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    栅网固定装置、栅网结构及射频离子源
    12.
    实用新型
    栅网固定装置、栅网结构及射频离子源 有权

    公开(公告)号：CN216120192U

    公开(公告)日：2022-03-22

    申请号：CN202122729063.9

    申请日：2021-11-09

    Applicant: 中山市博顿光电科技有限公司 ,  佛山市博顿光电科技有限公司

    Inventor： 刘伟基 ,  冀鸣 ,  赵刚 ,  易洪波 ,  吴秋生

    IPC: H01J3/38 ,  H01J3/36 ,  H01J3/04

    Abstract: 本申请涉及一种栅网固定装置、栅网结构及射频离子源；其中，栅网固定装置，应用于射频离子源的栅网结构上，所述栅网结构的各个栅网通过紧固件和绝缘件进行固定，所述紧固件与栅网之间通过绝缘件进行绝缘隔离，所述绝缘件外部设置有防护帽，所述防护帽的帽沿与所述栅网固定连接，使得所述绝缘件与外部形成空间隔离；该技术方案，通过在用于对栅网和紧固件与进行绝缘隔离的绝缘件外部设置防护帽，利用防护帽使得绝缘件与外部形成空间隔离，保证绝缘件保护在镀膜沉积的难区，避免栅网之间产生短路情况，保证射频离子源稳定工作。

    射频离子源离子束束径约束器及对应的束径控制装置
    13.
    实用新型
    射频离子源离子束束径约束器及对应的束径控制装置 有权

    公开(公告)号：CN212322948U

    公开(公告)日：2021-01-08

    申请号：CN202020536808.2

    申请日：2020-04-13

    Applicant: 中国兵器科学研究院宁波分院

    Inventor： 李晓静 ,  张旭 ,  赵仕燕 ,  夏超翔 ,  张宁

    IPC: H01J3/12 ,  H01J3/36

    Abstract: 本实用新型涉及射频离子源离子束束径约束器，其特征在于：所述束径约束器包括具有可供离子束穿过的中空结构的底座、多个叶片及驱动机构；所述多个叶片设于底座一端并环绕中空结构呈圆周排布，多个叶片的尾端伸入中空结构所在区域以围合形成可供离子束穿过的光阑，所述驱动机构可驱动叶片的尾端相对叶片排布形成的圆周中心运动以调节光阑大小。本实用新型还涉及一种包括束径约束器的控制装置，采用该装置进行离子束束径控制，操作方便，调节精度好，效率高，而且成本节约。(ESM)同样的发明创造已同日申请发明专利

    STABILIZED ELECTRON MULTIPLIER ANODE
    14.
    发明专利
    STABILIZED ELECTRON MULTIPLIER ANODE 未知

    公开(公告)号：CA2783356A1

    公开(公告)日：2013-01-15

    申请号：CA2783356

    申请日：2012-07-11

    Applicant: BRUKER DALTONICS INC

    Inventor： STEINER URS ,  MOELLER ROY P ,  DEFORD DAVID

    IPC: H01J3/36 ,  H01J49/02

    Abstract: Methods and systems to compensate for distortions created by dynamic voltage applied to an electron multiplier used in mass spectrometry. An electron multiplier has a cathode end accepting ion flow, an opposite emitter end and an interior surface. The electron multiplier produces an electron output from ions colliding with the interior surface. A variable power supply has a voltage output coupled to the cathode end and the emitter end of the electron multiplier. The voltage output changes dynamically to adjust the electron output from the electron multiplier. An anode is located in proximity to the electron multiplier. An electrometer is coupled to the anode in proximity to the electron multiplier to measure the current generated by the electron output. A low pass filter circuit is coupled to the emitter end to the ground of the electrometer to attenuate emitter voltage changes. A bias circuit is coupled to the emitter end to stabilize emitter to anode voltage difference.

