中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

608 records (took 0.028 seconds)

    멤스 스위치 및 이의 제조 방법
    194.
    发明公开
    멤스 스위치 및 이의 제조 방법 无效
    MEMS开关及制造方法相同

    公开(公告)号：KR1020120009574A

    公开(公告)日：2012-02-02

    申请号：KR1020100069486

    申请日：2010-07-19

    Applicant: 주식회사 미코

    Inventor： 최정덕 ,  육현미 ,  최진식 ,  박창현

    IPC: H01H59/00 ,  B81B3/00

    CPC classification number: H01H59/0009 ,  B81B3/007 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/019

    Abstract: PURPOSE: A micro-electro-mechanical system(MEMS) switch and a manufacturing method thereof are provided to connect a passive beam to a first terminal by bending a driving beam using an external impact. CONSTITUTION: A micro-electro-mechanical system(MEMS) switch includes a substrate(110), a first terminal(120), a second terminal(130), a support stand, and a driving beam(150). The MEMS switch additionally includes a guide beam(160) for restricting unnecessary motions fluctuated in a particular direction of the driving beam. The MEMS switch performs a switching process which electrically and mutually connects the first terminals using an external impact. The MEMS switch is manufactured through photolithography, evaporation, plating, and plasma-etching processes in order to be formed into a micro size.

    Abstract translation: 目的：提供微机电系统（MEMS）开关及其制造方法，通过使用外部冲击弯曲驱动梁来将无源束连接到第一端子。 构造：微电子机械系统（MEMS）开关包括基板（110），第一端子（120），第二端子（130），支撑架和驱动梁（150）。 MEMS开关另外包括用于限制在驱动光束的特定方向上波动的不必要的运动的引导光束（160）。 MEMS开关执行切换过程，其使用外部冲击电连接第一端子。 通过光刻，蒸发，电镀和等离子体蚀刻工艺制造MEMS开关，以便形成微尺寸。

    ＭＥＭＳ 스위치 및 그 제조방법
    195.
    发明公开
    ＭＥＭＳ 스위치 및 그 제조방법 无效
    MEMS开关及其制造方法

    公开(公告)号：KR1020080001241A

    公开(公告)日：2008-01-03

    申请号：KR1020060059439

    申请日：2006-06-29

    Applicant: 삼성전자주식회사

    Inventor： 홍영택 ,  송인상 ,  이상훈 ,  권상욱 ,  김종석 ,  김재흥

    IPC: B81B7/02 ,  B81B3/00

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

    Abstract: A MEMS(Micro Electro Mechanical System) switch with a movable beam and a manufacturing method thereof are provided to prevent the movable beam from being stuck and to deliver a signal stably by increasing contact force between the movable beam and a signal line. A MEMS switch comprises a substrate(10), at least one signal line(20) and an electrode(30), and a movable beam(40). The signal line and the electrode are formed at the substrate. The movable beam is installed at an upper part of the substrate at a predetermined interval and short-cut from the signal line according to an operation of the electrode. The movable beam includes a body portion(41) and a supporting portion(42). Modulus of the body portion is larger than the modulus of the supporting portion. A manufacturing method the MEMS switch includes a step of forming at least one signal line and the electrodes on the substrate, and a step of installing the movable beam whose modulus of the body portion is larger than the modulus of the supporting portion at the upper part of the substrate.

    Abstract translation: 提供具有可移动光束的MEMS（微电子机械系统）开关及其制造方法，以防止可移动光束被卡住，并通过增加可移动光束与信号线之间的接触力来稳定地传递信号。 MEMS开关包括衬底（10），至少一个信号线（20）和电极（30）以及可移动光束（40）。 信号线和电极形成在基板上。 可移动光束以预定间隔安装在基板的上部，并且根据电极的操作从信号线进行短切。 可动梁包括主体部分（41）和支撑部分（42）。 主体部分的模量大于支撑部分的模量。 MEMS开关的制造方法包括在基板上形成至少一条信号线和电极的步骤，以及安装主体部分的模量大于上部的支撑部分的模量的可移动梁的步骤 的基底。

    电容式开关、信号收发装置及制造方法
    197.
    发明申请
    电容式开关、信号收发装置及制造方法 审中-公开

    公开(公告)号：WO2014146264A1

    公开(公告)日：2014-09-25

    申请号：PCT/CN2013/072938

    申请日：2013-03-20

    Applicant: 华为终端有限公司

    Inventor： 杨雄 ,  曹伯承 ,  王磊

    IPC: H03K17/96

    CPC classification number: B81B3/0072 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/018 ,  H01G5/16 ,  H01H59/0009

