公开(公告)号：US20040089232A1

公开(公告)日：2004-05-13

申请号：US10622340

申请日：2003-07-18

Inventor： Koji Sasaki ,  Hironobu Narui ,  Katsunori Yanashima ,  Sadao Tanaka ,  Akihiko Memezawa

IPC: B05B001/28 ,  B05B015/04 ,  B05C009/08

CPC classification number: C23C14/24 ,  C23C14/042 ,  C23C14/12 ,  C23C14/228 ,  H01L51/001 ,  H01L51/56

Abstract: The organic raw material is vaporized to generate the raw material gas in the vaporizing chamber. This raw material gas is mixed with the carrier gas, and transported to the chamber through the raw material gas transportation pipe. The substrate is held within the chamber while the organic film formation surface of the substrate does not face downward in a vertical direction straight up from the ground. The injector of the raw material gas is opposed to the substrate. The raw material gas is blasted from the direction orthogonal to the substrate. Particles fall without adhering to the substrate when holding the substrate in the vertical direction. The deformation of the substrate and the mask for separately painting pixels can be suppressed.

Abstract translation: 有机原料蒸发以在蒸发室中产生原料气体。 该原料气体与载气混合，通过原料气体输送管路输送到室。 衬底保持在腔室内，而衬底的有机膜形成表面在垂直方向上从地面向下不面向下。 原料气体的喷射器与基板相对。 从与基板正交的方向喷射原料气体。 当在垂直方向上保持基板时，颗粒落下而不粘附到基板上。 可以抑制基板和用于单独绘制像素的掩模的变形。

公开(公告)号：US20040086657A1

公开(公告)日：2004-05-06

申请号：US10694170

申请日：2003-10-28

Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA

Inventor： Tooru Inoue ,  Akihiro Goto

IPC: H02J001/00 ,  H01F041/00 ,  B05D001/04 ,  B05C009/08

CPC classification number: C23C26/00 ,  B05D1/62 ,  B05D3/141 ,  C25D5/18 ,  C25D17/00 ,  C25D21/12

Abstract: In a power supply apparatus for discharge surface treatment which uses a green compact electrode as a discharge electrode, allows a pulse-type discharge to take place between said discharge electrode and a workpiece, and forms a film, which is made of an electrode material or a material obtained when the electrode material reacts to a discharge energy, on a surface of the workpiece following three measures are taken. (1) When a discharge voltage detected by the voltage detection means is less than or equal to discharge detection voltage set value which is slightly lower than a power supply voltage, the electric current cut-off means forcibly cuts off an output of the oscillator so that long-time pulse is prevented. (2) A capacitor is connected in parallel with an oscillation circuit of the oscillator, and the long-time pulse is prevented by capacitor discharge. (3) Time that the discharge takes place once is controlled by a timer so that the long-time pulse is prevented.

公开(公告)号：US20030094375A1

公开(公告)日：2003-05-22

申请号：US09989469

申请日：2001-11-21

Applicant: Hitachi Kyowa Engineering Co., Ltd.

Inventor： Hiroyuki Kadota

IPC: C25D003/48 ,  B05C005/00 ,  B05B005/025 ,  B05C009/08 ,  B05C011/00

CPC classification number: C25D21/14

Abstract: An object of the present invention is to provide a method of monitoring deterioration of an electrolytic gold plating solution which can always stably performing gold plating by continuously detecting a deterioration state of the gold sulfite complex plating solution, and to provide an apparatus for monitoring the deterioration of the electrolytic gold plating solution. The present invention is characterized by an electrolytic gold plating method for performing electrolytic gold plating on a surface of a substrate body using a gold sulfite plating solution, wherein the gold plating is performed while deterioration of the plating solution is being always or intermittently detected during plating. Further, the present invention is characterized by an electrolytic gold plating apparatus for performing electrolytic gold plating on a surface of a substrate body using a gold sulfite plating solution, which comprises a detecting means for always or intermittently detecting deterioration of the plating solution and a monitoring unit for displaying the deterioration degree.

Abstract translation: 本发明的目的是提供一种监测电解镀金液的劣化的方法，其通过连续检测亚硫酸复合镀液的劣化状态，可以始终稳定地进行镀金，并提供一种用于监测劣化的装置 的电解镀金液。 本发明的特征在于一种电镀金电镀方法，用于使用亚硫酸亚铁电镀液在基体表面上进行电解镀金，其中在电镀期间总是或间歇地检测到电镀溶液的劣化的同时执行镀金 。 此外，本发明的特征在于一种用于使用亚硫酸亚铁电镀液在基体表面上进行电解镀金的电解镀金装置，其包括用于总是或间歇地检测电镀液劣化的检测装置和监测 显示劣化程度的单位。

公开(公告)号：US20020073921A1

公开(公告)日：2002-06-20

申请号：US09954716

申请日：2001-09-18

Inventor： Scott T. Russell ,  Kelvin D. Sundeen ,  Keith E. Olson ,  Bryan M. Anderson

IPC: B05C005/00 ,  C08F002/46 ,  B05B005/025 ,  B05C009/08

CPC classification number: E01C23/03 ,  B05D3/067 ,  E04F21/24 ,  F26B3/28

Abstract: A radiation cure device (10) has a removable light housing (25). The cure device (10) utilizes a fixed output power supply (55), a shutter mechanism (30) and is easily maneuverable because of its lighter weight. The light housing (20) is laterally offset and is adjustable in a lateral direction.

