公开(公告)号：US20010013579A1

公开(公告)日：2001-08-16

申请号：US09813396

申请日：2001-03-21

Inventor： Bruce A. Andrien JR. ,  Craig M. Whitehouse ,  Shida Shen ,  Michael A. Sansone

IPC: H01J027/00

CPC classification number: H01J49/107 ,  H01J49/0009 ,  H01J49/0431 ,  H01J49/165

Abstract: Multiple sample introduction means have been configured in Atmospheric Pressure Ion sources which are interfaced to mass analyzers. Different samples can be introduced through multiple Electrospray (ES) or Atmospheric Pressure Chemical Ionization (APCI) probes individually or simultaneously and ionized. The gas phase ion mixture resulting from individual solutions sprayed from multiple ES or APCI probe inputs is mass analyzed. In this manner a calibration solution can be introduced through one ES or APCI probe while one or more sample solutions are spray from additional probes. Simultaneous spraying of calibration and sample solutions, results in an acquired mass spectrum containing peaks of ions with known molecular weights as well as sample related peaks. The calibration peaks can be used as an internal calibration standard during data analysis. Acquisition of mass spectra containing internal calibration peaks can be achieved by spraying different solutions simultaneously from multiple inlet probes without having to mix calibration and sample solutions in the liquid phase. Arrangements of ES and APCI probes can be configured in one API source chamber and the solution flow through any combination of ES or APCI probes can be switched on or off during an analytical run. A single mass analyzer can serve as a detector for multiple separation systems each delivering sample solution through separate ES or APCI inlet probes into an atmospheric pressure ion source.

Abstract translation: 在大气压离子源中配置了多个样品引入装置，它们与大量分析仪接口。 可以通过多个电喷雾（ES）或大气压化学电离（APCI）探针单独或同时引入不同的样品并进行电离。 从来自多个ES或APCI探头输入喷雾单个溶液所得的气相离子的混合物质量分析。 以这种方式，可以通过一个ES或APCI探针引入校准溶液，同时从另外的探针喷射一种或多种样品溶液。 同时喷射校准和样品溶液，得到包含已知分子量的离子峰以及样品相关峰的获得质谱。 校准峰可以用作数据分析过程中的内部校准标准。 通过从多个入口探针同时喷射不同的溶液而无需在液相中混合校准和样品溶液，可以获得含有内部校准峰的质谱。 可以在一个API源室中配置ES和APCI探针的安排，并且可以在分析运行期间打开或关闭通过ES或APCI探针的任意组合的溶液流。 单个质量分析仪可用作多个分离系统的检测器，每个分离系统将样品溶液通过单独的ES或APCI入口探针输送到大气压离子源。

公开(公告)号：US20040238754A1

公开(公告)日：2004-12-02

申请号：US10489305

申请日：2004-03-17

Inventor： Vladimir I. Baranov ,  Alexandre V. Loboda ,  Christopher M. Lock

IPC: H01J027/00

CPC classification number: H01J49/0418 ,  H01J49/0481

Abstract: Collisional cooling of ions in mass spectrometry has been known for sometime. It is known that collisional cooling can promote focusing of ions along the axis of an ion guide. A similar technique has been used to enhance coupling of a pulsed ion source such as a MALDI source to a Time of Flight instrument. It is now realized that it is desirable to provide, immediately adjacent to a MALDI or other ion source, a low-pressure region to promote ionization conditions most favorable for the particular ion source. Then, with the ions released and free, the ions are subjected to relatively rapid collisional cooling in a high pressure region adjacent to the ionization region. This will dissipate excess of internal energy in the ions, so as to substantially reduce the incidence of metastable fragmentation of the ions. The ions can then be subjected to conventional mass analysis steps.

Abstract translation: 质谱中离子的碰撞冷却已经有一段时间了。 众所周知，碰撞冷却可促进离子沿离子导向轴的聚焦。 已经使用类似的技术来增强诸如MALDI源的脉冲离子源与飞行时间仪器的耦合。 现在认识到，期望提供紧邻MALDI或其它离子源的低压区域，以促进对于特定离子源最有利的电离条件。 然后，离子释放并游离，离子在与电离区相邻的高压区域进行相对快速的碰撞冷却。 这将消散离子中的过量的内部能量，从而显着降低离子的亚稳碎裂的发生率。 然后可以对离子进行常规的质量分析步骤。

公开(公告)号：US20030160180A1

公开(公告)日：2003-08-28

申请号：US10359601

申请日：2003-02-07

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yutaka Arai ,  Takashi Iwaki

IPC: H01J027/00

CPC classification number: H01J9/027

Abstract: A method of manufacturing an electron source is provided in which the manufacturing steps of the electron source provided with a plurality of surface conduction electron-emitting devices can be simplified and which attains an improvement in electron-emitting characteristics of the respective devices, and a method of manufacturing an image-forming apparatus is also provided. The method of manufacturing an electro source comprising the steps of: providing a substrate on which a plurality of units, each unit including a pair of electrodes and a polymer film of connecting the pair of electrodes, selecting one or more units from the plurality of units, applying a potential difference across the pair of electrodes that is included in each of the selected one or more units, and irradiating light or a particle beam to the polymer film included in each of the selected one or more units in a state of being applied with the potential difference. And, the step of irradiating the light or particle beam is adapted so as to be started after starting the step of applying the potential difference. As a result, a carbon film used for an electron-emitting portion can be formed with a small number of steps in accordance with the manufacturing method.