    Abstract: 一种电容式开关（33）、信号收发装置及制造方法。该电容式开关包括：第一导电悬臂（11）、第二导电悬臂（12）、衬底（13）以及设置在衬底上的共面波导，该共面波导包括用于传输电信号的第一导体（14）和设置在第一导体两侧作为地线的第二导体（15）和第三导体（16），第一导体上设有绝缘介质层（17），绝缘介质层上设有导电层（18）；第一导电悬臂通过第一固定端（19）与第二导体连接，第二导电悬臂通过第二固定端（20）与第三导体连接。当电容式开关通直流信号时，第一导电悬臂的第一悬空端（24）与导电层连接，第二导电悬臂的第二悬空端（26）与导电层接触。该电容式开关，通过采用悬臂梁分离的结构释放电容式开关中的金属膜桥产生的应力，确保信号的传输质量。

    ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
    198.
    发明申请
    ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR 审中-公开
    从MEMS CAVITY地板消除硅残余物

    公开(公告)号：WO2013020039A2

    公开(公告)日：2013-02-07

    申请号：PCT/US2012/049497

    申请日：2012-08-03

    Applicant: CAVENDISH KINETICS, INC ,  TROY, Brian I. ,  RENAULT, Mickael ,  MAGUIRE, Thomas L. ,  LACEY, Joseph Damian Gordon ,  BOBEY, James F.

    Inventor： TROY, Brian I. ,  RENAULT, Mickael ,  MAGUIRE, Thomas L. ,  LACEY, Joseph Damian Gordon ,  BOBEY, James F.

    IPC: B81C1/00

    CPC classification number: B81C1/00484 ,  B81B3/0008 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2203/0118 ,  B81C2201/0108 ,  H01H1/0036 ,  H01H2001/0089

    Abstract: The present invention generally relates to a MEMS device in which silicon residues from the adhesion promoter material are reduced or even eliminated from the cavity floor. The adhesion promoter is typically used to adhere sacrificial material to material above the substrate. The adhesion promoter is the removed along with then sacrificial material. However, the adhesion promoter leaves silicon based residues within the cavity upon removal. The inventors have discovered that the adhesion promoter can be removed from the cavity area prior to depositing the sacrificial material. The adhesion promoter which remains over the remainder of the substrate is sufficient to adhere the sacrificial material to the substrate without fear of the sacrificial material delaminating. Because no adhesion promoter is used in the cavity area of the device, no silicon residues will be present within the cavity after the switching element of the MEMS device is freed.

    Abstract translation: 本发明一般涉及一种MEMS器件，其中来自粘合促进剂材料的硅残余物从空腔底板减少甚至消除。 粘合促进剂通常用于将牺牲材料粘附到衬底上方的材料上。 粘附促进剂与牺牲材料一起被去除。 然而，粘合促进剂在除去后将空穴中的硅基残留物留下。 发明人已经发现，在沉积牺牲材料之前，可以从空腔区域去除粘合促进剂。 保留在基材的其余部分上的粘合促进剂足以将牺牲材料粘附到基材上，而不用担心牺牲材料分层。 因为在器件的空腔区域中没有使用粘合促进剂，所以在MEMS器件的开关元件被释放之后，腔内将不存在硅残余物。

    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
    199.
    发明申请
    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS 审中-公开
    MEMS扬声器电容式电容器及方法

    公开(公告)号：WO2011088362A3

    公开(公告)日：2011-11-17

    申请号：PCT/US2011021358

    申请日：2011-01-14

    Applicant: WISPRY INC ,  DEREUS DANA

    Inventor： DEREUS DANA

    IPC: H01G5/16 ,  B81B3/00

    CPC classification number: H01G5/18 ,  B81B3/007 ,  B81B2201/014 ,  H02N1/006

    Abstract: The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

    Abstract translation: 本主题涉及MEMS可调电容器和用于操作这种电容器的方法。 可调谐电容器可以在基板上具有主固定致动器电极，在基板上具有次级固定致动器电极，在基板上具有固定RF信号电容器板电极，设置在基板上的弹簧悬臂梁，连接第一端 弹簧悬臂连接到基板，以及一个或多个弹簧或其他偏置构件，将弹簧悬臂的第二端连接到基板，第二端位于远离第一端的位置。 弹簧悬臂可以在由静止和可动执行器电极之间的电位差为零定义的OFF状态和由固定和可动执行器电极之间的非零电位差限定的ON状态之间移动。

    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING
    200.
    发明申请
    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING 审中-公开
    具有最小化光束失真的微电子机械开关梁结构和构造方法

    公开(公告)号：WO2011127120A1

    公开(公告)日：2011-10-13

    申请号：PCT/US2011/031341

    申请日：2011-04-06

    Applicant: ANALOG DEVICES, INC. ,  GOGGIN, Raymond ,  FITZGERALD, Padraig

    Inventor： GOGGIN, Raymond ,  FITZGERALD, Padraig

    IPC: B81B7/04

    CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微机电开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排水连接两端的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在接近铰链的区域中在基板和锚固件之间具有间隙。

Patent Agency Ranking