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    KINETIC ENERGY ATOM-POWERED ENGINE
    13.
    发明申请
    KINETIC ENERGY ATOM-POWERED ENGINE 审中-公开
    动力能源发动机

    公开(公告)号：WO2013095955A1

    公开(公告)日：2013-06-27

    申请号：PCT/US2012/068540

    申请日：2012-12-07

    Applicant: ERVIN, Lee

    Inventor： ERVIN, Lee

    IPC: F03B17/06 ,  F03G7/00

    CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

    Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。

    Precise definition of transducer electrodes
    15.
    发明授权
    Precise definition of transducer electrodes 有权
    传感器电极的精确定义

    公开(公告)号：US09507142B2

    公开(公告)日：2016-11-29

    申请号：US14410211

    申请日：2013-06-12

    Applicant: SILEX MICROSYSTEMS AB

    Inventor： Peter Agren

    IPC: G02B26/08 ,  H01L23/48 ,  B81B3/00 ,  B81C1/00 ,  G01D5/24 ,  H01L23/522

    CPC classification number: G02B26/0841 ,  B81B3/0021 ,  B81B3/0045 ,  B81B2201/02 ,  B81B2201/03 ,  B81B2203/04 ,  B81C1/00357 ,  B81C1/00619 ,  G01D5/24 ,  G02B26/085 ,  H01L23/481 ,  H01L23/5225 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A semiconductor device, includes a semiconductor substrate (10) having a first (12a) and a second (12b) side. There is provided at least one via (15) extending through the substrate (10) having first (16a) and second (16b) end surfaces, the first end surface (16a) constituting a transducer electrode for interacting with a movable element (14) arranged at the first side (12a) of the substrate (10). A shield (17) is provided on and covers at least part of the first side (12a) of the substrate (10), the shield/mask (17) including a conductive layer (19a) and an insulating material layer (19b) provided between the substrate (10) and the conductive layer (19a). The mask has an opening (18) exposing only a part of the first surface (16a) of the via. Preferably the opening (18) in the mask is precisely aligned with the movable element, and the area of the opening is accurately defined.

    Abstract translation: 半导体器件包括具有第一（12a）和第二（12b）侧的半导体衬底（10）。 提供至少一个通过具有第一（16a）和第二（16b）端面的基板延伸的通孔（15），第一端面（16a）构成用于与可移动元件（14）相互作用的换能器电极， 布置在基板（10）的第一侧（12a）处。 在衬底（10）的第一侧（12a）的至少一部分上设置有屏蔽（17），所述屏蔽/掩模（17）包括导电层（19a）和绝缘材料层（19b） 在所述基板（10）和所述导电层（19a）之间。 掩模具有仅露出通孔的第一表面（16a）的一部分的开口（18）。 优选地，掩模中的开口（18）与可移动元件精确对准，并且开口的区域被精确地限定。

    KINETIC ENERGY ATOM-POWERED ENGINE
    16.
    发明申请
    KINETIC ENERGY ATOM-POWERED ENGINE 审中-公开
    动力能源发动机

    公开(公告)号：US20150226066A1

    公开(公告)日：2015-08-13

    申请号：US14696266

    申请日：2015-04-24

    Applicant: Lee Ervin

    Inventor： Lee Ervin

    IPC: F01D1/18 ,  F01D25/14 ,  F01D25/00

    CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

    Abstract translation: 用于将分子的动能转换为有用功的装置包括致动器，其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体，其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作，例如发电或运输材料。

    Two degree of freedom dithering platform for MEMS sensor calibration
    17.
    发明授权
    Two degree of freedom dithering platform for MEMS sensor calibration 有权
    用于MEMS传感器校准的两自由度抖动平台

    公开(公告)号：US09061891B2

    公开(公告)日：2015-06-23

    申请号：US14508715

    申请日：2014-10-07

    Applicant: Honeywell International Inc.

    Inventor： Ryan Supino ,  Eugen Cabuz ,  Burgess R. Johnson ,  Robert D. Horning

    IPC: G01P21/00 ,  B81C1/00 ,  G01D5/34

    CPC classification number: B81C1/00134 ,  B81B2201/03 ,  B81C2203/03 ,  G01D5/34 ,  G01P21/00 ,  Y10T29/49002

    Abstract: Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

    Abstract translation: 提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。 在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。

    Package structure and method for manufacturing the same
    20.
    发明授权
    Package structure and method for manufacturing the same 有权

    公开(公告)号：US11970388B2

    公开(公告)日：2024-04-30

    申请号：US17550607

    申请日：2021-12-14

    Applicant: Winbond Electronics Corp.

    Inventor： Jin-Neng Wu

    IPC: B81B3/00 ,  B81C3/00

    CPC classification number: B81B3/0018 ,  B81C3/001 ,  B81B2201/0214 ,  B81B2201/03 ,  B81B2203/033 ,  B81B2207/09

    Abstract: A package structure and its manufacturing method are provided. The package structure includes a substrate with a recess, and a first MEMS chip, a first intermediate chip, a second MEMS chip and a first capping plate sequentially formed on the substrate. The lower surface of the first MEMS chip has a first sensor or a microactuator. The upper surface of the second MEMS chip has a second sensor or a microactuator. The first intermediate chip has a through-substrate via, and includes a signal conversion unit, a logic operation unit, a control unit, or a combination thereof. The package structure includes at least one of the first sensor and the second sensor.

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