Abstract translation: 提供一种制造电子源的方法，其中可以简化设置有多个表面传导电子发射器件的电子源的制造步骤，并且可以改善各个器件的电子发射特性，以及一种方法 还提供了制造图像形成装置。 一种制造电源的方法，包括以下步骤：提供一个基板，多个单元，每个单元包括一对电极和连接该对电极的聚合物膜，从多个单元中选择一个或多个单元 在包括在所选择的一个或多个单元中的每一个中的一对电极之间施加电位差，并且以施加的状态将光或粒子束照射到所选择的一个或多个单元中的每一个中包括的聚合物膜 有潜力的差异。 并且，照射光或粒子束的步骤适于在开始施加电位差的步骤之后开始。 结果，根据制造方法，可以以少量的步骤形成用于电子发射部分的碳膜。

公开(公告)号：US20030160179A1

公开(公告)日：2003-08-28

申请号：US10080430

申请日：2002-02-22

Applicant: Taiwn Semiconductor Manufacturing Co., Ltd.

Inventor： Su-Yu Yeh ,  Chi-Bing Chen ,  Cheng-Yi Huang ,  Chao-Jie Tsai ,  Lu-Chang Chen ,  Hsing-Jui Lee

IPC: H01J027/00

CPC classification number: H01J37/08 ,  H01J2237/31701

Abstract: A method for reducing a dinitrogen (N2) ion concentration in an ion implanter including providing an ion implanter having an ion source chamber for producing source ions said ion source chamber surrounded by a plurality of source magnets having a current supply for altering a position of said source ions; providing a gaseous source of material to the ion source chamber for ionization thereby creating a supply of source ions for implantation; creating a supply of source ions to include dinitrogen (N2) ions and nitrogen (N) ions supplied for implantation; and, increasing a current supply to at least one of the plurality of source magnets such that a ratio of dinitrogen (N2) ions to nitrogen (N) ions supplied for implantation is reduced.

Abstract translation: 一种用于降低离子注入机中的二氮（N2）离子浓度的方法，包括提供具有用于产生源离子的离子源室的离子注入机，所述离子源室由多个源极磁体围绕，所述源极磁体具有用于改变所述 源离子; 向离子源室提供气体源以进行电离，从而产生用于注入的源离子供应; 产生源离子供应以包括用于植入的二氮（N 2）离子和氮（N）离子; 并且增加对所述多个源极磁体中的至少一个源的电流供应，使得为了注入而提供的二氮（N 2）离子与氮（N）离子的比例降低。

公开(公告)号：US20030030010A1

公开(公告)日：2003-02-13

申请号：US09924004

申请日：2001-08-07

Inventor： Alexander S. Perel ,  Bo H. Vanderberg

IPC: H01J027/00

CPC classification number: H01J27/08

Abstract: An ion source for an ion implanter is provided, comprising: (i) a sublimator (52) having a cavity (66) for receiving a source material (68) to be sublimated and for sublimating the source material; (ii) a gas injector (104) for injecting gas into the cavity (66); (iii) an ionization chamber (58) for ionizing the sublimated source material, the ionization chamber located remotely from the sublimator; and (iv) a feed tube (62) for connecting the sublimator (52) to the ionization chamber (58). The gas injected into the cavity may be either helium or hydrogen, and is designed to improve the heat transferability between walls (64) of the sublimator (52) and the source material (68).

Abstract translation: 提供了一种用于离子注入机的离子源，包括：（i）升华器（52），具有用于接收待升华的源材料和升华源材料的空腔（66） （ii）用于将气体注入到空腔（66）中的气体注入器（104）; （iii）电离室（58），用于使升华的源材料离子化，远离升华器的离子化室; 和（iv）用于将升华器（52）连接到电离室（58）的进料管（62）。 注入空腔中的气体可以是氦气或氢气，并且被设计成改善升华器（52）的壁（64）和源材料（68）之间的热传递性。

公开(公告)号：US20020162967A1

公开(公告)日：2002-11-07

申请号：US09847165

申请日：2001-05-01

Applicant: Bechtil BWTX Idaho, LLC

Inventor： David A. Atkinson ,  Paul Mottishaw

IPC: H01J027/00

CPC classification number: H01J49/04

Abstract: Methods and apparatus for simultaneous vaporization and ionization of a sample in a spectrometer prior to introducing the sample into the drift tube of the analyzer are disclosed. The apparatus includes a vaporization/ionization source having an electrically conductive conduit configured to receive sample particulate which is conveyed to a discharge end of the conduit. Positioned proximate to the discharge end of the conduit is an electrically conductive reference device. The conduit and the reference device act as electrodes and have an electrical potential maintained between them sufficient to cause a corona effect, which will cause at least partial simultaneous ionization and vaporization of the sample particulate. The electrical potential can be maintained to establish a continuous corona, or can be held slightly below the breakdown potential such that arrival of particulate at the point of proximity of the electrodes disrupts the potential, causing arcing and the corona effect. The electrical potential can also be varied to cause periodic arcing between the electrodes such that particulate passing through the arc is simultaneously vaporized and ionized. The invention further includes a spectrometer containing the source. The invention is particularly useful for ion mobility spectrometers and atmospheric pressure ionization mass spectrometers.