    17.
    发明专利
    未知

    公开(公告)号：DE1905296B2

    公开(公告)日：1972-03-23

    申请号：DE1905296

    申请日：1969-02-04

    IPC: H02J3/24 ,  H02J3/36 ,  H01J3/36

    Abstract: 1,247,483. H.V. D.C. converter systems. ALLMANNA SVENSKA ELEKTRISKA A.B. 14 Feb., 1969 [15 Feb., 1968], No. 8086/69. Heading H2F. To suppress oscillations derived from transient disturbances due to load conditions in an A.C. network I (Fig. 1) joined to an A.C. network II by a D.C. transmission link L, deviations in frequency from a nominal value f o are measured at two points in network I and the respective difference values ##1 and ##2 are fed to respective amplifiers having transfer functions F 1 = a1 + b1/p + C 1 /p 2 &c. and F 2 = a 2 + b 2 /p + c 2 /p 2 &c., wherein p is an operator; a, b, c are constants fulfilling the following conditions: a 1 is not equal to zero, a 1 to a 2 differs from zero, b 1 + b 2 = 0, c 1 + c 2 = 0, d 1 + d 2 = 0 &c. The outputs of the amplifiers are fed to summing member E together with a signal from a potentiometer P corresponding to a desired value of an operating magnitude e.g. transmitted current or power. The summing member output is fed to a common regulator R for controlling converters S 1 , S 2 one of which operates as a rectifier and the other as an inverter depending upon the direction of power flow between the networks I and II. The transmitted power of the D.C. link will therefore vary in dependence upon the frequency deviations at the two measuring points, in addition to the normal control set at potentiometer P, and oscillations are thereby suppressed. The amplifier F 1 summing device E, regulator R and potentiometer P are arranged adjacent the converter S 2 and the control signal is transmitted to converter S 1 via a tele-link. Also the signal from F 2 is transmitted to E via a telelink as the first measuring point is adjacent S 2 and the second remote therefrom. The frequency measurements are obtained by measuring the speed of synchronous motors 10, 20 at the respective points. Fig. 2 (not shown) illustrates an arrangement whereby network I is stabilized or supported at two or more points, should the network be sufficiently large. In this case the D.C. link is divided into two branches and the network I into three parts. One branch is connected via a converter S 2 to a part 1 and the other via a converter S 3 to part 2. Fig. 3 (not shown) illustrates an arrangment wherein the network I is connected to two other A.C. networks via two D.C. links.

    Improved mesh scan expansion CRT lens
    18.
    发明公开
    Improved mesh scan expansion CRT lens 失效
    具有网状电极一种用于阴极射线管的电子束的偏转角的扩大透镜。

    公开(公告)号：EP0277758A1

    公开(公告)日：1988-08-10

    申请号：EP88300666.0

    申请日：1988-01-27

    Applicant: TEKTRONIX, INC.

    Inventor： McGlothlan, J. Kirk

    IPC: H01J29/80 ,  H01J3/36 ,  H01J9/14

    CPC classification number: H01J9/14 ,  H01J29/806

    Abstract: Mesh lens (12) for PDA-type cathode-­ray tubes (10) is constructed in a manner that permits deformation into a concavo-convex shape with a substantially shorter radius of curvature than heretofore obtainable with prior art devices. The mesh lens (12) particularly comprises a multitude of interconnected webs (58) forming an array of apertures (60). Each web (58) has opposing ends and a midline (62) extending between those ends. The mesh (12) is configured so that an individual aperture (60) of the array is formed by a set of webs (58) interconnected at their ends. The midline (62) of each web in the undeformed mesh defines a bent line. The mesh can be deformed into a concavo-convex shape having a relatively short radius of curvature. This is so because the individual webs of the mesh respond to the application of deformation forces by initially straightening, thereby effectively delaying the development of tensile stresses in the webs.

    Abstract translation: 目为PDA型阴极射线管（10）以这样的方式被构造透镜（12）没有许可证变形为凹凸形状与现有技术的装置的曲率基本上比迄今可获得的短半径。 网状透镜（12），特别是包括相互连接的连接板中的孔径的阵列（60）形成的大量（58）。 每个腹板（58）具有相对的端部与这些端部之间延伸的中线（62）。 如在阵列的单个孔（60）没有通过相互连接在其端部的一组腹板（58）形成的网格（12）被配置。 在未变形的网格中的每个幅材的中线（62）定义的弯曲线。 网格可以变形为具有曲率的相对短的半径的凹凸形状。 这是因为网格的各个幅材通过最初矫直，从而有效地延缓拉伸应力的发展，在腹板响应变形力的应用。

    Ion implanter and a method of implanting ions
    19.
    发明公开
    Ion implanter and a method of implanting ions 审中-公开
    离子注入器和离子注入的方法

    公开(公告)号：EP1056113A3

    公开(公告)日：2007-02-28

    申请号：EP00303209.1

    申请日：2000-04-17

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Glavish, Hilton F. ,  Gordon, John Stuart

    IPC: H01J37/317 ,  H01J37/30 ,  H01J3/36

    CPC classification number: H01J37/3171 ,  H01J2237/04737

    Abstract: An ion implanter employs two three gap rf accelerator stages to boost the implant energy after mass selection. The electrodes of the accelerator stages have slit-shaped apertures that accommodate high beam current, when the accelerator is in drift mode. By particular choice of the parameters of the accelerator, each stage of the accelerator produces accelerated ions having a relatively small energy spread, even though the acceptance range of the accelerator stage extends over a substantial phase angle of the applied rf voltage. The resulting accelerator is flexible, permitting a wide variation of output energies with good beam dynamics. Ion bunches from the first three gap stage are caused to have the correct flight time to reach the second stage for acceleration by adjusting the speed of the ions while maintaining the rf phase of the fields in the two stages locked to fixed values.

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