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公开(公告)号:CN101083239A
公开(公告)日:2007-12-05
申请号:CN200710109255.1
申请日:2007-05-25
Applicant: 万国半导体股份有限公司
IPC: H01L23/485 , H01L21/60
CPC classification number: H01L24/05 , H01L24/03 , H01L24/45 , H01L24/48 , H01L2224/02166 , H01L2224/04042 , H01L2224/05017 , H01L2224/05073 , H01L2224/05124 , H01L2224/05147 , H01L2224/05556 , H01L2224/05624 , H01L2224/0603 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48624 , H01L2224/48724 , H01L2224/48824 , H01L2224/85201 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/01068 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/13091 , H01L2924/00014 , H01L2924/00
Abstract: 本发明披露了一种与Cu焊接相容的焊接垫板结构和相应的方法。该器件焊接垫板结构包括一种过渡缓冲结构,由各互连金属区和各不导电钝化材料区构成,该过渡缓冲结构提供了对于下埋各层和器件结构的缓冲隔离。
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公开(公告)号:CN100339986C
公开(公告)日:2007-09-26
申请号:CN03120225.X
申请日:2003-03-07
Applicant: 株式会社日立制作所 , 日立超大规模集成电路系统株式会社
CPC classification number: H01L24/05 , H01L23/53223 , H01L24/03 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05554 , H01L2224/05556 , H01L2224/05624 , H01L2224/45015 , H01L2224/45144 , H01L2224/4807 , H01L2224/48091 , H01L2224/48095 , H01L2224/48227 , H01L2224/48453 , H01L2224/48465 , H01L2224/48507 , H01L2224/48624 , H01L2224/49175 , H01L2224/78301 , H01L2224/85045 , H01L2224/85181 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01047 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01079 , H01L2924/014 , H01L2924/04941 , H01L2924/0496 , H01L2924/05042 , H01L2924/1306 , H01L2924/14 , H01L2924/181 , H01L2924/20106 , H01L2924/20305 , H01L2924/20306 , H01L2924/20307 , H01L2924/20308 , H01L2924/20752 , H01L2924/3011 , H01L2924/00014 , H01L2924/04953 , H01L2924/00 , H01L2924/20751 , H01L2924/00012
Abstract: 提供一种半导体器件,该半导体器件包括形成于半导体芯片上的第一金属膜,形成于所述第一金属膜上并由第二金属形成的球部分,以及所述第一金属和所述第二金属的合金层,该合金层在所述第一金属膜和所述球部分之间形成,其中所述合金层达到所述第一金属膜的底部,并且所述球部分用树脂覆盖;以及该半导体器件的制造方法。本发明使得能够改进键合焊盘部分和互连上键合线的球部分之间的粘附,从而提高半导体器件的可靠性。
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公开(公告)号:CN1957455A
公开(公告)日:2007-05-02
申请号:CN200580016536.1
申请日:2005-03-23
Applicant: 德克萨斯仪器股份有限公司
CPC classification number: H01L24/05 , H01L24/03 , H01L24/45 , H01L24/48 , H01L2224/02126 , H01L2224/04042 , H01L2224/05073 , H01L2224/05147 , H01L2224/05157 , H01L2224/05166 , H01L2224/0518 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05624 , H01L2224/45144 , H01L2224/48463 , H01L2224/48624 , H01L2224/85201 , H01L2924/01005 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01061 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04953 , H01L2924/05042 , H01L2924/14 , H01L2924/181 , H01L2924/19043 , H01L2924/3025 , H01L2924/00014 , H01L2924/04941 , H01L2924/00
