Abstract:
The invention relates to a collector for lighting systems having a wavelength ≤ 193 nm, preferably ≤ 126 nm, more preferably EUV wavelengths for receiving light from a light source via an aperture on the side of the object, and for illuminating a region on an image plane, comprising a plurality of rotationally symmetrical mirror shells respectively comprising at least one first mirror segment having one first optical surface,said mirror shells being arranged about a common axis of rotation and an annular aperture element of the aperture on the side of the object being associated with each mirror shell; a beginning and end point on a meridional plane are associated with the first optical surface, the meridional plane is a plane which includes the axis of rotation and the beginning point of the first optical surface on the meridional plane defines an outer edge beam and the endpoint of the first optical surface defines an inner edge beam, the inner and outer edge beams when rotated about the axis of rotation defining a brush discharge which is reflected on at least the first optical surface of the mirror shells and which runs through the collector from the aperture on the side of the object to the plane to be illuminated. The brush discharge defines a used area between at least two adjacent mirror shells. The invention is characterized in that the surface parameters and the position of the mirror shells are selected in such a way that at least one unused area is formed between at least two adjacent mirror shells.
Abstract:
A window material, which has a high thermal conductivity material layer having a thermal conductivity of at least 10 W/cm·K and which has a cooling medium flow path on or in the high thermal conductivity material layer, has a high heat-dissipating property and a high transmittance.
Abstract:
An optical element includes a first layer (4) that includes a first material, and is configured to be substantially reflective for radiation of a first wavelength and substantially transparent for radiation of a second wavelength. The optical element includes a second layer (2) that includes a second material, and is configured to be substantially absorptive or transparent for the radiation of the second wavelength. The optical element includes a third layer (3) that includes a third material between the first layer and the second layer, and is substantially transparent for the radiation of the second wavelength and configured to reduce reflection of the radiation of the second wavelength from a top surface of the second layer facing the first layer. The first layer is located upstream in the optical path of incoming radiation with respect to the second layer in order to improve spectral purity of the radiation of the first wavelength.
Abstract:
Die Erfindung betrifft einen Kollektor für Beleuchtungssysteme mit einer Wellenlänge ≤ 193 nm, bevorzugt ≤ 126 nm, besonders bevorzugt EUV-Wellenlängen mit
einer objektseitigen Apertur, die von einer Lichtquelle abgestrahltes Licht aufnimmt, einer Vielzahl von rotationssymmetrischen Spiegelschalen, welche um eine gemeinsame Rotationsachse ineinander angeordnet sind, wobei jeder Spiegelschale ein Ringaperturelement der objektseitigen Apertur zugeordnet ist, einen auszuleuchtenden Bereich in einer Ebene, der aus Ringelementen besteht, wobei jedem Ringelement ein Ringaperturelement zugeordnet ist,
dadurch gekennzeichnet, daß
die Ringaperturelemente nicht überlappen die Ringelemente nicht überlappen und in der Ebene weitgehend kontinuierlich aneinander anschließen und die Ausdehnungen in Richtung der Rotationsachse, die Flächenparameter und die Positionen der Spiegelschalen derart gestaltet sind, daß die Bestrahlungsstärken der einzelnen Ringelemente in der Ebene weitgehend übereinstimmen.