Abstract translation: 辐射固化装置（10）具有可拆卸的灯壳体（25）。 固化装置（10）利用固定输出电源（55），快门机构（30），并且由于其较轻的重量而容易操纵。 灯壳（20）横向偏移并且在横向上是可调节的。

公开(公告)号：US20020039624A1

公开(公告)日：2002-04-04

申请号：US09969732

申请日：2001-10-04

Applicant: Dainippon Screen Mfg. Co., Ltd.

Inventor： Manabu Yabe

IPC: C08J007/04 ,  B05C005/00 ,  B05C009/08 ,  B05B005/025

CPC classification number: H01J9/242 ,  H01J2211/36

Abstract: Barrier ribs are formed on a back plate moved while a rib material is delivered thereto from a nozzle. Immediately after the rib material is delivered from the nozzle to the back plate, the rib material is irradiated with light to promote curing of the rib material. By promoting curing of the rib material with light emitted immediately after delivery of the rib material, the rib material delivered linearly to the back plate is maintained in shape. The rib forming process is thereby simplified to form barrier ribs with high quality and high accuracy. The rib material is used efficiently to achieve low cost. Besides, the barrier ribs may be formed to have a high aspect ratio.

Abstract translation: 阻挡肋形成在背板上，而肋材料从喷嘴传送到其上。 在将肋材料从喷嘴输送到背板之后，立即用光照射肋材料以促进肋材料的固化。 通过促进在肋骨材料输送后立即发射的光来促进肋材料的固化，将直接输送到背板的肋材料保持形状。 因此，肋形成工艺被简化成具有高质量和高精度的障壁。 有效利用肋材料以实现低成本。 此外，障壁可以形成为具有高纵横比。

公开(公告)号：US20020034594A1

公开(公告)日：2002-03-21

申请号：US09851720

申请日：2001-05-09

Inventor： James Thomas Shiveley

IPC: B05D003/06 ,  B05C005/00 ,  B05C009/08

CPC classification number: B05D3/0209 ,  B05D3/0263 ,  B05D3/067

Abstract: Apparatus and method for curing coating on articles using multi wavelength IR and UV energy sources, which can be pulsed in a system for analyzing and producing in-line programmed production of the finished product.

Abstract translation: 使用多波长IR和UV能源固化在物品上的涂层的装置和方法，其可以在用于分析和生产成品的在线编程生产的系统中被脉冲。

公开(公告)号：US20020018966A1

公开(公告)日：2002-02-14

申请号：US09964660

申请日：2001-09-28

Inventor： Satoshi Tanioka ,  Shizuo Murata ,  Makoto Kono ,  Masayuki Hirano

IPC: G02F001/1337 ,  B05C009/08

CPC classification number: G02F1/13378 ,  B05C9/14 ,  G02F1/133784 ,  G02F1/133788 ,  Y10S430/168

Abstract: Disclosed is a method for producing liquid crystal display devices comprising a step for forming a transparent electrode and a circuit element of semiconductor on the surface of a pair of transparent substrates, and various steps for applying a photoresist, exposing to the light, etching, releasing the photoresist, inspecting the electrodes and circuit elements of semiconductor, forming an insulating film, forming an alignment film, rubbing the alignment film, spreading spacers, applying a sealing agent, fabricating a cell, filling a liquid crystal, pasting a polarizing plate, and connecting a driver IC characterized in that a soft X-ray is irradiated to the substrate in at least one step prior to the rubbing of the alignment films to produce liquid crystal display devices, at a high yield, in which devices number of pixel defect is small.

Abstract translation: 公开了一种用于制造液晶显示装置的方法，包括在一对透明基板的表面上形成透明电极和半导体的电路元件的步骤，以及用于施加光致抗蚀剂，暴露于光，蚀刻，释放的各种步骤 光致抗蚀剂，检查半导体的电极和电路元件，形成绝缘膜，形成取向膜，摩擦取向膜，铺展间隔物，施加密封剂，制造电池，填充液晶，粘贴偏光板和 连接驱动器IC，其特征在于，在摩擦定向膜之前至少一个步骤中将软X射线照射到基板上，以高产率制造液晶显示装置，其中像素缺陷的数量是 小。