Abstract: 一种用于集成电路(IC)接触点的金属结构,所述集成电路具有铜互连涂敷金属(311)。该涂敷金属的一部分(301)被暴露以向IC提供接触点。导电阻挡层(330)被置于铜涂敷金属的暴露部分上。厚度优选为约0.4至1.4微米之间的可焊金属接头(350)被置于到阻挡层上。保护性的防护层(320)包围着接头,而且其厚度(320b)使得接头的暴露表面(322)位于防护层的暴露表面(320a)处或之下。可选地,所述防护层的宽度为约0.1至0.3微米之间的一部分(321)可重叠在接头的周界上。
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公开(公告)号:CN1879208A
公开(公告)日:2006-12-13
申请号:CN200380110704.4
申请日:2003-11-18
Applicant: 国际商业机器公司
IPC: H01L21/44 , H01L21/48 , H01L21/50 , H01L21/302 , H01L21/461
CPC classification number: H01L24/05 , H01L24/45 , H01L24/48 , H01L24/85 , H01L2224/04042 , H01L2224/05109 , H01L2224/05147 , H01L2224/05155 , H01L2224/05176 , H01L2224/05556 , H01L2224/05558 , H01L2224/05644 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/45015 , H01L2224/45144 , H01L2224/48463 , H01L2224/48644 , H01L2224/48655 , H01L2224/48664 , H01L2224/48669 , H01L2224/85201 , H01L2224/85205 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01044 , H01L2924/01046 , H01L2924/0105 , H01L2924/01076 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04953 , H01L2924/05042 , H01L2924/14 , H01L2924/20754 , H01L2924/00014 , H01L2924/00 , H01L2924/00015
Abstract: 本发明公开了形成输入-输出(I/O)结构的方法,其中通过在凹槽(25)中选择性形成的第一导电阻挡层(102)覆盖具有在第一介质层(10)中的凹槽(25)的底部暴露的铜导电部分(20)的衬底。在衬底表面上形成第二介质(105),优选有机聚合物例如聚酰亚胺,并且在第二介质(105)中形成第二凹槽(27)以使第一导电阻挡层(102)的至少一部分暴露。保形沉积第二导电阻挡层(107),之后保形沉积籽晶层(109),二者均在真空下沉积以确保籽晶层(109)与第二导电阻挡层(107)的附着。选择性除去凹槽(27)外部的籽晶层(107),之后镀覆含镍金属(113)和随后镀覆贵金属(115),其将在凹槽(27)中的籽晶层(107)的剩余部分上,而不在第二导电阻挡层(107)镀覆。通过低偏置功率RIE从暴露的场区域除去第二导电阻挡层(107)。本发明提供了形成用于探针测试和布线接合的I/O结构的低成本方法,而不损坏下面的器件和降低芯片的面积。
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公开(公告)号:CN1717294A
公开(公告)日:2006-01-04
申请号:CN200480000776.8
申请日:2004-07-22
Applicant: 库利克-索法投资公司
IPC: B23K20/00
CPC classification number: H01L24/85 , B23K20/004 , B23K20/007 , B23K2101/32 , H01L24/45 , H01L24/48 , H01L24/78 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48451 , H01L2224/78302 , H01L2224/85201 , H01L2224/85205 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01039 , H01L2924/0104 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04953 , H01L2924/14 , H01L2924/351 , H01L2924/00014 , H01L2924/00 , H01L2924/20751 , H01L2924/20752 , H01L2924/00015
Abstract: 一种用于将细焊丝焊接在具有非常细小间距的焊盘上的焊具。该焊具包括一位于其一端部处的工作顶端。该工作顶端包括一形成于其端部的内部处的内部环形斜面,该内部环形斜面具有小于大约60度的角度。该内部环形斜面与形成在该焊具中的一圆柱形通道的下部连接。
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公开(公告)号:CN1572382A
公开(公告)日:2005-02-02
申请号:CN200410046055.2
申请日:2004-06-03
Applicant: 先进自动器材有限公司
IPC: B06B1/06
CPC classification number: H01L24/85 , B06B3/00 , B23K20/106 , B23K2101/40 , H01L24/45 , H01L24/78 , H01L2224/45124 , H01L2224/45144 , H01L2224/78313 , H01L2224/85201 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082 , H01L2924/3011 , H01L2224/48 , H01L2924/00 , H01L2924/00015