Abstract translation: 公开了在将样品引入分析仪的漂移管之前在光谱仪中同时汽化和离子化样品的方法和装置。 该装置包括具有导电导管的蒸发/电离源，导电导管构造成接收被输送到导管的排放端的样品颗粒。 定位在导管的排放端附近是导电参考装置。 导管和参考装置充当电极并且具有保持在它们之间的电势足以引起电晕效应，这将导致样品颗粒的至少部分同时电离和汽化。 可以维持电势以建立连续的电晕，或者可以将其保持在击穿电位以下，使得在电极附近的点处的颗粒的到达破坏了电位，引起电弧和电晕效应。 电位也可以变化以引起电极之间的周期性电弧，使得通过电弧的颗粒被同时蒸发并电离。 本发明还包括含有源的光谱仪。 本发明对离子迁移谱仪和大气压电离质谱仪特别有用。

公开(公告)号：US20020130271A1

公开(公告)日：2002-09-19

申请号：US10079490

申请日：2002-02-22

Applicant: Kabushiki Kaisha Toshiba

Inventor： Atsushi Murakoshi ,  Kyoichi Suguro

IPC: H01J027/00 ,  G21K005/10 ,  H01J037/08 ,  H01L021/04 ,  H01L021/425

CPC classification number: H01J37/3171 ,  H01L21/26513

Abstract: In an ion implantation method using an ion implantation equipment having an extraction electrode and a post accelerator, ion is uniformly implanted into a shallow region from the surface of a sample by setting an applied volt. of the post accelerator higher than an applied volt. of the extraction electrode.

公开(公告)号：US20020130270A1

公开(公告)日：2002-09-19

申请号：US10095678

申请日：2002-03-12

Inventor： Jaime M. Reyes

IPC: H01J027/00

CPC classification number: H01J37/08 ,  H01J37/3171

Abstract: An oxygen ion containing plasma is generated using a hot filament ion source. The oxygen ions in the plasma come from an oxide source (e.g., a metal oxide) which has a lower free energy of formation than that of the filament metal oxide (e.g., WO3) at the operating temperatures of the ion source. Consequently, oxidation of the filament and other metal components of the arc chamber is limited, or even prevented. Thus, the invention can advantageously lead to longer filament lives as compared to certain conventional processes that generate oxygen plasmas using hot filament sources.

Abstract translation: 使用热丝离子源产生含有离子的等离子体。 在离子源的操作温度下，等离子体中的氧离子来自氧化物源（例如，金属氧化物），其具有比丝状金属氧化物（例如WO 3）的自由能更低的形成能力。 因此，电弧室的细丝和其他金属成分的氧化受到限制，甚至被防止。 因此，与使用热丝源产生氧等离子体的某些常规方法相比，本发明可有利地导致更长的灯丝寿命。

公开(公告)号：US20020117629A1

公开(公告)日：2002-08-29

申请号：US10020005

申请日：2001-12-12

Applicant: JEOL Ltd.

Inventor： Susumu Fujimaki ,  Jun Tamura

IPC: H01J027/00

CPC classification number: H01J49/165

Abstract: An electrospray ion source is fitted with plural spray nozzles. A nebulization gas is supplied to the nozzles. The supply of the nebulization gas to at least a selected one of the spray nozzles is cut off for a given time. The application of the high voltage to the spray nozzle, for which the supply of the nebulization gas is cut off, is synchronously ceased.

Abstract translation: 电喷雾离子源配有多个喷嘴。 雾化气体被供应到喷嘴。 将雾化气体供应至至少一个所选择的一个喷嘴在一定时间内被切断。 对喷雾气体的供给被切断的喷嘴施加高电压同步停止。

公开(公告)号：US20020100876A1

公开(公告)日：2002-08-01

申请号：US10083564

申请日：2002-02-27

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Atsushi Murakoshi ,  Kyoichi Suguro ,  Katsuya Okumura

IPC: H01J027/00

CPC classification number: H01J27/08 ,  H01J27/02 ,  H01J2237/08 ,  H01J2237/31701

Abstract: According to the ion generation method, ion source material composed of an element of desired ions to be generated and I is heated so that vapor of the compound is generated, and the ions are generated by discharging the vapor. The iodide has no corrosiveness, and can be stably ionized. Further, it hardly reacts with oxygen or water and is safe.

Abstract translation: 根据离子产生方法，由要产生的所需离子的元素组成的离子源材料被加热，使得产生化合物的蒸汽，并且通过排出蒸气产生离子。 碘化物没有腐蚀性，可以稳定地电离。 此外，它几乎不与氧气或水反应并且是安全的。