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公开(公告)号：US20030020904A1
公开(公告)日：2003-01-30
申请号：US10050778
申请日：2002-01-18
Inventor： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
IPC: G01N021/00
CPC classification number: G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
Abstract: The present invention provides a pattern defect inspecting apparatus wherein an amount-of-light monitor unit detects a variation in the amount of ultraviolet laser light during inspection to thereby determine the presence or absence of an influence thereof exerted on the inspection and detects the prediction of the life of a light source and a malfunction thereof, and the interior of an optical system is cleaned up to thereby ensure the prolongation of the life of each optical part and long-term reliability thereof, and a method thereof.
Abstract translation: 本发明提供了一种图案缺陷检查装置，其中光量监视器单元检测检查期间紫外激光量的变化，从而确定其对检查的影响的有无，并检测预测 光源的寿命和故障以及光学系统的内部被清理，从而确保每个光学部件的寿命延长及其长期可靠性及其方法。
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公开(公告)号：US09626753B2
公开(公告)日：2017-04-18
申请号：US14638652
申请日：2015-03-04
Applicant: Tyco Electronics (Shanghai) Co. Ltd. , Tyco Electronics Corporation , Shenzhen AMI Technology Co. Ltd.
Inventor： Yingcong Deng , Dandan Zhang , Roberto Francisco-Yi Lu , Lvhai Hu , Zinglong Zeng
CPC classification number: G06T7/0004 , B07C5/3422 , B07C2501/0063 , B25J9/1697 , G01N21/9515 , G01N2021/9518 , G01N2201/1035 , G01R31/2893 , G05B2219/39106 , G05B2219/45047 , G05B2219/45066 , Y10S901/44 , Y10S901/47
Abstract: A programmable digital machine vision inspection system is disclosed having a programmable automatic feeding system that supplies elements to be inspected, a programmable robot system, a programmable inspection system, a qualified product receiving container, and an unqualified product receiving container. The programmable robot system has a first vision system with an inspection area, and a robot that grips the supplied element and moves the gripped element to and from the inspection area. The programmable inspection system has a second vision system that identifies features of the elements in the inspection area, and determines whether the element is a qualified product based on the identified features. The qualified product receiving container receives identified qualified products from the robot, and the unqualified product receiving container that receives identified unqualified products from the robot.
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公开(公告)号：US08149395B2
公开(公告)日：2012-04-03
申请号：US13069091
申请日：2011-03-22
Applicant: Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
Inventor： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
IPC: G01N21/00
CPC classification number: G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
Abstract: A method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source, illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled, controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light, detecting the light reflected from the specimen, processing the detected light so as to detect defects, and outputting information about the defects. The ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside.
Abstract translation: 用于检查缺陷的方法和装置包括从紫外光源发射紫外光，用受紫外光的偏振条件的紫外线照射样本，控制从被照射的样本反射的光的偏振状态 通过偏光条件控制的紫外光，检测从样本反射的光，处理检测到的光以检测缺陷，并输出关于缺陷的信息。 紫外光源设置在清洁环境中，并提供清洁气体并与外界分离。
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14.发明授权
公开(公告)号：US5030008A
公开(公告)日：1991-07-09
申请号：US255212
申请日：1988-10-11
Applicant: Richard S. F. Scott , Yoram Uziel , Franco A. Filice
Inventor： Richard S. F. Scott , Yoram Uziel , Franco A. Filice
IPC: G01N21/88 , G01N21/93 , G01N21/956 , G01R31/308 , H01L21/00 , H01L21/60 , H01L21/66
CPC classification number: G01R31/308 , G01N21/956 , H01L21/67138 , H01L24/49 , G01N2021/1785 , G01N2201/1035 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/48472 , H01L2224/49112 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01033 , H01L2924/01039 , H01L2924/01054 , H01L2924/01082 , H01L2924/12041 , H01L2924/14 , H01L2924/19042
Abstract: An optomechanical system for illuminating and imaging selected portions of a three dimensional object having specularly reflective surfaces, including a two dimensional image sensor for receiving light reflected from the selected portions and producing an analog output signal representing a two dimensional image of the selected portions over a predetermined time period, a video digitizer for receiving and converting the analog output signal to a digital signal, and an image computer for receiving the digital signal output by the video digitizer, comparing the information obtained from the output digital signal to the stored specifications of a master of the imaged portion of the object, indicating whether the imaged object meets the specifications of the master, controlling the movement of the imaged object, and controlling the operation of the system.