Abstract: 本发明提供了一种用于接合装置的超声波发生器装置,其包含有:接合工具,其安装于放大角体上,该放大角体固定在第一和第二超声波发生设备之间。本发明还提供了一种用于接合装置的形成发生器的方法,其包含有下述步骤:提供一放大角体;将第一和第二超声波发生设备固定于该放大角体上,以便于该放大角体设置于所述的第一和第二超声波发生设备之间;以及将接合工具安装于该放大角体上。
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公开(公告)号:CN1151009C
公开(公告)日:2004-05-26
申请号:CN96195559.7
申请日:1996-05-24
Applicant: 福姆法克特公司
IPC: B23K31/02
CPC classification number: H05K3/4015 , B23K20/004 , B23K2101/40 , C23C18/1605 , C25D5/08 , C25D5/22 , C25D7/12 , C25D21/02 , G01R1/06711 , G01R1/06727 , G01R1/07357 , G01R3/00 , H01L21/4853 , H01L21/4889 , H01L21/563 , H01L22/20 , H01L23/49811 , H01L23/66 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/45 , H01L24/72 , H01L24/81 , H01L25/0652 , H01L25/16 , H01L2224/0401 , H01L2224/04042 , H01L2224/05644 , H01L2224/05647 , H01L2224/06136 , H01L2224/11003 , H01L2224/1147 , H01L2224/13099 , H01L2224/13111 , H01L2224/16145 , H01L2224/45014 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48644 , H01L2224/48647 , H01L2224/48747 , H01L2224/48844 , H01L2224/48847 , H01L2224/73203 , H01L2224/81801 , H01L2224/85201 , H01L2224/85205 , H01L2225/0651 , H01L2225/06527 , H01L2225/06555 , H01L2225/06572 , H01L2924/0001 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01039 , H01L2924/01042 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01051 , H01L2924/01057 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/14 , H01L2924/1532 , H01L2924/15787 , H01L2924/181 , H01L2924/19041 , H01L2924/30107 , H01L2924/3011 , H01L2924/3025 , H05K1/141 , H05K3/20 , H05K3/326 , H05K3/3421 , H05K3/368 , H05K2201/1031 , H05K2201/10318 , H05K2201/10757 , H05K2201/10878 , Y02P70/611 , H01L2924/00 , H01L2224/48744 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20755 , H01L2924/20756 , H01L2924/20757 , H01L2924/2075 , H01L2924/20754 , H01L2224/05599
Abstract: 首先可将一些互连元件(752)和/或一些互连元件(752)的接点结构(770)制备在牺牲基片(702)上,以便随后固定到电子零件(784)上。这样,在制备过程中电子零件(784)就不会“处于危险”之中。该牺牲基片(702)在互连元件(752)之间建立了一预定的间隔关系,这些互连元件可以是以较软的细长件(752)为芯并有一较硬(弹性材料)涂层(754)的复合互连元件(752)。互连元件(752)可以制备在接点结构(770)上,也可首先固定到电子零件(784)和这接点结构(770)上,这接点结构是与互连元件(752)的自由端相连接的。本发明还介绍了做成悬臂式的接点结构(770)。
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公开(公告)号:CN1329362A
公开(公告)日:2002-01-02
申请号:CN01104551.5
申请日:2001-02-15
Applicant: 三洋电机株式会社
CPC classification number: H01L25/16 , H01L21/4832 , H01L23/3107 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L2221/68377 , H01L2224/04042 , H01L2224/05556 , H01L2224/05624 , H01L2224/05647 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48464 , H01L2224/48465 , H01L2224/48472 , H01L2224/48624 , H01L2224/48647 , H01L2224/48724 , H01L2224/48747 , H01L2224/49171 , H01L2224/73265 , H01L2224/85201 , H01L2224/85205 , H01L2224/85424 , H01L2224/85447 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01059 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/12035 , H01L2924/12036 , H01L2924/12042 , H01L2924/1301 , H01L2924/13055 , H01L2924/14 , H01L2924/15787 , H01L2924/181 , H01L2924/18301 , H01L2924/19041 , H01L2924/19043 , H01L2924/19105 , H01L2924/2076 , H05K1/185 , H05K3/06 , H05K3/202 , H01L2924/00 , H01L2924/00012 , H01L2924/20754 , H01L2924/00015
Abstract: 已存在有在印刷电路板、陶瓷板、软性板等上装配电路装置的混合集成电路装置。但其中具有大量电路元件,其中的半导体元件要用多种金属细线来焊接。例如将小信号系列的电路用的半导体元件和连接它们的Au线形成1个组件,作为半导体装置(30A等)。这就省略Au的焊接,仅进行小直径的Al线和大直径的Al线的焊接,即可完成金属细线的连接。这些半导体装置是以多个电路元件形成1个组件,所以也大幅度减少向装配基板上的固定次数。
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公开(公告)号:CN1310476A
公开(公告)日:2001-08-29
申请号:CN01101526.8
申请日:2001-01-21
Applicant: 朗迅科技公司
IPC: H01L23/522 , H01L21/768 , H01L21/3205 , H01L21/28
CPC classification number: H01L24/48 , H01L23/53238 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/45 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05181 , H01L2224/05546 , H01L2224/05556 , H01L2224/05624 , H01L2224/13099 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48624 , H01L2224/48699 , H01L2224/48724 , H01L2224/48799 , H01L2224/48824 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/04953 , H01L2924/05042 , H01L2924/10329 , H01L2924/14 , H01L2924/19043 , H01L2924/30105 , H01L2924/00014 , H01L2224/78 , H01L2924/00 , H01L2924/00015
Abstract: 一种用于集成电路连接的结构,其导体主要由铜构成且具有第一导体段,该导体段形成在集成电路结构上且包括一个用于电连接的接触区。一传导阻挡层形成在该接触区上,用于减缓铜原子从接触区到另一导体材料迁移。一传导接触层形成在该阻挡层上,使该阻挡层位于接触区和接触层之间。以此结构,主要由Au构成的接合线可以机械地连接传导层穿过阻挡层电连接到连接盘。根据本发明的优选实施例,该传导接触层是铝连接盘且该阻挡层是难熔金属或难熔金属的化合物。
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公开(公告)号:CN1307363A
公开(公告)日:2001-08-08
申请号:CN01110846.0
申请日:2001-01-12
Applicant: 三菱电机株式会社
IPC: H01L23/50 , H01L23/522 , H01L21/768 , H01L21/60
CPC classification number: H01L24/48 , H01L24/03 , H01L24/05 , H01L24/45 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05073 , H01L2224/05093 , H01L2224/05124 , H01L2224/05647 , H01L2224/05669 , H01L2224/16 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48647 , H01L2224/48669 , H01L2224/48747 , H01L2224/48769 , H01L2224/48799 , H01L2224/48847 , H01L2224/48869 , H01L2224/7865 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2224/85375 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01068 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/13091 , H01L2924/14 , H01L2924/181 , H01L2924/19042 , H01L2924/19043 , H01L2224/78 , H01L2924/00 , H01L2924/00015
Abstract: 提供防止高集成化的半导体器件的焊盘电极的表面氧化,与外部端子的连接强度高的半导体器件。一种半导体器件,配有用于连接外部电极的焊盘电极和与该焊盘电极连接的多层布线结构,覆盖该焊盘电极、在该焊盘电极上有开口部并使该焊盘电极的表面露出的绝缘膜的单面与贵金属和从以该贵金属为主要成分的金属中选择的一种贵金属材料组成的金属面连接。
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