra- small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.

Abstract translation: 一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。 至少装置的超小型谐振结构部分被真空包装。 超小型谐振结构包括具有传输线的等离子体检测器。 检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电 将沿着金属传输线行进的等离子体波耦合到微电路。 检测器机构可以电连接到底层IC。

公开(公告)号：WO2007040672A3

公开(公告)日：2007-08-23

申请号：PCT/US2006022779

申请日：2006-06-12

Applicant: VIRGIN ISLANDS MICROSYSTEMS

Inventor： GORRELL JONATHAN ,  DAVIDSON MARK ,  MAINES MICHAEL E ,  HART PAUL

IPC: G01K1/08

CPC classification number: H01J25/00

Abstract: A method and apparatus for modulating a beam of charged particles is described in which a beam of charged particles is produced by a particle source and a varying electric field is induced within an ultra-small resonant structure. The beam of charged particles is modulated by the interaction of the varying electric field with the beam of charged particles.

Abstract translation: 描述了一种用于调制带电粒子束的方法和装置，其中由粒子源产生带电粒子束，并且在超小谐振结构内诱发变化的电场。 带电粒子的束通过变化的电场与带电粒子束的相互作用来调制。