Abstract translation: 一种用于照射和成像具有镜面反射表面的三维物体的选定部分的光学机械系统，包括用于接收从所选部分反射的光的二维图像传感器，并产生表示所选部分的二维图像的模拟输出信号， 用于接收和转换模拟输出信号为数字信号的视频数字转换器，以及用于接收由视频数字转换器输出的数字信号的图像计算机，将从输出数字信号获得的信息与存储的 指示对象的成像部分的主机，指示成像对象是否满足主设备的规格，控制成像对象的移动，以及控制系统的操作。
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15.发明公开
公开(公告)号：EP2915597A1
公开(公告)日：2015-09-09
申请号：EP15157488.6
申请日：2015-03-04
Applicant: Tyco Electronics (Shanghai) Co., Ltd. , Tyco Electronics Corporation , Shenzhen AMI Technology Co. Ltd
Inventor： Deng, Yingcong , Zhang, Dandan , Lu, Robert Francisco-Yi , Hu, Lvhai , Zeng, Zinglong
IPC: B07C5/342 , B25J9/16 , G01R31/28 , G01N21/956 , G07C3/14 , H01L21/67 , H01L21/68 , H01L21/683 , H05K13/08 , G01N21/95 , H01L21/66
CPC classification number: G06T7/0004 , B07C5/3422 , B07C2501/0063 , B25J9/1697 , G01N21/9515 , G01N2021/9518 , G01N2201/1035 , G01R31/2893 , G05B2219/39106 , G05B2219/45047 , G05B2219/45066 , Y10S901/44 , Y10S901/47
Abstract: The present invention discloses a programmable digital machine vision inspection system, comprising: a programmable automatic feeding system configured to supply elements to be inspected; a programmable robot system comprising a robot and a first vision system, wherein the robot configured to grip the element supplied by the programmable automatic feeding system and transmit the gripped element into an inspection area under the guidance of the first vision system; and a programmable inspection system comprising a second vision system configured to identify features of the elements transmitted into the inspection area and determine whether the element is a qualified product based on the identified features. If the element is determined to be a qualified product, the robot places the element into a first container for receiving the qualified product; If the element is determined to be an unqualified product, the robot places the element into a second container for receiving the unqualified product. The programmable digital machine vision inspection system is adapted to inspect different types of elements, and switching between inspection operations of different types of elements is very quickly.
Abstract translation: 本发明公开了一种可编程数字机器视觉检测系统，包括：可编程自动馈送系统，被配置为提供要检查的元件; 一种包括机器人和第一视觉系统的可编程机器人系统，其中所述机器人被配置为夹持由所述可编程自动馈送系统提供的元件，并且在所述第一视觉系统的引导下将所述夹持的元件传送到检查区域; 以及可编程检查系统，包括第二视觉系统，其被配置为识别发送到检查区域中的元件的特征，并且基于所识别的特征来确定元件是否是合格的产品。 如果元件被确定为合格产品，则机器人将元件放置在第一容器中以接收合格产品; 如果该元件被确定为不合格产品，则机器人将元件放入用于接收不合格产品的第二容器中。 可编程数字机器视觉检测系统适用于检查不同类型的元件，并且不同类型元件的检查操作之间的切换非常快。
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Patent Agency Ranking
公开(公告)号：EP0377446A2
公开(公告)日：1990-07-11
申请号：EP90100051.3
申请日：1990-01-02
Applicant: HITACHI, LTD.
Inventor： Ninomiya, Ken , Suzuki, Keizo
IPC: G01N23/227 , G06F19/00
CPC classification number: G01N21/63 , G01N21/1702 , G01N23/22 , G01N2021/178 , G01N2201/1035 , G01N2223/10 , G01N2223/33 , G01N2223/345
Abstract: A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample (2 ) is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.
Abstract translation: 公开了一种用于分析表面的方法和设备，其中测量样品（2）表面处的探测光束的强度分布，通过测量沿样品表面的检测信号的强度分布 用探针光束扫描样品的表面，并对测量的强度分布和测量的信号强度分布中的每一个进行数学变换，以高分辨率进行表面分析。
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公开(公告)号：US20170123083A1
公开(公告)日：2017-05-04
申请号：US15340927
申请日：2016-11-01
Applicant: Robert Divoky
Inventor： Robert Divoky
CPC classification number: G01T1/2985 , A61B6/025 , A61B6/032 , A61B6/4014 , A61B6/4441 , G01N21/6456 , G01N23/046 , G01N2201/1035 , G01N2223/419 , G01T1/2964
Abstract: A tomography system includes a first radiation source and a first detector that is assigned to the first radiation source. The tomography system also includes a second radiation source and a second detector that is assigned to the second radiation source. The tomography system is prepared to perform a scan. In a first plane of rotation, the first detector is guided along a first circular segment-shaped path. In a second plane of rotation, the second detector is guided in synchrony along a second circular segment-shaped path. The tomography system is configured to obtain a first data record with the first detector and a second data record with the second detector. The first plane of rotation and the second plane of rotation are arranged at a distance from one another.
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公开(公告)号：US07911601B2
公开(公告)日：2011-03-22
申请号：US12263682
申请日：2008-11-03
Applicant: Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
Inventor： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
IPC: G01N21/00
CPC classification number: G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
Abstract: A method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source, illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled, controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light, detecting the light reflected from the specimen, processing the detected light so as to detect defects, and outputting information about the defects. The ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside.
Abstract translation: 用于检查缺陷的方法和装置包括从紫外线光源发射紫外光，用紫外光的紫外线照射样本，其中控制紫外光的偏振条件，控制从被照射的样本反射的光的偏振状态 通过偏光条件控制的紫外光，检测从样本反射的光，处理检测到的光以检测缺陷，并输出关于缺陷的信息。 紫外光源设置在清洁环境中，并提供清洁气体并与外界分离。
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公开(公告)号：US20090066943A1
公开(公告)日：2009-03-12
申请号：US12263682
申请日：2008-11-03
Applicant: Sachio UTO , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
Inventor： Sachio UTO , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
IPC: G01N21/956
CPC classification number: G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
Abstract: A method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source, illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled, controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light, detecting the light reflected from the specimen, processing the detected light so as to detect defects, and outputting information about the defects. The ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside.
Abstract translation: 用于检查缺陷的方法和装置包括从紫外光源发射紫外光，用受紫外光的偏振条件的紫外线照射样本，控制从被照射的样本反射的光的偏振状态 通过偏光条件控制的紫外光，检测从样本反射的光，处理检测到的光以检测缺陷，并输出关于缺陷的信息。 紫外光源设置在清洁环境中，并提供清洁气体并与外界分离。
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公开(公告)号：US20060256328A1
公开(公告)日：2006-11-16
申请号：US11488620
申请日：2006-07-19
Applicant: Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
Inventor： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunzi Maeda , Atsushi Shimoda
IPC: G01N21/88
CPC classification number: G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
Abstract: An apparatus for inspecting defects including a table which mounts a specimen to be inspected and which is movable in a plane, an ultraviolet light source for emitting ultraviolet light, an illuminating unit for illuminating the specimen mounted on the table with light emitted from the ultraviolet light source, a detecting unit for forming an image of the specimen illuminated by the illuminating unit and for detecting the image with an image sensor, and an image processing unit for processing the image detected by the image sensor and for outputting information about defects detected on the specimen. The illuminating unit and detecting unit are disposed in a clean environment which is supplied therein with clean gas and which is separated from outside by a wall.
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